Strained stacked nanosheet FETs and/or quantum well stacked nanosheet

Patent metadata

Field	Value
Publication number	US-10170549-B2
Application number	US-201514918954-A
Country	US
Kind code	B2
Filing date	Oct 21, 2015
Priority date	Oct 21, 2014
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

Exemplary embodiments provide for fabricating a nanosheet stack structure having one or more sub-stacks. Aspects of the exemplary embodiments include: growing an epitaxial crystalline initial stack of one or more sub-stacks, each of the sub-stacks having at least three layers, a sacrificial layer A, and at least two different non-sacrificial layers B and C having different material properties, wherein the non-sacrificial layers B and C layers are kept below a thermodynamic or kinetic critical thickness corresponding to metastability during all processing, and wherein the sacrificial layer An is placed only at a top or a bottom of each of the sub-stacks, and each of the sub-stacks is connected to an adjacent sub-stack at the top or the bottom using one of the sacrificial layers A; proceeding with fabrication flow of nanosheet devices, such that pillar structures are formed at each end of the epitaxial crystalline stack that to hold the nanosheets in place after selective etch of the sacrificial layers; and selectively removing sacrificial layers A to all non-sacrificial layers B and C, while the remaining layers in the stack are held in place by the pillar structures so that after removal of the sacrificial layers An, each of the sub-stacks contains the non-sacrificial layers B and C.

First claim

We claim:

1. A method for fabricating a nanosheet stack structure having one or more sub-stacks, the method comprising:
growing an epitaxial crystalline initial stack of the one or more sub-stacks, each of the sub-stacks having at least three layers, a sacrificial layer A, and at least two different non-sacrificial layers B and C having different material properties, wherein the non-sacrificial layers B and C layers are each kept below a thermodynamic or kinetic critical thickness corresponding to metastability during all processing such that the non-sacrificial layers B and C remain metastable and without relaxation during processing, and wherein the sacrificial layer A is placed only at a top or a bottom of each of the sub-stacks, and each of the sub-stacks is connected to an adjacent sub-stack at the top or the bottom using one of the sacrificial layers A;
proceeding with fabrication flow of nanosheet devices, such that pillar structures are formed at each end of the epitaxial crystalline stack that hold the nanosheets in place after selective etch of the sacrificial layers; and
selectively removing sacrificial layers A from all non-sacrificial layers B and C, while the remaining layers B and C in the stack are held in place by the pillar structures, so that after removal of the sacrificial layers A, each of the sub-stacks contains the non-sacrificial layers B and C, the sacrificial layer A differing from the non-sacrificial layers B and C such that removal of the sacrificial layer A leaves the non-sacrificial layer B and the non-sacrificial layer C in all of the plurality of sub-stacks and such that no sub-stack includes the non-sacrificial layer B in the absence of the non-sacrificial layer C and no sub-stack includes the non-sacrificial layer C in the absence of the non-sacrificial layer B, the sacrificial layer A being at least three times as thick as the non-sacrificial layer B and as the non-sacrificial layer C.

2. The method of claim 1 , wherein the selective removal of the sacrificial layers A is accomplished using a wet etch process.

3. The method of claim 1 , wherein relaxed lattice parameters of materials comprising all layers of the initial stack are within 10% of each other.

4. The method of claim 1 , wherein relaxed lattice parameters of materials comprising all layers of the initial stack are within 5% of each other.

5. The method of claim 1 , wherein all layers in the stack are kept with substantially the same lattice parameter throughout the whole fabrication process.

6. The method of claim 5 , wherein the at least two non-sacrificial layers remaining in each sub-stack after selective removal of the sacrificial layers A comprise materials with different lattice parameters when in a relaxed state.

7. The method of claim 5 , wherein the nanosheet structure is used a part of a channel region of a MOSFET device, and wherein the at least two non-sacrificial layers remaining in each sub-stack after selective removal of layers A comprise semiconducting materials with a band edge offset of at least 0.15 eV for the main carriers in the MOSFET.

8. The method of claim 5 , wherein the nanosheet structure is used a part of a channel region of the MOSFET device, and wherein the at least two non-sacrificial layers remaining in each sub-stack after selective removal of the sacrificial layers A comprise materials with different lattice parameters when in a relaxed state.

