Method for manufacturing niobate-system ferroelectric thin-film device

Patent metadata

Field	Value
Publication number	US-10199564-B2
Application number	US-201615548543-A
Country	US
Kind code	B2
Filing date	Jan 19, 2016
Priority date	Feb 4, 2015
Publication date	Feb 5, 2019
Grant date	Feb 5, 2019

Abstract

This method for manufacturing a lead-free niobate-system ferroelectric thin film device includes: a lower electrode film formation step of forming a lower electrode film on a substrate; a ferroelectric thin film formation step of forming a niobate-system ferroelectric thin film on the lower electrode film; an etch mask pattern formation step of forming an etch mask in a desired pattern on the niobate-system ferroelectric thin film; and a ferroelectric thin film etching step of shaping the niobate-system ferroelectric thin film into a desired fine pattern by wet etching using an etchant comprising: a predetermined chelating agent including at least one selected from EDTMP, NTMP, CyDTA, HEDP, GBMP, DTPMP, and citric acid; an aqueous alkaline solution containing an aqueous ammonia solution; and an aqueous hydrogen peroxide solution.

First claim

The invention claimed is:

1. A method for manufacturing a niobate-system ferroelectric thin film device comprising:
a lower electrode film formation step of forming a lower electrode film on a substrate;
a ferroelectric thin film formation step of forming a niobate-system ferroelectric thin film on the lower electrode film;
an etch mask pattern formation step of forming an etch mask in a desired pattern on the niobate-system ferroelectric thin film; and
a ferroelectric thin film etching step of shaping the niobate-system ferroelectric thin film into a desired fine pattern by wet etching using an etchant consisting of:
a predetermined chelating agent comprising at least one selected from ethylenediamine tetra(methylene phosphonic acid), nitrilotris(methylene phosphonic acid), cyclohexane diamine tetraacetic acid, 1-hydroxyethane-1,1-diphosphonic acid(etidronic acid), glycine-N,N-bis (methylene phosphonic acid), diethylenetriamine penta(methylene phosphonic acid), and citric acid;
an aqueous alkaline solution comprising an aqueous ammonia solution; and
an aqueous hydrogen peroxide solution.

2. The method according to claim 1 , wherein when the predetermined chelating agent is ethylenediamine tetra(methylene phosphonic acid), nitrilotris(methylene phosphonic acid), cyclohexane diamine tetraacetic acid, 1-hydroxyethane-1,1-diphosphonic acid(etidronic acid), glycine-N,N-bis(methylene phosphonic acid), or diethylenetriamine penta(methylene phosphonic acid), the chelating agent in the etchant has a molarity of 0.001 M or more and 0.5 M or less, and
wherein when the predetermined chelating agent is citric acid, the citric acid in the etchant has a molarity of 0.03 M or more and 1 M or less.

3. The method according to claim 1 , wherein the etch mask is made of a silicon oxide film.

4. The method according to claim 1 , wherein, at the ferroelectric thin film etching step, the etchant has a temperature of 50° C. or higher and lower than 100° C.

5. The method according to claim 1 , wherein the niobate-system ferroelectric thin film is made of potassium sodium niobate or lithium niobate.

6. The method according to claim 1 , wherein the lower electrode film is made of platinum.

7. The method according to claim 1 , wherein the niobate-system ferroelectric thin film has a device-forming surface on which the niobate-system ferroelectric thin film device is folioed; the niobate-system ferroelectric thin film includes one or more crystal grains having a crystal system and crystal planes including a (001) crystal plane; the crystal system of the niobate-system ferroelectric thin film is pseudo cubic or tetragonal; the niobate-system ferroelectric thin film is formed by sputtering in such a manner that the (001) crystal plane of the one or more crystal grains is preferentially oriented parallel to the device-forming surface.

8. The method according to claim 1 , wherein the substrate is a silicon substrate having a thermal oxide layer thereon.

9. The method according to claim 1 , wherein the method further comprises:
an upper electrode formation step of forming an upper electrode over a desired fine pattern of the niobate-system ferroelectric thin film; and
a dicing step of dicing the substrate having thereon the niobate-system ferroelectric thin film having thereon the upper electrode into one or more chips.

Assignees

• Sumitomo Chemical Co
• Kanto Kagaku

Inventors

• Horikiri Fumimasa
• Shibata Kenji
• Watanabe Kazutoshi
• Suenaga Kazufumi
• Noguchi Masaki
• Kuroiwa Kenji

Classifications

• H10P50/691

  for Group V materials or Group III-V materials · CPC title

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• C23C14/34

  Sputtering · CPC title

• H01L21/308

  Electricity · mapped topic

• H01L41/113

  Electricity · mapped topic