Vibrating body, method of manufacturing the same and vibration type drive device
US-9818925-B2 · Nov 14, 2017 · US
Piezoelectric driving device and driving method therefor, and robot and driving method therefor
US10147866B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10147866-B2 |
| Application number | US-201514824308-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 12, 2015 |
| Priority date | Aug 13, 2014 |
| Publication date | Dec 4, 2018 |
| Grant date | Dec 4, 2018 |
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- Title
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Abstract
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A piezoelectric driving device includes a vibrating plate and a piezoelectric vibrator provided on the vibrating plate. The piezoelectric vibrator has a first electrode, a second electrode, and a piezoelectric body located between the first electrode and the second electrode, and a thickness of the piezoelectric body is within a range from 50 nm to 20 μm.
First claim
Opening claim text (preview).
What is claimed is: 1. A piezoelectric driving device comprising: a vibrating plate having first and second plate surfaces that are opposite to each other, the vibrating plate having a projection that outwardly extends from an end side surface of the vibrating plate in a first direction; a first substrate that is bonded directly on the first plate surface of the vibrating plate; a first piezoelectric vibrator that is disposed on the first substrate, the first piezoelectric vibrator having a first electrode, a second electrode, and a first piezoelectric body directly located between the first electrode and the second electrode, the first electrode being directly disposed on the first substrate; a second substrate that is bonded directly on the second plate surface of the vibrating plate; and a second piezoelectric vibrator that is disposed on the second substrate, the second piezoelectric vibrator having a third electrode, a fourth electrode, and a second piezoelectric body located directly between the third electrode and the fourth electrode, the third electrode being disposed directly on the second substrate, wherein a thickness of each of the first and second piezoelectric bodies is within a range from 50 nm to 20 μm, and when a driving current is applied to the first, second, third, and fourth electrodes, the vibrating plate is caused to vibrate so that the projection moves in a second direction perpendicular to the first direction. 2. The piezoelectric driving device according to claim 1 , wherein the thickness of each of the first and second piezoelectric bodies is within a range from 400 nm to 20 μm. 3. The piezoelectric driving device according to claim 1 , wherein each of the first and second substrates is a silicon substrate. 4. The piezoelectric driving device according to claim 1 , wherein the projection is configured to physically contact a driven member. 5. A robot comprising: a plurality of link parts; a plurality of joint parts connecting the plurality of link parts; and a piezoelectric driving device including: a vibrating plate having first and second plate surfaces that are opposite to each other, the vibrating plate having a projection that outwardly extends from an end side surface of the vibrating plate in a first direction; a first substrate that is bonded directly on the first plate surface of the vibrating plate; a first piezoelectric vibrator that is disposed on the first substrate, the first piezoelectric vibrator having a first electrode, a second electrode, and a first piezoelectric body located directly between the first electrode and the second electrode, the first electrode being disposed directly on the first substrate; a second substrate that is bonded directly on the second plate surface of the vibrating plate; and a second piezoelectric vibrator that is disposed on the second substrate, the second piezoelectric vibrator having a third electrode, a fourth electrode, and a second piezoelectric body located directly between the third electrode and the fourth electrode, the third electrode being disposed directly on the second substrate, wherein a thickness of each of the first and second piezoelectric bodies is within a range from 50 nm to 20 μm, when a driving current is applied to the first, second, third, and fourth electrodes, the vibrating plate is vibrated so that the projection moves in a second direction perpendicular to the first direction, and wherein the piezoelectric driving device is configured to rotate one of the plurality of link parts. 6. The robot according to claim 5 , wherein the thickness of each of the first and second piezoelectric bodies is within a range from 400 nm to 20 μm. 7. The robot according to claim 5 , wherein each of the first and second substrates is a silicon substrate. 8. The robot according to claim 5 , wherein the projection is configured to physically contact a driven member.
Assignees
Inventors
Classifications
Electricity · mapped topic
Electricity · mapped topic
Joints · CPC title
Joint · CPC title
- H01L41/042Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US10147866B2 cover?
- A piezoelectric driving device includes a vibrating plate and a piezoelectric vibrator provided on the vibrating plate. The piezoelectric vibrator has a first electrode, a second electrode, and a piezoelectric body located between the first electrode and the second electrode, and a thickness of the piezoelectric body is within a range from 50 nm to 20 μm.
- Who is the assignee on this patent?
- Seiko Epson Corp
- What technology area does this patent fall under?
- Primary CPC classification H01L41/042. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 04 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).