Method and device for measuring actuators in a projection exposure apparatus for semiconductor lithography
US-2023228798-A1 · Jul 20, 2023 · US
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Seitz Daniel patents
Seitz Daniel is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Seitz Daniel |
| Total patents | 1 |
| First publication | Jul 20, 2023 |
| Latest publication | Jul 20, 2023 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01R27/2605 | 1 |
| G03F7/7085 | 1 |
| G03F7/70266 | 1 |
| H10N30/802 | 1 |
| G02B26/0825 | 1 |