Composite device with cylindrical anisotropic thermal conductivity

Patent metadata

Field	Value
Publication number	US-10154542-B2
Application number	US-201514886783-A
Country	US
Kind code	B2
Filing date	Oct 19, 2015
Priority date	Oct 19, 2015
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate and method of making the same is provided. The apparatus includes a base support having a surface adapted to support the substrate and a heater for heating the substrate with the heater being disposed proximate the base support. The base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, each of the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support.

First claim

What is claimed is:

1. An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate, the apparatus comprising:
a base support including a surface adapted to support the substrate; and
a heater for heating the substrate, the heater disposed proximate the base support,
wherein the base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, the plurality of thermally conductive arcuate members being arranged concentrically and defining predetermined intervals with spacing in a radial direction such that the thermal conductivity in an azimuthal direction (φ) of the base support is higher than that in the radial direction (ρ) and that in an axial direction (z) of the base support and such that heat from the heater is uniformly distributed along the azimuthal direction of the base support, and
wherein the plurality of thermally conductive arcuate members are separate from an electrical circuit of the heater and are heated by heat transfer from the heater.

2. The apparatus according to claim 1 , wherein the plurality of thermally conductive arcuate members define continuous rings.

3. The apparatus according to claim 1 , wherein the plurality of thermally conductive arcuate members define symmetrical segments arranged in zones.

4. The apparatus according to claim 1 , wherein the plurality of thermally conductive arcuate members define different lengths.

5. The apparatus according to claim 1 , wherein the plurality of thermally conductive arcuate members define different materials.

6. The apparatus according to claim 1 , wherein at least one of the plurality of thermally conductive arcuate members defines a variable width.

7. The apparatus according to claim 1 , wherein at least one of the plurality of thermally conductive arcuate members defines a variable trace geometry.

8. The apparatus according to claim 1 , wherein the matrix is a polyimide material.

9. The apparatus according to claim 8 , wherein the polyimide material is a poly-oxydiphenylene-pyromellitimide material.

10. The apparatus according to claim 1 , wherein the thermally conductive arcuate members are graphite fibers.

11. The apparatus according to claim 10 , wherein the thermal conductivity of the base support in the radial and axial directions is at least 0.4 W/mK when about 10% by weight of the base support comprises the graphite fibers.

12. The apparatus according to claim 10 , wherein the thermal conductivity of the base support in the radial and axial directions is less than 6.0 W/mK when about 88% by weight of the base support comprises the graphite fibers.

13. The apparatus according to claim 10 , wherein the thermal conductivity of the base support in the azimuthal direction is at least 80 W/mK when about 8% by weight of the base support comprises the graphite fibers.

14. The apparatus according to claim 10 , wherein the thermal conductivity of the base support in the azimuthal direction is less than 900 W/mK when about 90% by weight of the base support comprises the graphite fibers.

15. The apparatus according to claim 1 , wherein the heater is a layered heater.

16. An apparatus for providing heat to a target part, the apparatus comprising a base support made of a composite material comprising at least one thermally conductive arcuate member embedded within a matrix, wherein the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support,
wherein the at least one thermally conductive arcuate member is arranged such that the thermal conductivity of the azimuthal direction is higher than the radial or axial directions and such that heat applied to the base support is uniformly distributed along the azimuthal direction of the base support, and
wherein the at least one thermally conductive arcuate member is separate from an electrical circuit of a heater and is heated by heat transfer from the heater.

17. The apparatus according to claim 16 , further comprising a plurality of thermally conductive arcuate members arranged concentrically and defining predetermined intervals in a radial direction.

18. The apparatus according to claim 17 , wherein the plurality of thermally conductive arcuate members define continuous rings.

19. A method of providing heat to a target part comprising:
providing a base support made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals with spacing in a radial direction; and
applying heat to the base support through an adjacent component,
wherein the thermal conductivity in an azimuthal direction (φ) of the base support is higher than that in the radial direction (ρ) and that in an axial direction (z) of the base support and such that the heat applied to the base support is uniformly distributed along the azimuthal direction of the base support, and
wherein the plurality of thermally conductive arcuate members are separate from an electrical circuit of a heater and are heated by heat transfer from the heater.

Assignees

• Watlow Electric Mfg

Inventors

• Zhang Sanhong
• Ptasienski Kevin
• Smith Kevin R

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H05B1/0233 Primary

  for semiconductors manufacturing · CPC title

• H05B3/267

  the insulating base being an organic material, e.g. plastic (H05B3/262 takes precedence) · CPC title