Scanning probe microscope and probe contact detection method

Patent metadata

Field	Value
Publication number	US-10151773-B2
Application number	US-201715468668-A
Country	US
Kind code	B2
Filing date	Mar 24, 2017
Priority date	Mar 29, 2016
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

First claim

What is claimed is:

1. A scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprising
a cantilever having the probe at its tip;
a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever;
a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever;
a measuring unit to measure a relative distance that is a distance by which one of the probe and the surface of the sample is forced to move relative to the other when they are forced to bring into contact with each other;
a movement driving unit to move the probe backwards in a direction away from the sample and to move it to a next measurement position of the sample after the relative distance has been measured by the measuring unit; and
a calculation unit to calculate a distance by which the probe is moved backwards in the direction away from the sample, based on the bending amount and the torsion amount; and
wherein the movement driving unit includes, a XY scanner which, after said backwards movement, moves the probe to a before-lowering position for measurement which is positioned directly above the next measurement position and which is not brought into contact with the probe, and a Z-direction driving device which lowers the probe from the before-lowering position for measurement to the next measurement position.

2. The scanning probe microscope according to claim 1 , wherein the contact determination unit determines that the probe has been brought into contact with the surface of the sample when at least one of the bending amount and the torsion amount exceeds a predetermined range.

3. The scanning probe microscope according to claim 2 , further comprising a movement driving unit for scanning with the probe, wherein the movement driving unit is configured to control one of the bending amount and the torsion amount detected by the displacement detection unit to be maintained within boundary values, and to control the other amount to be maintained within the predetermined range.

4. A method of detecting a probe contact of a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprising
a displacement detection step of detecting both a bending amount and a torsion amount of a cantilever having the probe at its tip;
a contact determination step of determining a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection step in all directions from an undeformed condition of the cantilever;
a measuring step of measuring a relative distance that is a distance by which one of the probe and the surface of the sample is forced to move relative to the other when they are forced to bring into contact with each other;
a backward moving step of calculating a distance by which the probe is moved backwards in the direction away from the sample, based on the bending amount and the torsion amount, and moving the probe backwards in a direction away from the sample; and
a moving step of moving the probe to a next measurement position of the sample after the relative distance has been measured by the measuring unit, wherein after said backwards moving step, a XY scanner moves the probe to a before-lowering position for measurement which is positioned directly above the next measurement position and which is not brought into contact with the probe, and a Z-direction driving device lowers the probe from the before-lowering position for measurement to the next measurement position.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Shigeno Masatsugu
• Watanabe Kazutoshi
• Watanabe Masafumi
• Yamamoto Hiroyoshi
• Chinone Kazuo

Classifications

• G01Q10/065 Primary

  Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title

• G01Q10/02 Primary

  Coarse scanning or positioning · CPC title

• G01Q10/04

  Fine scanning or positioning · CPC title

• G01Q20/00 Primary

  Monitoring the movement or position of the probe · CPC title

• G01Q60/00 Primary

  Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof · CPC title