Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
US-9494878-B2 · Nov 15, 2016 · US
US10170972B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10170972-B2 |
| Application number | US-201414910994-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 6, 2014 |
| Priority date | Aug 9, 2013 |
| Publication date | Jan 1, 2019 |
| Grant date | Jan 1, 2019 |
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Official abstract text for this publication.
A Halbach magnetic array is disclosed, including a plurality of first and second magnetic units alternately arranged in a width direction, wherein: each first magnetic unit includes first magnetic groups and first magnetic columns alternately arranged in a length direction, each first magnetic group includes four first magnetic bars arranged in a 2*2 matrix; each second magnetic unit includes second magnetic groups and second magnetic columns alternately arranged in the length direction, each second magnetic group includes four second magnetic bars arranged in a 2*2 matrix; each first magnetic column is magnetized in a height direction, and each second magnetic column is magnetized in a direction opposite to the height direction. A magnetic suspension vibration damper is also disclosed.
Opening claim text (preview).
What is claimed is: 1. A Halbach magnetic array, comprising a plurality of first and second magnetic units alternately arranged in a width direction of the array, wherein: each of the plurality of first magnetic units comprises a plurality of first magnetic groups and first magnetic columns alternately arranged in a length direction of the array, each of the plurality of first magnetic groups includes four first magnetic bars arranged in a 2*2 matrix; each of the plurality of second magnetic units comprises a plurality of second magnetic groups and second magnetic columns alternately arranged in the length direction of the array, each of the plurality of second magnetic groups includes four second magnetic bars arranged in a 2*2 matrix; each of the plurality of first magnetic columns is magnetized in a height direction of the array, and each of the plurality of second magnetic columns is magnetized in a direction opposite to the height direction of the array. 2. The Halbach magnetic array according to claim 1 , wherein each magnetic bar in the first and second magnetic groups has a magnetization direction along a body diagonal thereof, and wherein the magnetization directions of the four magnetic bars in a same magnetic group have components along the height direction pointing towards a same direction and components in a plane defined by the width and length directions pointing towards different directions. 3. The Halbach magnetic array according to claim 2 , wherein the magnetization directions of the four first magnetic bars of each of the plurality of first magnetic groups are opposite to the magnetization directions of the four second magnetic bars of each of the plurality of second magnetic groups. 4. The Halbach magnetic array according to claim 3 , wherein the magnetization direction of each of the four first magnetic bars forms an angle ranging from 30 degrees to 60 degrees with respect to the plane defined by the width and length directions, and the magnetization direction of each of the four second magnetic bars forms an angle ranging from 30 degrees to 60 degrees with respect to the plane defined by the width and length directions. 5. The Halbach magnetic array according to claim 1 , wherein each of the plurality of first and second magnetic columns has a rectangular, circular or other regularly shaped cross section. 6. A magnetic suspension vibration damper, comprising a first pair of Halbach magnetic arrays as defined in claim 1 that are stacked together along a height direction to produce a magnetic force in the height direction, wherein the plurality of first magnetic columns in a first array of the first pair of Halbach magnetic arrays are individually aligned with the plurality of second magnetic columns in a second array of the first pair of Halbach magnetic arrays. 7. The magnetic suspension vibration damper according to claim 6 , wherein the plurality of first magnetic columns in the first array have magnetization directions same as magnetization directions of corresponding ones of the plurality of second magnetic columns in the second array. 8. The magnetic suspension vibration damper according to claim 6 , wherein the plurality of first magnetic columns in the first array have magnetization directions opposite to magnetization directions of corresponding ones of the plurality of second magnetic columns in the second array. 9. The magnetic suspension vibration damper according to claim 6 , further comprising: a second pair of Halbach magnetic arrays which are fixedly disposed on a first side of the first pair of Halbach magnetic arrays to produce a magnetic force in a length direction of the first pair of Halbach magnetic arrays; and a third pair of Halbach magnetic arrays which are fixedly disposed on a second side of the first pair of Halbach magnetic arrays to produce a magnetic force in a width direction of the first pair of Halbach magnetic arrays. 10. The magnetic suspension vibration damper according to claim 9 , wherein the magnetic force is a magnetic attractive force or a magnetic repulsive force.
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