Stacked independently contacted field effect transistor having electrically separated first and second gates

Patent metadata

Field	Value
Publication number	US-10164121-B2
Application number	US-201615181327-A
Country	US
Kind code	B2
Filing date	Jun 13, 2016
Priority date	Nov 25, 2015
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

A semiconductor device including: a substrate; a first active layer on the substrate and including a first channel between a source and a drain; a second active layer stacked on the first active layer, the second active layer including a second channel between the source and the drain; a first gate corresponding to the first channel; and a second gate electrically separated from the first gate and corresponding to the second channel.

First claim

What is claimed is:

1. A semiconductor device comprising:
a substrate;
a first active layer on the substrate and comprising a first channel between a source and a drain;
a second active layer stacked on the first active layer in a direction normal to an upper surface of the substrate, the second active layer comprising a second channel between the source and the drain;
a first gate corresponding to the first channel; and
a second gate offset from the first gate in a direction parallel to the upper surface of the substrate, electrically separated from the first gate, and corresponding to the second channel.

2. The semiconductor device of claim 1 , wherein the first and second active layers comprise nanosheets.

3. The semiconductor device of claim 1 , wherein each of the channels is oriented in the direction parallel to the upper surface of the substrate.

4. The semiconductor device of claim 1 , wherein the source and the drain comprises a first source and a first drain corresponding to the first channel, and a second source and a second drain corresponding to the second channel.

5. The semiconductor device of claim 1 , further comprising:
a third active layer stacked on the second active layer, wherein each of the first, second, and third active layers comprises two individually gated channel regions in series; and
a third gate corresponding to the third active layer, wherein each of the first, second, and third gates is configured to control two of the channel regions in corresponding ones of the first, second, and third active layers, so that the device passes current through at least one of the channel layers when two or three of the first, second, and third gates are biased to an on state.

6. A semiconductor device comprising:
a substrate;
a first active layer on the substrate and comprising a first channel between a source and a drain;
a second active layer stacked on the first active layer, the second active layer comprising a second channel between the source and the drain;
a first gate corresponding to the first channel;
a second gate electrically separated from the first gate and corresponding to the second channel; and
a plurality of first active layers, each of the first active layers comprising a channel, at a same vertical level as the first active layer, and a plurality of second active layers, each of the second active layers comprising a channel, at a same vertical level as the second active layer, wherein one or more of the first and second active layers constitutes a FET.

7. The semiconductor device of claim 6 , wherein at least two of the channels of the first and second active layers are configured to be controlled by a single gate contact.

8. A stacked independently contacted field effect transistor (SICFET) device comprising:
a substrate;
a first active layer on the substrate;
a first low k layer on the first active layer;
a first gate metal between the substrate and the first active layer, and between the first active layer and the first low k layer;
a second active layer on the first low k layer and overlapping with the first active layer in a vertical direction;
a second low k layer on the second active layer; and
a second gate metal between the first low k layer and the second active layer, and between the second active layer and the second low k layer,
wherein contacts of the first and second gate metals are aligned horizontally on a plane parallel to a top surface of the SICFET.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Hatcher Ryan M
• Obradovic Borna J
• Hong Joon Goo
• Sengupta Rwik

Classifications

• H01L29/778

  Electricity · mapped topic

• H01L29/66742

  Electricity · mapped topic

• H01L29/0673

  Electricity · mapped topic

• H01L29/42392

  Electricity · mapped topic

• H01L29/78645

  Electricity · mapped topic