Switching device formed from correlated electron material

Patent metadata

Field	Value
Publication number	US-10193063-B2
Application number	US-201615367052-A
Country	US
Kind code	B2
Filing date	Dec 1, 2016
Priority date	Dec 1, 2016
Publication date	Jan 29, 2019
Grant date	Jan 29, 2019

Abstract

Subject matter disclosed herein may relate to fabrication of a correlated electron material (CEM) switch. In embodiments, processes are described in which conductive traces may be formed on or over an insulating material. Responsive to forming voids in the insulating material, localized portions of the conductive traces in contact with the voids may be exposed to gaseous oxidizing agents, which may convert the localized portions of the conductive traces to a CEM. In embodiments, an electrode material may be deposited within the voids to contact the localized portion of conductive trace converted to the CEM.

First claim

What is claimed is:

1. A method of constructing a switching device, comprising:
forming, in a chamber, one or more voids between adjacent conductive traces of a plurality of conductive traces formed over an insulating substrate; and
converting localized portions of at least some of the adjacent conductive traces of the plurality of conductive traces to a correlated electron material (CEM), the CEM comprising an atomic concentration of at least 85.0% of an oxide of a d-block element or of an oxide of an f-block element, or an alloy of two or more oxides of d-block or f-block elements.

2. The method of claim 1 , wherein converting the localized portions of at least some of the adjacent conductive traces comprises exposing the one or more voids to a gaseous oxidizing agent or to a gaseous oxynitriding agent.

3. The method of claim 2 , wherein the gaseous oxidizing agent comprises O 2 , O 3 , O* or H 2 O, or any combination thereof, in an atomic concentration of at least 50.0%.

4. The method of claim 3 , wherein the gaseous oxidizing agent comprises O 2 , and wherein converting comprises exposing the one or more voids to gaseous CO and CH 4 , and wherein
the localized portions of the at least some of the adjacent conductive traces converted to CEM comprise an atomic concentration of about 0.1% to about 10.0% of CO.

5. The method of claim 2 , wherein the gaseous oxynitriding agent comprises gaseous NO, N 2 O or NO*, or any combination thereof, in an atomic concentration of at least 50.0%.

6. The method of claim 5 , wherein the gaseous oxynitriding agent comprises NO, and wherein converting further comprises exposing the one or more voids to gaseous H 2 O, and wherein the localized portions of the at least some of the adjacent conductive traces converted to CEM comprise an atomic concentration of about 0.1% to about 10.0% of nitrogen.

7. The method of claim 1 , further comprising exposing the one or more voids to a dopant, in a gaseous form, to bring about a concentration of the dopant in the CEM to be approximately in the range of about 0.1% to about 10.0%.

8. The method of claim 1 , further comprising forming one or more electrodes within at least one of the one or more formed voids.

9. The method of claim 8 , wherein the one or more electrodes contact the localized portions of the at least some of the adjacent conductive traces converted to the CEM.

10. The method of claim 8 , wherein the one or more electrodes comprises at least 85.0% of platinum, titanium, copper, aluminum, cobalt, nickel, tungsten, tungsten nitride, cobalt silicide, ruthenium oxide, chromium, gold, palladium, indium tin oxide, tantalum, silver or iridium, or an alloy thereof.

Assignees

• Advanced Risc Mach Ltd

Inventors

• Paz De Araujo Carlos Alberto
• Celinska Jolanta Bozena
• Reid Kimberly Gay
• Shifren Lucian

Classifications

• H01L45/146

  Electricity · mapped topic

• H01L45/04

  Electricity · mapped topic

• H01L45/1253 Primary

  Electricity · mapped topic

• H01L45/1608

  Electricity · mapped topic

• H01L27/249

  Electricity · mapped topic