Flow controlled liner having spatially distributed gas passages

Patent metadata

Field	Value
Publication number	US-10170342-B2
Application number	US-201715716142-A
Country	US
Kind code	B2
Filing date	Sep 26, 2017
Priority date	Apr 30, 2013
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.

First claim

What is claimed is:

1. A liner assembly, comprising:
a lower liner having an outer surface, an inner surface defining a processing volume, an upper surface connecting the outer surface to the inner surface, and a plurality of gas passages connecting the outer surface to the processing volume, each of the plurality of gas passages comprising a first portion connected to a second portion, each first portion opening to the outer surface of the lower liner and each second portion having an upper end open to the upper surface and a lower end connected to the first portion; and
an upper liner disposed adjacent to the lower liner, the upper liner including a plurality of flow guides aligned with the plurality of gas passages.

2. The liner assembly of claim 1 , further comprising an exhaust opening on an opposite side of the lower liner from the plurality of gas passages.

3. The liner assembly of claim 2 , further comprising a substrate opening through the lower liner between the exhaust opening and the plurality of gas passages.

4. The liner assembly of claim 1 , wherein the upper surface faces the upper liner.

5. The liner assembly of claim 1 , wherein the upper liner comprises a ring shaped body having a lip extending radially inward.

6. The liner assembly of claim 5 , wherein the lip defines a central opening.

7. The liner assembly of claim 5 , wherein the lip is positioned away from the lower liner.

8. The liner assembly of claim 1 , wherein the lower liner and the upper liner comprise quartz.

9. A liner assembly, comprising:
a lower liner having an outer surface, an inner surface defining a processing volume, an upper surface connecting the outer surface to the inner surface, and a plurality of gas passages connecting the outer surface to the processing volume; and
an upper liner disposed adjacent to the lower liner, the upper liner including a plurality of flow guides aligned with the plurality of gas passages and a lip extending radially inward.

10. The liner assembly of claim 9 , wherein the lip defines a central opening.

11. The liner assembly of claim 9 , wherein the lip is positioned away from the lower liner.

12. The liner assembly of claim 9 , wherein the upper liner comprises a ring shaped body having a curved inner surface facing the lower liner.

13. The liner assembly of claim 12 , wherein the plurality of flow guides are formed in the inner surface.

14. A liner assembly, comprising:
a liner body having an outer surface, an inner surface, an upper surface connecting the outer surface to the inner surface, and a plurality of first channels connected to a plurality of second channels; and
an inject ring attached to the inner surface of the liner body, the inject ring having a plurality of channels aligning with and connecting to one of the plurality of second channels.

15. The liner assembly of claim 14 , wherein the plurality of first channels formed through the inject ring are parallel to one another.

16. The liner assembly of claim 14 , further comprising a plurality of inject blocks coupled to the inner surface of the liner body.

17. The liner assembly of claim 16 , wherein each inject block includes a channel formed therethrough.

18. The liner assembly of claim 17 , wherein the channel in each inject block is aligned with one of the plurality of second channels.

19. The liner assembly of claim 17 , wherein the channels formed through the inject blocks are parallel to one another.

20. The liner assembly of claim 15 , wherein the liner body comprises a ring shaped body.

Assignees

• Applied Materials Inc

Inventors

• Samir Mehmet Tugrul
• Lau Shu-Kwan

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C23C16/455

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title

• C23C16/45519

  Inert gas curtains · CPC title