9. The method of claim 8 , wherein the layers A comprises a SiGe alloy, wherein the layers B and C comprise SiGe alloys with lower Ge content than the layers A, and wherein the layers B and C have different Ge content.

10. The method of claim 9 , wherein the layers A comprise SiGe alloys at approximately 90% or higher Ge content, the layers B comprise intermediate Ge content SiGe alloys at approximately 40-80% Ge, and the layers C comprise SiGe alloys at approximately less than 20% Ge.

11. The method of claim 10 , wherein after removal of layers A the sub-stacks have a structure comprising a bottom layer B, a center layer Cn and a top layer B.

12. The method of claim 11 , wherein the layers Cn are approximately 3 to 4 nm thick, the layers B are approximately 2 to 3 nm thick and the layers A are approximately at least 10 nm thick.

13. The method of claim 8 , wherein at least one of the sub-stacks comprises the sacrificial layer A, the non-sacrificial layer B, and non-sacrificial layers C 1 and C 2 , wherein the layer A comprises a SiGe alloy at approximately 90% Ge or higher, and the at least one sub-stack after removal of the layers A has a structure comprising: a bottom layer C 2 of a SiGe at approximately 20% Ge or less, adjacent to the layer B of SiGe at 40 to 80% Ge, adjacent to a layer C 1 of SiGe at 20% Ge or less, adjacent to the layer B, adjacent to a top Si layer.

14. The method of claim 13 , wherein the layer C 1 is approximately 3 to 4 nm thick, the layer B is approximately 2 to 3 nm thick, the layer C 2 is approximately 0.4 to 1 nm and the layer A is approximately 10 nm thick.

15. The method of claim 1 , wherein the nanosheet structure is used a part of a channel region of a MOSFET device, and wherein the at least two non-sacrificial layers remaining in each sub-stack after selective removal of layers A comprise semiconducting materials with a band edge offset of at least 0.15 eV for the main carriers in the MOSFET.

16. The method of claim 15 , wherein the non-sacrificial layers of semiconducting materials are made of III-V alloys.

17. The method of claim 16 , wherein the non-sacrificial layer structure of each substack contains a semiconducting core comprising a central layer of an InGaAs alloy with adjacent layers of InP or InAlAs, with the composition of the InGaAs alloy chosen to have a less than 2% lattice mismatch to the adjacent InP or InAlAs layers.

18. The method of claim 7 , wherein the non-sacrificial layer structure of each sub-stack contains a core layer of a high Ge SiGe alloy at 90% Ge or higher and layers adjacent above and below this core layer, comprising II-VI or III-V alloys that have in their relaxed state a larger lattice parameter than the SiGe alloy in the core layer and a conduction band offset so that the conduction band edge is higher than in the SiGe alloy core layer by approximately 0.15 eV or more.

19. The method of claim 18 , wherein the adjacent layers are made of an AlAsSb alloy.

20. The method of claim 1 , wherein the nanosheet structure is used a part of a channel region of a MOSFET device, and wherein the at least two non-sacrificial layers remaining in each sub-stack after selective removal of layers A comprise semiconducting materials, the method further comprising: forming a gate dielectric and gate electrode by conformal deposition after removal of the sacrificial layers A.

21. The method of claim 1 , wherein the nanosheet structure is used a part of a channel region of a MOSFET device, and wherein the at least two non-sacrificial layers remaining in each sub-stack after selective removal of layers A comprise a core of semiconducting materials with epitaxial crystalline dielectric layers on top and below, the method further comprising:
completing isolation of the channel at exposed regions after removal of sacrificial layers A by oxidation or dielectric deposition techniques; and
forming a gate dielectric and gate electrode by conformal deposition.

22. The method of claim 21 , wherein the non-sacrificial layers in each sub-stack comprise core of III-V semiconductor

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kittl Jorge A
• Obradovic Borna J
• Bowen Robert C
• Rodder Mark S

Classifications

• H10P14/3422

  Antimonides · CPC title

• H10P14/3421

  Arsenides · CPC title

• H10P14/3411 Primary

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3251

  consisting of three or more layers · CPC title

• H10P14/3222

  Antimonides · CPC title