Permanent magnetic chuck for oled mask chucking
US-2018075958-A1 · Mar 15, 2018 · US
US10170225B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10170225-B2 |
| Application number | US-201615135337-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 21, 2016 |
| Priority date | Apr 21, 2015 |
| Publication date | Jan 1, 2019 |
| Grant date | Jan 1, 2019 |
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A permanent magnet having a periodic structure with the concentrations of Fe and T (T is one or more transition metal elements with Co or Ni as necessity) changing alternately, wherein, the concentrations change with a period of 3.3 nm or less and the concentration difference of Fe in the concentration change is 5 at % or more. The permanent magnet has a high saturation magnetization Is and coercivity HcJ and can be prepared even without rare earth element(s) R.
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What is claimed is: 1. A permanent magnet comprising a periodic structure in which concentrations of Fe and T change alternately, wherein T is at least one of Co or Ni, optionally with one or more additional transition metal elements, the concentrations change with a period of 3.3 nm or less, and a concentration difference of Fe in the concentration change is 5 at % or more. 2. The permanent magnet according to claim 1 , wherein an average composition of the periodic structure is Fe 1-x T x (0.15≤x≤0.8). 3. A rotating machine comprising the permanent magnet according to claim 1 . 4. A rotating machine comprising the permanent magnet according to claim 2 .
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