Inductively-Coupled Plasma Processing Apparatus
US-2020227236-A1 · Jul 16, 2020 · US
US10181639B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10181639-B2 |
| Application number | US-201515519658-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 15, 2015 |
| Priority date | Nov 14, 2014 |
| Publication date | Jan 15, 2019 |
| Grant date | Jan 15, 2019 |
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An antenna device includes a ground conductor ( 1 ), a dielectric tube ( 2 ) containing an ionizing gas and passing through the ground conductor, whose folded-back portion ( 201 ) and both ends are disposed in different sides of the ground conductor, first electrodes ( 3, 4 ) disposed at both ends of the dielectric tube ( 2 ), a plasma excitation power supply connected to the first electrodes, bringing the ionizing gas into a plasma state; a second electrode ( 6 ) ring-shaped and disposed at the both ends side of dielectric tube ( 2 ) from the ground conductor ( 1 ), fitted to and in contact with the dielectric tube outer surface, a high frequency transmitter ( 7 ) supplying a high frequency signal to the second electrode ( 6 ), and a feed line ( 8 ) connecting the second electrode and the high frequency transmitter. Each end of the dielectric tube ( 2 ) is larger than the second electrode in the inner diameter.
Opening claim text (preview).
The invention claimed is: 1. An antenna device comprising: a ground conductor; a dielectric tube in which an ionizing gas is contained and having a folded-back portion, with both ends of the dielectric tube being directed toward an identical direction, and being arranged to pass through the ground conductor in such a way that the folded-back portion and the both ends are disposed in different sides of the ground conductor; first electrode terminals disposed at the both ends of the dielectric tube, respectively; a plasma excitation power supply connected to the first electrode terminals and bringing the ionizing gas into a plasma state; a second electrode terminal ring-shaped and fitted to an outer peripheral surface portion of the dielectric tube between the ground conductor and the both ends of the dielectric tube in such a way as to be in contact with the outer peripheral surface portion, wherein the second electrode terminal is different from the first electrode terminals, and the second electrode terminal is disposed for each of two dielectric tubes, wherein a portion of the two dielectric tubes is formed by folding the dielectric tube at the folded-back portion; a high frequency transmitter grounded to the ground conductor and supplying a high frequency signal to the second electrode terminal; and a feed line connecting between the second electrode terminal and the high frequency transmitter, wherein each of the both ends of the dielectric tube has an inner diameter larger than an inner diameter of the second electrode terminal. 2. The antenna device according to claim 1 , wherein the second electrode terminal is disposed to each of the two dielectric tubes, and is connected to the feed line via an identical signal line. 3. The antenna device according to claim 1 , wherein the second electrode terminal disposed to each of the two dielectric tubes is connected to the feed line via a signal line different to each other. 4. The antenna device according to claim 1 , wherein said antenna device further comprising: a metal box having a hole through which the dielectric tube passes through, covering said second electrode terminal, and grounded to said ground conductor; and a metal cylinder enclosing a part of said dielectric tube except the both ends of said dielectric tube, and grounded to an outer bottom surface of said metal box. 5. The antenna device according to claim 4 , wherein ring-shaped grooves are formed in an inner wall of said metal cylinder periodically along an axial direction of the metal cylinder. 6. The antenna device according to claim 4 , wherein said antenna device further comprising a second metal cylinder enclosing said dielectric tube in said metal box, grounded to an inner bottom surface of said metal box, and having an upper end located at the side of the both ends of said dielectric tube from said second electrode terminal. 7. The antenna device according to claim 1 , wherein when the plasma excitation power supply brings the ionizing gas into the plasma state, the second electrode terminal performs supplying of the high frequency signal which is supplied by the high frequency signal transmitter to the ionizing gas, and a portion between the folded-back portion and the ground conductor of the dielectric tube performs emitting of a radio wave to a space in accordance with the high frequency signal supplied to the ionizing gas, and when the plasma excitation power supply does not brings the ionizing gas into the plasma state, the second electrode terminal suppress the supplying to the ionizing gas, and the emitting of the radio wave to the space by the portion between the folded-back portion and the ground conductor is suppressed. 8. An antenna device comprising: a ground conductor; a dielectric tube in which an ionizing gas is contained and having a folded-back portion, with both ends of the dielectric tube being directed toward an identical direction, and being arranged to pass through the ground conductor in such a way that the folded-back portion and the both ends are disposed in different sides of the ground conductor; first electrode terminals disposed at the both ends of the dielectric tube, respectively; a plasma excitation power supply connected to the first electrode terminals and bringing the ionizing gas into a plasma state; a second electrode terminal ring-shaped and fitted to an outer peripheral surface portion of the dielectric tube between the ground conductor and the both ends of the dielectric tube in such a way as to be in contact with the outer peripheral surface portion, wherein the second electrode terminal is different from the first electrode terminals, and the second electrode terminal is disposed for each of two dielectric tubes, wherein a portion of the two dielectric tubes is formed by folding the dielectric tube at the folded-back portion; a high frequency receiver grounded to the ground conductor and receiving a high frequency signal from the second electrode terminal; and a feed line connecting between the second electrode terminal and the high frequency receiver, wherein each of the both ends of the dielectric tube has an inner diameter larger than an inner diameter of the second electrode terminal. 9. The antenna device according to claim 8 , wherein the second electrode terminal is disposed to each of the two dielectric tubes, and is connected to the feed line via an identical signal line. 10. The antenna device according to claim 8 , wherein the second electrode terminal disposed to each of the two dielectric tubes is connected to the feed line via a signal line different to each other. 11. The antenna device according to claim 8 , wherein said antenna device further comprising: a metal box having a hole through which the dielectric tube passes through, covering said second electrode terminal, and grounded to said ground conductor; and a metal cylinder enclosing a part of said dielectric tube except the both ends of said dielectric tube, and grounded to an outer bottom surface of said metal box. 12. The antenna device according to claim 11 , wherein ring-shaped grooves are formed in an inner wall of said metal cylinder periodically along an axial direction of the metal cylinder. 13. The antenna device according to claim 11 , wherein said antenna device further comprising a second metal cylinder enclosing said dielectric tube in said metal box, grounded to an inner bottom surface of said metal box, and having an upper end located at the side of the both ends of said dielectric tube from said second electrode terminal. 14. The antenna device according to claim 8 , wherein when the plasma excitation power supply brings the ionizing gas into the plasma state, a portion between the folded-back portion and the ground conductor of the dielectric tube performs receiving of a radio wave supplied from a space to the ionizing gas, and the second electrode terminal performs supplying of the high frequency signal to the high frequency receiver in accordance with the radio wave received by the portion between the folded-back portion and the ground conductor, and when the plasma excitation power supply does not brings the ionizing gas into the plasma state, the receiving of the radio wave from the space by the portion between the folded-back portion and the ground conductor is suppressed, and the second electrode terminal suppress the supplying to the high frequency receiver.
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