Thermal processing apparatus

Patent metadata

Field	Value
Publication number	US-10181409-B2
Application number	US-201414163309-A
Country	US
Kind code	B2
Filing date	Jan 24, 2014
Priority date	Jun 24, 2011
Publication date	Jan 15, 2019
Grant date	Jan 15, 2019

Abstract

An optical system that is able to reliably deliver a uniform amount of energy across an anneal region contained on a surface of a substrate. The optical system is adapted to deliver, or project, a uniform amount of energy having a desired two-dimensional shape on a desired region on the surface of the substrate. An energy source for the optical system is typically a plurality of lasers, which are combined to form the energy field.

First claim

The invention claimed is:

1. An apparatus for thermally processing a substrate, comprising:
a source of electromagnetic energy having a plurality of pulsed energy sources;
a substrate support; and
an optical system disposed between the source of electromagnetic energy and the substrate support, the optical system comprising a pulse combiner, a pulse shaper, a homogenizer, and an aperture member having an energy blocking member embedded therein, wherein the energy blocking member is disposed at a focal plane of the electromagnetic energy delivered from a lens that is positioned at the output of the homogenizer.

2. The apparatus of claim 1 , wherein the pulse combiner comprises a combining optic with a selecting surface and two rotatable polarizing filters.

3. The apparatus of claim 1 , wherein the aperture member further comprises a first member and a second member with the energy blocking member positioned between the first member and the second member and a covering that is disposed over a portion of the first member and a portion of the second member.

4. The apparatus of claim 2 , wherein the homogenizer comprises two microlens arrays.

5. The apparatus of claim 3 , wherein the pulse shaper comprises a plurality of mirror pairs and a plurality of splitters, wherein two mirror pairs are at a different distance from a datum of the pulse shaper.

6. The apparatus of claim 4 , wherein each of the two microlens arrays has a square shape.

7. The apparatus of claim 6 , wherein the pulse combiner comprises a diagnostic module with a detector that detects the temporal shape of a pulse and a detector that detects the energy content of the pulse.

8. The apparatus of claim 5 , further comprising an imaging system with a sampling optic optically coupled to the substrate support and to a detecting optic.

9. The apparatus of claim 1 , wherein the aperture member further comprises a first member and a second member positioned to define a region in which an opening in the energy blocking member is enclosed.

10. The apparatus of claim 1 , wherein
the energy blocking member has a first surface, a second surface that is opposite to the first surface, and an opening that extends from the first surface to the second surface, and the aperture member further comprises:
a first member disposed over the first surface and the opening; and
a second member disposed over the second surface and the opening.

11. The apparatus of claim 10 , wherein the aperture member further comprises: a covering that is disposed over a portion of the first member and a portion of the second member.

12. An apparatus for thermally processing a substrate, comprising:
a source of electromagnetic energy having a plurality of pulsed energy sources;
a substrate support; and
an optical system disposed between the source of electromagnetic energy and the substrate support, the optical system comprising a pulse combiner, a pulse shaper, a homogenizer, an imaging optic, and an aperture member positioned between the homogenizer and the imaging optic and having an energy blocking member embedded therein, wherein the energy blocking member is disposed at a focal plane of the electromagnetic energy delivered from a lens that is positioned at the output of the homogenizer.

13. The apparatus of claim 1 , wherein the aperture member further comprises a first member and a second member with the energy blocking member positioned between the first member and the second member such that the first member and the second member enclose an opening in the energy blocking member.

Assignees

• Applied Materials Inc

Inventors

• Moffatt Stephen
• Holmgren Douglas E
• Howells Samuel C
• Tong Edric
• Adams Bruce E
• Li Jiping
• Hunter Aaron Muir

Classifications

• H10P34/42 Primary

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• H10P95/90 Primary

  Thermal treatments, e.g. annealing or sintering · CPC title

• B23K26/0622

  by shaping pulses · CPC title

• B23K26/03 Primary

  Observing, e.g. monitoring, the workpiece · CPC title

• B23K2103/56

  being semiconducting · CPC title