Method and apparatus for realizing tubular optical waveguides in glass by femtosecond laser direct writing

Patent metadata

Field	Value
Publication number	US-10201874-B2
Application number	US-201615096066-A
Country	US
Kind code	B2
Filing date	Apr 11, 2016
Priority date	Jan 28, 2016
Publication date	Feb 12, 2019
Grant date	Feb 12, 2019

Abstract

Apparatus and method for realizing tubular optical waveguides in glass by femtosecond laser direct writing. Irradiation in glass with focused femtosecond laser pulses leads to decrease of refractive index in the modified region. Tubular optical waveguides of variable mode areas are fabricated by forming the four sides of the modified regions with slit-shaped femtosecond laser pulses, ensuring single mode waveguide with a mode field dimension compatible with direct coupling to single-mode optical fibers.

First claim

We claim:

1. A method for fabricating a tubular optical waveguide in a glass material, comprising
(1) inputting a first phase modulation mask into a spatial light modulator (SLM), wherein the SLM has liquid crystal surface with changeable refractive index, and the first phase modulation mask is a central rectangular grating region having a vertical length that is larger than a horizontal length thereof, whereby the SLM modulates phase of incoming femtosecond laser pulses to generate a relatively narrow beam;
(2) Fixing a transparent glass material on a plane of a computer-controlled XYZ platform and adjusting position of the transparent glass material by moving the computer-controlled XYZ platform;
(3) Passing femtosecond laser pulses emitted by a femtosecond laser system sequentially through an attenuator, a shutter, and the SLM on an optical pathway, wherein the femtosecond laser pulses are modulated by the SLM;
passing the modulated femtosecond laser pulses sequentially through a first reflector, a first convex lens, a slit, a second reflector, a second convex lens, and a dichroic mirror along the optical pathway, wherein the slit is positioned at a focal plane of the first reflector that is also a Fourier imaging plane of a reflection spot from the SLM, and the modulated femtosecond laser pulses is spatially filtered by the slit;
focusing the modulated and filtered femtosecond laser pulses by an objective lens on the optical pathway into inside of the transparent glass material, after being reflected by the dichroic mirror;
setting an opposite direction to the direction of the femtosecond laser pulses that are focused by the objective lens into the transparent glass material as a Z axis, setting a direction along a width of the transparent glass material on the plane of the computer-controlled XYZ platform as an X axis, and setting a direction along a length of the transparent glass material on the plane of the computer-controlled XYZ platform as a Y axis, after phase modulation by the SLM and spatially filtered by the slit, the modulated and filtered femtosecond laser pulses are focused into the transparent glass material fixed on the computer-controlled XYZ platform at a starting position through the objective lens to form a first narrow region with a width of D along the X axis and reduced refractive index;
moving the computer-controlled XYZ platform along the −Y direction for a distance L and focusing the modulated and filtered femtosecond laser pules into the transparent glass material to form a first flat and narrow region with a length of L and width of D inside the transparent glass material, wherein the first flat and narrow region has a refractive index that is less than a reflective index of the transparent glass material and is a bottom cladding of a waveguide;
(4) loading a second phase modulation mask into the SLM, wherein the second phase modulation mask is a central rectangular grating region having a horizontal length that is larger than a vertical length thereof, and whereby the SLM modulates to generate a relatively wide beam;
(5) adjusting power of the femtosecond laser pulses by the attenuator, returning the computer-controlled XYZ platform to the starting position and moving the computer-controlled XYZ platform for a first distance along the X direction and a second distance along the −Z direction to adjust position of the transparent glass material so that, after phase modulation by the SLM and spatially filtered by the slit, the modulated and filtered femtosecond laser pulses are focused into the inside of the transparent glass material and form a second narrow region along Z direction with a width of D, wherein the second narrow region is connected to the left side of the first flat and narrow region; moving the computer-controlled XYZ platform along the −Y direction for a distance of L to form a second planar laser-modified region with reduced refractive index that is a left cladding of the waveguide;
(6) returning the computer-controlled XYZ platform to the starting position and moving the computer-controlled XYZ platform for the first distance to the −X direction and the second distance to the −Z direction to adjust position of the transparent glass material so that, after phase modulation by the SLM and spatially filtered by the slit, the modulated and filtered femtosecond laser pulses are focused into the transparent glass material and form a third narrow region along Z direction with a width of D, wherein the third narrow region is connected to the right side of the first flat and narrow region; moving the computer-controlled XYZ platform along the −Y direction for a distance of L to form a third planar laser-modified region with reduced refractive index that is a right cladding of the waveguide; and
(7) moving the computer-controlled XYZ platform back to the starting position, reloading the first phase modulation mask into the SLM, moving the computer-controlled XYZ platform for a distance D along −Z direction, adjusting power of the femtosecond laser pulses by the attenuator and the modulated and filtered femtosecond laser pulses, after phase modulation by the SLM and spatially filtered by the slit, are focused into the transparent glass material to form a fourth narrow region inside the transparent glass material that is parallel to the plane of the first flat and narrow region; moving the computer-controlled XYZ platform for a distance of L along −Y direction to form a fourth planar laser-modified region with reduced refractive index that is a top cladding of the waveguide,
wherein the bottom, left, right, and top claddings enclose a channel as the waveguide, and cross-section of the channel is square-shaped.

2. The method of claim 1 , wherein the central rectangular grating region of the first phase modulation mask has a vertical length of 12000 μm, and a horizontal length of 120 μm.

3. The method of claim 1 , wherein the central rectangular grating region of the second phase modulation mask has a vertical length of 800 μm, and a horizontal length of 16000 μm.

Assignees

• Shanghai Inst Optics & Fine Mech Cas

Inventors

• Cheng Ya
• Liao Yang
• Chu Wei
• Wang Peng
• Qi Jia

Classifications

• B23K26/53

  for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks · CPC title

• B23K26/0006

  taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence) · CPC title

• B23K2103/54

  Glass · CPC title

• B23K26/0624 Primary

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/0648

  comprising lenses · CPC title