System for weighing individual micro- and nano-sized particles

Patent metadata

Field	Value
Publication number	US-10151620-B2
Application number	US-201715799887-A
Country	US
Kind code	B2
Filing date	Oct 31, 2017
Priority date	Oct 25, 2013
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

A device for weighing micro- and nano-sized particles. The device includes a base portion, an oscillator coupled to the base portion configured to vibrate the base portion, a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end, and a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end, each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, respectively, such that the entirety of each cantilever beam is positioned in a side-by-side manner next to the entirety of the other forming substantially mirror images of one another, the first plurality of fingers interdigitating with the second plurality of fingers such that the first cantilevered beam and the second cantilevered beam can oscillate independent of each other, the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern.

First claim

The invention claimed is:

1. A device for weighing micro- and nano-sized particles, comprising:
a base portion;
an oscillator coupled to the base portion configured to vibrate the base portion;
a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end; and
a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end;
each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, respectively, such that the entirety of each cantilever beam is positioned in a side-by-side manner next to the entirety of the other forming substantially mirror images of one another;
the first plurality of fingers interdigitating with the second plurality of fingers such that the first cantilevered beam and the second cantilevered beam can oscillate independent of each other,
the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern.

2. The device of claim 1 , the tip of the first cantilevered beam includes a first retaining feature configured to maintain position of a particle placed thereon for weighing.

3. The device of claim 2 , the tip of the second cantilevered beam includes a second retaining feature configured to maintain position of a reference weight placed thereon for weighing the particle.

4. The device of claim 1 , the first and second cantilevered beams are silicon-based.

5. The device of claim 1 , each cantilevered beam has a length of between about 50 μm to 500 μm and a width outside of the tip portion of each of the first and second cantilever beams of between about 10 μm to 100 μm.

6. The device of claim 5 , the tip portion of each of the first and second cantilever beams has a width of between about 10 μm to 100 μm.

7. The device of claim 6 , each of the fingers has a width of between about 2 to 5 μm and a length of between about 10 μm to 100 μm and the gap is between about 1 μm to 5 μm.

8. The device of claim 1 , wherein the first and second cantilever beams are configured to provide a relative weight difference measurement generating a measurement of differences of mass between two weights each placed on a corresponding cantilever beam.

9. A system for weighting micro- and nano sized particles, comprising:
a resonator, the resonator comprising:
a base portion,
an oscillator configured to provide mechanical vibration according to a selective sweep of frequencies to the base portion;
a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end, and
a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end,
each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, respectively, such that the entirety of each cantilever beam is positioned in a side-by-side manner next to the entirety of the other forming substantially mirror images of one another,
the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern;

a light source positioned proximate to the resonator and configured to shine light on the interdigitating fingers; and
at least one optical detector positioned proximate to the resonator to measure light intensity of at least one of the modes of the diffraction pattern.

10. The system of claim 9 , the at least one mode is the 0 th mode.

11. The system of claim 9 , the light source is a laser.

12. The system of claim 9 , the tip of the first cantilevered beam includes a first retaining feature configured to maintain position of a particle placed thereon for weighing.

13. The system of claim 12 , the tip of the second cantilevered beam includes a second retaining feature configured to maintain position of a reference weight placed thereon for weighing the particle.

14. The system of claim 9 , the first and second cantilevered beams are silicon-based.

15. The system of claim 9 , wherein the first and second cantilever beams are configured to provide a relative weight difference measurement generating a measurement of differences of mass between two weights each placed on a corresponding cantilever beam.

16. A device for weighing micro- and nano-sized particles, comprising:
a base portion;
an oscillator coupled to the base portion configured to vibrate the base portion;
a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end; and
a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end;
each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, respectively, such that the entirety of each cantilever beam is sized and shaped substantially the same as the other forming substantially mirror images of one another, and whereby the first and second cantilever beams positioned to allow the first plurality of fingers interdigitating with the second plurality of fingers such that the first cantilevered beam and the second cantilevered beam can oscillate independent of each other,
the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern, wherein the first and second cantilever beams are configured to provide a relative weight difference measurement generating a measurement of differences of mass between two weights each placed on a corresponding cantilever beam.

17. The device of claim 16 , the tip of the first cantilevered beam includes a first retaining feature configured to maintain position of a particle placed thereon for weighing.

18. The device of claim 17 , the tip of the second cantilevered beam includes a second retaining feature configured to maintain position of a reference weight placed thereon for weighing the particle.

19. The device of claim 16 , the first and second cantilevered beams are silicon-based.

Assignees

• Purdue Research Foundation

Inventors

• Savran Cagri Abdullah
• Chan Bin-Da
• Icoz Kutay

Classifications

• G01G3/165 Primary

  Constructional details · CPC title

• G01G3/16

  measuring variations of frequency of oscillations of the body · CPC title