MEMS device and MEMS vacuum microphone

Patent metadata

Field	Value
Publication number	US-10189699-B2
Application number	US-201715819767-A
Country	US
Kind code	B2
Filing date	Nov 21, 2017
Priority date	Mar 10, 2016
Publication date	Jan 29, 2019
Grant date	Jan 29, 2019

Abstract

In accordance with an embodiment, a MEMS device includes a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a conductive layer, which is at least partially arranged in the low pressure region or extends in the low pressure region. The conductive layer includes a segmentation providing an electrical isolation between a first portion of the conductive layer and a second portion of the conductive layer.

First claim

What is claimed is:

1. A method of reading out a MEMS device, the MEMS device comprising first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a first conducting layer, which is at least partially arranged in the low pressure region or extends in the low pressure region, wherein the first conducting layer comprises a segmentation providing an electrical isolation between a first portion of the first conducting layer and a second portion of the first conducting layer, the method comprising:
providing a signal generated by a deflection of the first membrane element and a deflection of the second membrane element.

2. The method according to claim 1 , further comprising:
biasing the first portion of the first conducting layer of the counter electrode structure with a first voltage, and
reading-out the signal.

3. The method according to claim 1 , wherein the counter electrode structure comprises the first conducting layer and, further, a second conducting layer, wherein the second conducting layer comprises a further segmentation providing an electrical isolation between a first portion of the second conducting layer and a second portion of the second conducting layer, the method further comprising:
biasing the first portion of the first conducting layer with a first voltage,
biasing the first portion of the second conducting layer with a second voltage, and
reading-out the signal.

4. The method according to claim 3 , wherein the first portion of the first conducting layer and the first portion of the second conducting layer are not electrically connected, and wherein the first voltage and the second voltage are different.

5. The method according to claim 3 , wherein the second portion of the first conducting layer is electrically connected to the first and second membrane element, and wherein the second portion of the second conducting layer is electrically connected to the first and second membrane element.

6. The method according to claim 1 , further comprising:
biasing the first membrane element and the second membrane element with a reference potential, and
reading-out the signal.

7. The method according to claim 1 , further comprising:
biasing the first membrane element with a first voltage,
biasing the second membrane element with a second reference potential, and
reading-out the signal.

8. A method of reading out a MEMS device, the MEMS device comprising a first membrane element, a second membrane element spaced apart from the first membrane element, a low pressure region between the first and second membrane elements, the low pressure region having a pressure less than an ambient pressure, and a counter electrode structure comprising a first conducting layer which is at least partially arranged in the low pressure region or extends in the low pressure region, wherein the first membrane element comprises a segmentation providing an electrical isolation between a first portion of the first membrane element and a second portion of the first membrane element, and wherein the second membrane element comprises a further segmentation comprising an electrical isolation between a first portion of the second membrane element and a second portion of the second membrane element, the method comprising:
providing a signal generated by a deflection of the first membrane element and a deflection of the second membrane element.

9. The method according to claim 8 , further comprising:
biasing the first conducting layer of the counter electrode structure with a reference voltage, and
reading-out the signal.

10. The method according to claim 8 , wherein the second portion of the first membrane element and the second portion of the second membrane element are electrically connected to the first conducting layer of the counter electrode structure.

11. The method according to claim 8 , wherein the MEMS device further comprises a second conducting layer, the method further comprising:
biasing the first conducting layer with a first voltage,
biasing the second conducting layer with a second voltage, and
reading-out the signal.

12. The method according to claim 11 , wherein the first portion of the first membrane element and the first portion of the second membrane element are not electrically connected, and wherein the first voltage and second voltage are different.

13. The method according to claim 11 , wherein the second portion of the first membrane element and the second portion of the second membrane element are electrically connected to the first and second conducting layer of the counter electrode structure.

Assignees

• Infineon Technologies Ag

Inventors

• Walther Arnaud
• Dehe Alfons
• Strasser Johann
• Metzger-Brueckl Gerhard

Classifications

• H04R2201/003

  Mems transducers or their use · CPC title

• H04R31/006

  Interconnection of transducer parts (of diaphragm and outer suspension by moulding H04R31/003) · CPC title

• H04R19/005 Primary

  using semiconductor materials · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title

• B81B3/0086 Primary

  Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage · CPC title