Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch

Patent metadata

Field	Value
Publication number	US-10170323-B2
Application number	US-201715440842-A
Country	US
Kind code	B2
Filing date	Feb 23, 2017
Priority date	Dec 4, 2014
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

Various embodiments herein relate to methods, apparatus and systems for forming a recessed feature in a dielectric-containing stack on a semiconductor substrate. Separate etching and deposition operations are employed in a cyclic manner. Each etching operation partially etches the feature. Each deposition operation forms a protective coating (e.g., a metal-containing coating) on the sidewalls of the feature to prevent lateral etch of the dielectric material during the etching operations. The protective coating may be deposited using methods that result in formation of the protective coating along substantially the entire length of the sidewalls. The protective coating may be deposited using particular reaction mechanisms that result in substantially complete sidewall coating. Metal-containing coatings have been shown to provide particularly good resistance to lateral etch during the etching operation. In some cases, a bilayer approach may be used to deposit the protective coating on sidewalls of partially etched features.

First claim

What is claimed is:

1. A method of etching a feature in a dielectric-containing stack on a substrate, the method comprising:
(a) generating a first plasma comprising an etching reactant, exposing the substrate to the first plasma, and partially etching the feature in the dielectric-containing stack;
(b) after (a), depositing a protective film on sidewalls of the feature, the protective film comprising a metal, wherein the protective film comprises an electrically conductive film; and
(c) repeating (a)-(b) until the feature is etched to a final depth, wherein the protective film deposited in (b) substantially prevents lateral etch of the feature during (a), and wherein the feature has an aspect ratio of about 5 or greater at its final depth.

2. The method of claim 1 , wherein the protective film comprises a metal nitride, a metal carbide, a metal boride, or a combination thereof.

3. The method of claim 1 , wherein the metal in the protective film is selected from the group consisting of titanium, tantalum, ruthenium, aluminum, iron, hafnium, and combinations thereof.

4. The method of claim 3 , wherein the metal in the protective film is provided as a metal nitride, a metal carbide, a metal boride, or a combination thereof.

5. The method of claim 4 , wherein the protective film comprises metal nitride.

6. The method of claim 1 , wherein (b) comprises depositing the protective film through an atomic layer deposition reaction comprising:
(i) exposing the substrate to a first deposition reactant and allowing the first deposition reactant to adsorb onto the sidewalls of the feature; and
(ii) after (i), exposing the substrate to a second deposition reactant and reacting the first and second deposition reactants in a surface reaction, thereby forming the protective film on the sidewalls of the feature.

7. The method of claim 6 , wherein (b) does not involve plasma.

8. The method of claim 6 , wherein (ii) further comprises exposing the substrate to a second plasma comprising the second deposition reactant, wherein exposing the substrate to the second plasma drives a surface reaction between the first deposition reactant and the second deposition reactant, thereby forming the protective film on the sidewalls of the feature.

9. The method of claim 1 , wherein the protective film comprises at least a first sub-layer and a second sub-layer, the first and second sub-layers being deposited under different conditions.

10. The method of claim 9 , wherein the first and second sub-layers have different compositions.

11. The method of claim 9 , wherein the first sub-layer comprises a metal nitride, a metal oxide, a metal carbide, a metal boride, or a combination thereof, and wherein the second sub-layer comprises metal that is substantially in elemental form.

12. The method of claim 1 , wherein at the final depth, the feature has an aspect ratio of about 20 or greater, and a bow of about 20% or less.

13. The method of claim 1 , wherein the feature is formed while forming a VNAND device, and wherein the dielectric-containing stack comprises alternating layers of (i) an oxide material, and (ii) a nitride material or polysilicon material.

14. The method of claim 1 , wherein the feature is formed while forming a DRAM device, and wherein the dielectric-containing stack comprises layers of silicon oxide and one or more layers of silicon nitride.

15. The method of claim 1 , wherein (b) comprises depositing the protective film through a chemical vapor deposition reaction comprising exposing the substrate to a first deposition reactant and a second deposition reactant simultaneously.

16. The method of claim 1 , wherein (a) and (b) are repeated at least one time.

17. The method of claim 1 , wherein the protective film comprises a layer of metal that is substantially in elemental form.

Assignees

• Lam Res Corp

Inventors

• Hudson Eric A
• Wilcoxson Mark H
• Pelhos Kalman
• Shin Hyung Joo

Classifications

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/38

  Borides · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• C23C16/40

  Oxides · CPC title

• H01J37/32165

  Plural frequencies · CPC title