Vacuum valve for controlling a flow and for interrupting a flow path

Patent metadata

Field	Value
Publication number	US-10156299-B2
Application number	US-201715621831-A
Country	US
Kind code	B2
Filing date	Jun 13, 2017
Priority date	Jun 14, 2016
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (E S ), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (E T ), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where E S and E T enclose a defined angle (α), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

First claim

The invention claimed is:

1. A vacuum control valve for controlling a volume flow or mass flow and for interrupting a flow path in a gas-tight manner, having
a valve seat which comprises a valve opening, which defines an opening axis (A), and a first sealing surface which runs around the valve opening and defines a first sealing plane (E S ),
a valve disk for controlling the volume flow or mass flow and for interrupting the flow path, having a second sealing surface which corresponds to the first sealing surface, wherein the second sealing surface defines a second sealing plane (E T ), a modifiable position of which is determined by a respective position and alignment of the valve disk,
a first coupling element, which is connected to the valve disk and comprises a receiving means, for providing controlled guidance of the valve disk and
a drive unit which is coupled with the first coupling element and is configured in such a manner that the valve disk is adjustable from
an open position, in which the valve disk and the valve seat are present in a contactless manner relative to one another, into
a closed position, in which there is axially sealing contact between the first sealing surface and the second sealing surface as a result of a seal which lies between them, and in which the valve opening is closed in a gas-tight manner as a result,

and that the valve disk is adjustable back from the closed position to the open position, along a geometric longitudinal axis in a longitudinal closing direction,

wherein
the drive unit and the valve disk are configured and interact in such a manner that the valve disk is adjustable into a fine control position, wherein
the valve disk is tilted in a defined manner relative to the valve seat in such a manner that the first sealing plane (E S ) and the second sealing plane (E T ) enclose a defined angle (α), and
the seal abuts fully against the first or second sealing surface and abuts only in part against the respectively other sealing surface.

2. The vacuum control valve according to claim 1 , wherein the drive unit and the valve disk are configured and coupled in such a manner that when adjusting the valve disk from the open position into the closed position or from the closed position into the open position, the valve disk assumes the fine control position prior to reaching the closed position or rather prior to reaching the open position.

3. The vacuum control valve according to claim 1 , wherein the valve disk is positioned in the fine control position in such a manner that the second sealing plane (E T ), which is defined by an extension of the second sealing surface, tilts to the opening axis (A) or to the longitudinal axis.

4. The vacuum control valve according to claim 1 , wherein
the first sealing surface points in a direction parallel to the opening axis (A) or longitudinal axis and extends orthogonally to the opening axis (A) or longitudinal axis, or
the first sealing surface points in a direction transversely to the opening axis (A) or longitudinal axis and tilted to a plane which extends orthogonally to the opening axis (A) or longitudinal axis.

5. The vacuum control valve according to claim 1 , wherein
the first and second sealing planes (E S , E T ) enclose the defined angle (α) in the open position and in the fine control position, and
the first and second sealing planes (E S , E T ) are aligned substantially parallel in the closed position.

6. The vacuum control valve according to claim 1 , wherein a second, several or a plurality of fine control positions of the valve disk are adjustable wherein
an angle (α n ), which is enclosed in each case by the first and second sealing planes (E S , E T ), is different in each case, and
the seal abuts fully in each case against one of the two sealing surfaces and abuts only in part against the other sealing surface.

7. The vacuum control valve according to claim 6 , wherein the second, several or the plurality of fine control positions of the valve disk are successively adjustable.

8. The vacuum control valve according to claim 6 , wherein the plurality of fine control positions are adjustable in a controlled manner in each case individually or continuously and consequently a control of the volume flow or mass flow of a medium through the valve opening is providable.

9. The vacuum control valve according to claim 8 , wherein the control of the volume flow or mass flow of the medium through the valve opening is providable in a continuous manner.

10. The vacuum control valve according to claim 1 , wherein the first coupling element is configured as a cross member which extends transversely with respect to the opening axis (A) or to the longitudinal axis and is connected to the valve disk at at least one connecting point on a rear side of the valve disk, wherein the receiving means provides a central coupling point for coupling the drive unittransversely with respect to a direction of extension of the cross member, and the cross member is connected to the drive unit by means of an adjustment arm which extends transversely with respect to the direction of extension.

11. The vacuum control valve according to claim 10 , wherein the connection between the cross member and the valve disk comprises a friction stir welding connection at the at least one connecting point.

12. The vacuum control valve according to claim 10 , wherein the cross member
is connected to the valve disk on the rear side of the valve disk at least two lateral connecting points which are located on both sides of the central coupling point,
is at a spacing from the rear side, in a central portion, which includes the central coupling point and portions which connect on both sides to the coupling point and extends between the at least two lateral connecting points, and
is configured resiliently in such a manner that as a result of distortion of the cross member, the valve disk is pivotable relative to the adjustment arm about a pivot axis (S) which is at right angles to the opening axis (A) or to the longitudinal axis.

13. The vacuum control valve according to claim 1 , wherein
the drive unit comprises at least one motor and at least one guide component, which is movable by means of the at least one motor in a controlled manner along or parallel to the longitudinal axis, and
the valve disk is connected to the at least one guide component by means of the receiving means and is movable relative to the valve seat.

14. The vacuum control valve according to claim 13 , wherein the drive unit comprises two guide components, which are movable by means of the at least one motor in a controlled manner parallel to the longitudinal axis.

15. The vacuum control valve according to claim 14 , wherein
the valve disk comprises a second coupling element which is connected to it and has a receiving means, wherein the first and second coupling elements are arranged directly on the valve disk, and
in each case a guide component is connected to a respective one of the receiving means of the first and second coupling elements.

16. The vacuum control valve according to claim 14 , wherein
the drive unit comprises two motors and each of the two guide components is movable in a controlled manner by one of the two motors, and
the fine control position is providable by means of a defined actuation of the two motors in such a manner that the tilt position of the first sealing plane (E S ) relative to the second sealing plane (E T ) can be brought about as a result.

17. The vacuum control valve according to claim

Assignees

• Vat Holding Ag

Inventors

• Netzer Martin
• Seitz Daniel
• Sonderegger Harald

Classifications

• F16K51/02 Primary

  specially adapted for high-vacuum installations · CPC title

• F16K1/24

  with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat · CPC title

• F16K31/047

  characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means (F16K31/043 takes precedence) · CPC title

• F16K1/36 Primary

  Valve members (for double-seat valves F16K1/44 {; for butterfly valves F16K1/222, F16K1/223}) · CPC title

• B23K20/122

  using a non-consumable tool, e.g. friction stir welding · CPC title