Structure for achieving dimensional stability during temperature changes

Patent metadata

Field	Value
Publication number	US-10168261-B2
Application number	US-201615076847-A
Country	US
Kind code	B2
Filing date	Mar 22, 2016
Priority date	Mar 23, 2015
Publication date	Jan 1, 2019
Grant date	Jan 1, 2019

Abstract

A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the selection of materials minimizes movement of a sample holder with respect to a nanoindentation tip over a wide range of temperatures. The system controls and minimizes motion of the sample holder due to the heating or cooling of the tip holder and/or the sample holder in a high temperature nanoindentation system. This is achieved by a combination of geometry, material selection and multiple sources and sinks of heat. The system is designed to control both the steady state and the transient displacement response.

First claim

What is claimed is:

1. A sample holding stage for a measurement instrument, the sample holding stage comprising:
a sample holder comprising:
a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface; and
a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;

a support structure comprising:
a base member that is rigidly affixed to the stem lower portion;
a tubular wall member having a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion; and
a lip member affixed to the tubular wall member, the lip member having a central opening; and

a housing comprising:
a central bore into which are received the base member and the tubular wall member of the support structure; and
an upper ledge at least partially surrounding an upper portion of the central bore,

wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction,
wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction, and
wherein the net axial displacement of the upper surface of the sample platform with respect to the upper ledge of the housing due to thermal expansion or contraction is no greater than 10 nanometers per degree change in temperature over a range of 25° C. to 1000° C.

2. The sample holding stage of claim 1 wherein the base member of the support structure has a central opening, and the tubular support stem of the sample holder is received within the central opening of the base member in a shrink fit configuration.

3. The sample holding stage of claim 2 wherein the tubular support stem and the central opening of the base member are cylindrical.

4. The sample holding stage of claim 1 further comprising a heat transfer element disposed within the sample platform for transferring heat into or removing heat from the sample platform.

5. The sample holding stage of claim 1 further comprising one or more sources or sinks of heat to statically and dynamically control temperature gradients and thereby expansions or contractions of components of the sample holding stage.

6. The sample holding stage of claim 1 wherein the lip member is clamped to an outer surface of the wall upper portion of the tubular wall member.

7. An indentation tip holding stage for a measurement instrument, the indentation tip holding stage comprising:
a housing comprising:
a housing outer surface; and
a housing central bore extending into the housing from the housing outer surface;

a support structure comprising:
a central portion disposed at least partially inside the housing central bore;
a central portion outer surface disposed outside the housing central bore;
a support structure central bore extending into the central portion from the central portion outer surface, the support structure central bore having:
a central portion bore opening in the central portion outer surface; and
a central portion bore end spaced apart from the bore opening; and

a lip member extending outwardly from the central portion and rigidly affixed to the housing outer surface; and

a tip holder disposed at least partially inside the support structure central bore, the lip holder comprising:
a receiving portion disposed adjacent the central portion bore opening, the receiving portion for receiving and holding an indentation tip; and
an attachment portion disposed inside the support structure central bore and being rigidly affixed to the central portion or the support structure adjacent the central portion bore end;

wherein the central portion or the support structure can move axially within the housing central bore due to thermal expansion or contraction, and
wherein the receiving portion of the lip holder can move axially within the support structure central bore due to thermal expansion or contraction.

8. The indentation lip holding stage of claim 7 wherein the lip holder is formed of molybdenum.

9. The indentation tip holding stage of claim 7 wherein the support structure is formed of stainless steel.

10. The indentation tip holding stage of claim 7 wherein the housing is formed of copper.

11. The indentation tip holding stage of claim 7 further comprising a heat transfer element disposed within the central portion of the support structure for transferring heat into or removing heat from the tip holder.

12. The indentation tip holding stage of claim 7 further comprising one or more sources or sinks of heat to statically and dynamically control the temperature gradients and thereby expansions or contractions.

13. The indentation tip holding stage or claim 7 wherein the net axial displacement of the receiving portion of the tip holder with respect to the central portion bore opening due to thermal expansion or contraction is no greater than 10 nanometers per degree change in temperature over a temperature range of 25° C. to 1000° C.

14. A sample holding stage for a measurement instrument, the sample holding stage comprising:
a sample holder formed of molybdenum comprising:
a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface; and
a tubular support stem having a stem upper portion that is rigidly affixed to the lower surface of the sample platform and a stem lower portion disposed below the stem upper portion;

a support structure comprising:
a base member that is rigidly affixed to the stem lower portion;
a tubular wall member having a wall lower portion that is rigidly affixed to the base member and a wall upper portion disposed above the wall lower portion; and
a lip member affixed to the tubular wall member, the lip member having a central opening; and

a housing comprising:
a central bore into which are received the base member and the tubular wall member of the support structure; and
an upper ledge at least partially surrounding an upper portion of the central bore,

wherein the lip member of the support structure is rigidly affixed to the upper ledge of the housing,
wherein the tubular support stem of the sample holder is disposed inside the tubular wall member of the support structure,
wherein at least a portion of the sample platform of the sample holder is disposed inside the central opening of the lip member of the support structure,
wherein the sample platform can move axially with respect to the tubular wall member of the support structure due to thermal expansion or contraction, and
wherein the base member of the support structure can move axially with respect to the housing due to thermal expansion or contraction.

15. A sample holding stage for a measurement instrument, the sample holding stage comprising:
a sample holder comprising:
a sample platform having an upper surface upon which a sample may be placed and a lower surface disposed below the upper surface; and
a tubular support stem having a stem upper portion that is rigidly affixed to th

Assignees

• Nanomechanics Inc
• Kla Tencor Corp

Inventors

• Oliver Warren
• Pardhasaradhi Sudharshan Phani
• Anthony Richard

Classifications

• H01J2237/28

  Scanning microscopes · CPC title

• G01Q70/04

  with compensation for temperature or vibration induced errors · CPC title

• G01N2203/0222

  Temperature · CPC title

• G01B5/0014

  due to temperature (on machine tools B23Q11/0003) · CPC title

• G01N3/42

  by performing impressions under a steady load by indentors, e.g. sphere, pyramid (G01N3/54 takes precedence) · CPC title