Vibrating body, method of manufacturing the same and vibration type drive device

Patent metadata

Field	Value
Publication number	US-9818925-B2
Application number	US-201313915155-A
Country	US
Kind code	B2
Filing date	Jun 11, 2013
Priority date	Jun 14, 2012
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

A vibrating body includes a substrate, a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate, and a ceramic layer between the substrate and the piezoelectric element. The ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer. The first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer, the second region has a square shape, each side of the second region having the length equal to the thickness of the ceramic layer, and a difference between a porosity of the first region and a porosity of the second region is not greater than 15%.

First claim

What is claimed is:

1. A vibrating body comprising:
a substrate;
a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate; and
a ceramic layer between the substrate and the piezoelectric element,
wherein the ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer,
wherein the first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer,
wherein the second region has a square shape, each side of the second region having a length equal to the thickness of the ceramic layer,
wherein a difference between a porosity of the first region and a porosity of the second region is not greater than 15%,
wherein a porosity of the entire ceramic layer is between 10 and 60%, and
wherein the porosity of the entire ceramic layer is higher than a porosity of the entire piezoelectric layer.

2. The vibrating body according to claim 1 , wherein the ceramic layer is an admixture of glass powder containing a glass ingredient that has been molten once.

3. The vibrating body according to claim 1 , wherein the ceramic layer contains an ingredient same as an ingredient of the piezoelectric layer as principal ingredients.

4. The vibrating body according to claim 1 , wherein the piezoelectric layer contains lead zirconate and lead titanate as principal ingredients.

5. The vibrating body according to claim 1 , wherein the piezoelectric element is formed by baking the piezoelectric layer and the electrode layers containing silver, silver and palladium, or palladium, simultaneously.

6. The vibrating body according to claim 1 , wherein the electrode layers of the piezoelectric element contain, in silver, silver and palladium, or palladium, powder of an ingredient same as a principal ingredient of the piezoelectric layer.

7. The vibrating body according to claim 1 , wherein the substrate is made of alumina representing a purity of not less than 99.5 wt % and not more than 99.99 wt %.

8. The vibrating body according to claim 1 , wherein the piezoelectric element is rigidly secured to the substrate by way of the ceramic layer.

9. A vibration type drive device comprising:
a vibrating body according to claim 1 as a drive power source.

10. A vibrating body comprising:
a substrate;
a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate; and
a ceramic layer between the substrate and the piezoelectric element,
wherein the ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer,
wherein the first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer,
wherein the second region has a square shape, each side of the second region having a length equal to the thickness of the ceramic layer,
wherein a difference between a porosity of the first region and a porosity of the second region is not greater than 15%,
wherein the ceramic layer is an admixture of glass powder containing a glass ingredient that has been molten once,
wherein the glass powder admixed with the ceramic material of the ceramic layer contains silicon oxide by 20 to 80 mol %, boron oxide by 1 to 40 mol % and one or more than one alkali earth metal oxides by 1 to 40 mol %, and
wherein the glass powder is added to ceramic powder of the ceramic layer by not less than 0.5 wt % and not more than 10 wt % of weight of the ceramic powder.

11. A vibrating body comprising:
a substrate;
a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate; and
a ceramic layer between the substrate and the piezoelectric element,
wherein a porosity of the entire ceramic layer is higher than a porosity of the entire piezoelectric layer, and
wherein the porosity of the entire ceramic layer is between 10 and 60%.

12. The vibrating body according to claim 11 ,
wherein the ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer,
wherein the first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer,
wherein the second region has a square shape, each side of the second region having a length equal to the length of the side first region, and
wherein a difference between a porosity of the first region and a porosity of the second region is not greater than 15%.

13. A vibration type drive device comprising:
a vibrating body according to claim 11 as a drive power source.

14. The vibrating body according to 11 ,
wherein said substrate is made of a ceramic, and
wherein said ceramic layer contains glass material.

15. A vibration type drive device comprising:
the vibrating body according to claim 14 further comprising a plate having projections arranged on the vibrating body; and
a driven body which is driven by the vibrating body through the projections.

Assignees

• Canon Kk

Inventors

• Maruyama Yutaka
• Harada Masahiro
• Igarashi Yosuke
• Tsubota Yasuhiro
• Ono Junzaburou
• Ogawa Yasuhiro

Classifications

• H01L41/0986

  Electricity · mapped topic

• H02N2/103

  by pressing one or more vibrators against the rotor · CPC title

• H01L41/319

  Electricity · mapped topic

• H01L41/0815

  Electricity · mapped topic

• H02N2/002

  using only longitudinal or radial modes · CPC title