Monolithic PZT actuator, stage, and method for making

Patent metadata

Field	Value
Publication number	US-10158063-B2
Application number	US-201414785442-A
Country	US
Kind code	B2
Filing date	Apr 18, 2014
Priority date	Apr 18, 2013
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

A monolithic, bulk piezoelectric actuator includes a bulk piezoelectric substrate having a starting top surface and an opposing starting bottom surface and a at least two electrodes operatively disposed on the bulk piezoelectric substrate consisting of at least two discrete electrodes disposed on either/both of the starting top surface and the starting bottom surface and at least one electrode disposed on the respective other starting bottom surface or starting top surface. A stage includes a base, at least two of the monolithic, bulk piezoelectric actuators disposed on the base, a movable platform disposed on the base, and a respective number of deformable connectors each having a first connection to a respective one of the piezoelectric actuators and a second connection to a respective portion of the movable platform. A method for monolithically making a monolithic, bulk piezoelectric actuator involves a direct write micropatterning technique.

First claim

We claim:

1. A monolithic piezo actuator, comprising:
a bulk piezoelectric substrate having a starting top surface and an opposing starting bottom surface, and at least one intermediate surface; and
a plurality of electrodes operatively disposed on the bulk piezoelectric substrate, consisting of:
a plurality of discrete electrodes disposed on at least one of the starting top surface and the starting bottom surface and at least one electrode disposed on the at least one of the respective starting bottom surface and the starting top surface;
wherein the piezoelectric actuator is characterized by an operative condition comprising an out-of-plane twisting motion.

2. The piezoelectric actuator of claim 1 , characterized by an operative condition comprising an in-plane motion.

3. The piezoelectric actuator of claim 1 , characterized by a width, W, a height, H, and a length, L, where W is less than or about equal to H to enable high aspect ratio piezoelectric beam structures.

4. The piezoelectric actuator of claim 3 , wherein the piezoelectric actuator is comprised of a plurality of monolithic, contiguous segments, each next adjoining segment of which has an in-plane orientation along the length, L, that is different than that of its respective prior segment by between greater than zero degrees to +90 degrees.

5. The piezoelectric actuator of claim 1 , wherein the bulk piezoelectric substrate is asymmetric in the H direction.

6. The piezoelectric actuator of claim 3 , wherein the piezoelectric actuator has a curvilinear length dimension.

7. A stage, comprising:
a PZT base;
a plurality of the piezoelectric actuators of claim 1 disposed on the base;
a movable platform disposed on the base; and
a plurality of deformable connectors each having a first connection to a respective one of the plurality of piezoelectric actuators and a second connection to a respective portion of the movable platform,
wherein the stage is electrically controllable.

8. The stage of claim 7 , wherein each of the plurality of the piezoelectric actuators are characterized by an operative condition of substantially only in-plane motion.

9. The stage of claim 7 , wherein each of the plurality of the piezoelectric actuators are characterized by a width, W, a height, H, and a length, L, where W is less than or about equal to H.

10. The stage of claim 9 , wherein each of the plurality of the piezoelectric actuators is comprised of a plurality of monolithic, contiguous segments, each next adjoining segment of which has an in-plane orientation along the length, L, that is different than that of its respective prior segment by between greater than zero degrees to +90 degrees.

11. The stage of claim 7 , wherein the bulk piezoelectric substrate of each of the plurality of the piezoelectric actuators has at least one intermediate surface.

12. The stage of claim 11 , wherein each of the bulk piezoelectric substrates is asymmetric in the H direction.

13. The stage of claim 11 , wherein each of the bulk piezoelectric substrates is characterized by an operative condition comprising an out-of-plane twisting motion.

14. The stage of claim 9 , wherein each of the bulk piezoelectric actuators has a curvilinear length dimension.

15. The stage of claim 7 , wherein the moveable platform is PZT.

16. The stage of claim 15 , wherein the moveable PZT platform integrally comprises a monolithic, bulk PZT device.

17. The stage of claim 16 , wherein the monolithic, bulk PZT device is at least one of a sensor, a gyroscope, an accelerometer, and an energy harvester.

18. The stage of claim 7 , further comprising a monolithic, bulk PZT device mounted on the moveable platform.

19. The stage of claim 18 , wherein the monolithic, bulk PZT device is at least one of a sensor, a gyroscope, an accelerometer, and an energy harvester.

Assignees

• Univ Cornell

Inventors

• Lal Amit
• Nadig Sachin
• Ardanuc Serhan Mehmet

Classifications

• H01L41/0953

  Electricity · mapped topic

• H01L41/335

  Electricity · mapped topic

• H01L41/1132

  Electricity · mapped topic

• H01L41/0933 Primary

  Electricity · mapped topic

• G01C19/5755

  the devices having a single sensing mass · CPC title