Wavefront correction element for use in an optical system

Patent metadata

Field	Value
Publication number	US-10151922-B2
Application number	US-201715789200-A
Country	US
Kind code	B2
Filing date	Oct 20, 2017
Priority date	Apr 20, 2015
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

A wavefront correction element for an optical system, in particular an optical system of a microlithographic projection exposure apparatus or a mask inspection apparatus, has a carrier film (110, 210, 410) which at least partly transmits electromagnetic radiation that has an operating wavelength of the optical system and that impinges on the carrier film during operation of the optical system. The carrier film (110, 210, 410) is configured such that the real part of the complex refractive index of the carrier film varies over a used region of the surface of the carrier film (110, 210, 410).

First claim

What is claimed is:

1. A wavefront correction element for use in an optical system, comprising:
a carrier film which at least partly transmits electromagnetic radiation that has an operating wavelength of the optical system and impinges on a surface of the carrier film during operation of the optical system;
wherein the carrier film is configured such that a real part of a complex refractive index of the carrier film varies over a used region of the surface of the carrier film,
wherein the carrier film is produced from a first material, wherein the variation of the real part of the refractive index is produced by doping the carrier film with impurity atoms of a second material,
wherein the carrier film has further doping with impurity atoms of a third material, which differs from the first material and from the second material, and
wherein the further doping at least partly compensates a variation in the intensity, induced by the impurity atoms of the second material, of the electromagnetic radiation transmitted through the wavefront correction element over a used region of the surface of the carrier film.

2. The wavefront correction element as claimed in claim 1 , wherein the variation of the real part of the refractive index is configured such that, during the operation of the optical system, a wavefront modification which at least partly corrects a wavefront aberration present in the optical system is brought about for electromagnetic radiation that is transmitted through the wavefront correction element.

3. The wavefront correction element as claimed in claim 1 , wherein the variation of the real part of the refractive index over a used region of the surface of the carrier film is at least 10% in relation to the maximum value of the real part of the refractive index.

4. The wavefront correction element as claimed in claim 1 , wherein the doping factor integrated along the thickness of the carrier film varies for the doping over the used region of the surface of the carrier film.

5. The wavefront correction element as claimed in claim 1 , wherein the first material is selected from the group consisting of silicon (Si), zirconium (Zr), molybdenum (Mo), ruthenium (Ru) and niobium (Nb).

6. The wavefront correction element as claimed in claim 1 , wherein the second material is selected from the group consisting of molybdenum (Mo), ruthenium (Ru), carbon (C), niobium (Nb) and titanium (Ti).

7. The wavefront correction element as claimed in claim 1 , wherein the third material is selected from the group containing germanium (Ge), aluminum (Al), iodine (I), magnesium (Mg) and gallium (Ga).

8. The wavefront correction element as claimed in claim 1 , wherein the carrier film has a constant thickness.

9. The wavefront correction element as claimed in claim 1 , wherein the carrier film has a thickness profile with a varying thickness.

10. The wavefront correction element as claimed in claim 1 , wherein a protective layer is provided on at least one side of the carrier film.

11. The wavefront correction element as claimed in claim 1 , wherein the carrier film is provided on a reflective optical element.

12. The wavefront correction element as claimed in claim 1 and configured for an operating wavelength of less than 30 nm.

13. A mirror, comprising a mirror substrate and a reflection layer stack with a plurality of layers, wherein one of the layers is embodied as a wavefront correction element as claimed in claim 1 .

14. A method for producing a wavefront correction element configured for an optical system, comprising:
providing a carrier film which at least partly transmits electromagnetic radiation that has an operating wavelength of the optical system and impinges on a surface of the carrier film during operation of the optical system, wherein the carrier film is produced from a first material; and
processing the carrier film such that a variation of a real part of a complex refractive index of the carrier film is produced over a used region of the surface of the carrier film,
wherein the processing of the carrier film comprises:
doping the carrier film with impurity atoms of a second material, which differs from the first material,
further doping the carrier film with impurity atoms of a third material, which differs from the first material and from the second material, and

wherein the further doping at least partly compensates a variation in the intensity, induced by the impurity atoms of the second material, of the electromagnetic radiation transmitted through the wavefront correction element over a used region of the surface of the carrier film.

15. The method as claimed in claim 14 , wherein a protective layer is embodied on at least one side of the carrier film.

16. The method as claimed in claim 15 , wherein the doping with the impurity atoms of the second material is effectuated after forming the protective layer.

17. An optical system of a microlithographic projection exposure apparatus, comprising at least one wavefront correction element as claimed in claim 1 .

18. A microlithographic projection exposure apparatus comprising an illumination device and a projection lens, wherein the projection exposure apparatus comprises a wavefront correction element as claimed in claim 1 .

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Banyay Matus
• Weiser Martin
• Bittner Boris

Classifications

• G03F7/70308

  Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift · CPC title

• H01S3/0903

  Free-electron laser · CPC title

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• G02B17/0856

  comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors · CPC title

• G02B27/0025 Primary

  for optical correction, e.g. distorsion, aberration · CPC title