Turbulent flow spiral multi-zone precursor vaporizer

Patent metadata

Field	Value
Publication number	US-10147597-B1
Application number	US-201715704151-A
Country	US
Kind code	B1
Filing date	Sep 14, 2017
Priority date	Sep 14, 2017
Publication date	Dec 4, 2018
Grant date	Dec 4, 2018

Abstract

A vaporizer useful for depositing material on a semiconductor substrate in a chamber of a chemical vapor deposition apparatus includes a first inlet configured to receive an atomized precursor, a second inlet configured to receive carrier gas, a flow path in fluid communication with the first and second inlets and configured to effect turbulent flow of an atomized precursor and carrier gas stream supplied to the first and second inlets. A plurality of heating elements includes a first heater element configured to heat a first zone of the flow path and a second heater element configured to heat a second zone of the flow path. An outlet in fluid communication with the flow path is configured to deliver vapor produced from the atomized precursor.

First claim

What is claimed is:

1. A vaporizer useful for supplying vapor to a chemical vapor deposition apparatus in which a semiconductor substrate is processed, the vaporizer comprising: a first inlet configured to receive an atomized precursor, a second inlet configured to receive carrier gas, a single spiral flow path in fluid communication with the first and second inlets and configured to effect turbulent flow of an atomized precursor and carrier gas stream supplied to the first and second inlets, a plurality of heating elements including a first heater element configured to heat a first zone of the flow path and a second heater element configured to heat a second zone of the flow path, and an outlet in fluid communication with the flow path and configured to deliver vapor produced from the atomized precursor.

2. The vaporizer of claim 1 , wherein the flow path extends through a stacked plate arrangement, the stacked plate arrangement including a top plate having the first and second inlets therein, a first plate having the first heater element therein, a second plate having the second heater element therein, a first divider plate between the first and second plates and a bottom plate having the outlet therein.

3. The vaporizer of claim 2 , wherein a first portion of the flow path extending through the first plate includes a first upper spiral channel in an upper surface thereof, a first lower spiral channel in a lower surface thereof, and a first connecting passage providing fluid communication between the first upper spiral channel and the first lower spiral channel, the first plate attached to the top plate such that the first portion of the flow path is in fluid communication with the first and second inlets.

4. The vaporizer of claim 3 , wherein a second portion of the flow path extending through the second plate includes a second upper spiral channel in an upper surface thereof, a second lower spiral channel in a lower surface thereof, and a second connecting passage providing fluid communication between the second upper spiral channel and the second lower spiral channel, the first divider plate including a first passage therein connecting the first portion of the flow path in the first plate to the second portion of the flow path in the second plate.

5. The vaporizer of claim 4 , further comprising a third plate having a third heater element therein and a second divider plate between the second and third plates, a third portion of the flow path in the third plate includes a third upper spiral channel in an upper surface thereof and a third lower spiral channel in a lower surface thereof, and a third connecting passage providing fluid communication between the third upper spiral channel and the third lower spiral channel, the second divider plate including a second passage therein connecting the second portion of the flow path in the second plate to the third portion of the flow path in the third plate.

6. The vaporizer of claim 5 , wherein O-ring seals are located between adjacent plates of the stacked plate arrangement, the first passage in the first divider plate is located in a center of the first divider plate and the second passage in the second divider plate is located in a center of the second divider plate.

7. The vaporizer of claim 2 , wherein the first heating element comprises a first pair of resistance heaters located in horizontal bores extending into an outer periphery of the first plate, the second heating element comprises a second pair of resistance heaters located in horizontal bores extending into an outer periphery of the second plate, the first and second plates including temperature sensors configured to monitor temperatures of the first and second plates and provide feedback to a control unit configured to individually adjust temperatures of the first and second portions of the flow path.

8. The vaporizer of claim 5 , the first heating element comprises a first pair of resistance heaters located in horizontal bores extending into an outer periphery of the first plate, the second heating element comprises a second pair of resistance heaters located in horizontal bores extending into an outer periphery of the second plate, the third heating element comprises a third pair of resistance heaters located in horizontal bores extending into an outer periphery of the third plate, the first, second and third plates including temperature sensors configured to monitor temperatures of the first, second and third plates and provide feedback to a control unit configured to individually adjust temperatures of the first, second and third portions of the flow path.

9. The vaporizer of claim 1 , wherein the flow path passes through a spiral tube embedded in a metal block, the metal block including a heating element configured to heat a first portion of the flow path and a second heating element configured to heat a second portion of the flow path, the metal block including temperature sensors configured to monitor temperatures of the first and second portions of the flow path and provide feedback to a control unit configured to individually adjust temperatures of the first and second portions of the flow path.

10. The vaporizer of claim 1 , wherein the flow path has a constant cross sectional flow area along the entire length thereof.

11. The vaporizer of claim 2 , wherein the first and second upper spiral channels are machined into the upper surfaces of the first and second plates, the first and second lower spiral channels are machined into the lower surfaces of the first and second plates, the first connecting passage extends between outermost portions of the first upper spiral channel and the first lower spiral channel, and the second connecting passage extends between outermost portions of the second upper spiral channel and the second lower spiral channel.

12. The vaporizer of claim 1 , further comprising an ultrasonic nozzle in fluid communication with the first inlet.

13. A chemical vapor deposition apparatus including a chamber in which a semiconductor substrate can be processed and the vaporizer of claim 12 , the vaporizer configured to supply vaporized precursor into the chamber to deposit a layer of material on a semiconductor substrate supported therein.

14. The chemical vapor deposition apparatus of claim 13 , further comprising a control unit and temperature sensors configured to monitor temperatures of first and second portions of the flow path and provide feedback to the control unit configured to individually adjust temperatures of the first and second portions of the flow path.

15. The chemical vapor deposition apparatus of claim 14 , wherein the atomized precursor can be converted into vapor in the flow path and supplied to the chamber within 2 seconds.

16. A method of supplying vapor produced by the vaporizer of claim 1 to a chamber of a chemical vapor deposition apparatus, the method comprising supplying atomized liquid precursor to the first inlet, supplying carrier gas to the second inlet, flowing the atomized liquid precursor and carrier gas in the flow path while heating a first portion of the flow path to a first temperature and heating a second portion of the flow path to a second temperature, and flowing vapor from the outlet to an interior of the chamber.

17. The method of claim 16 , wherein the atomized liquid precursor and carrier gas is converted to a vapor in the flow path and supplied to the chamber within two seconds after traveling along the flow path, the flow path including a first spiral path extending in a first plane from a central portion of the vaporizer

Assignees

• Lam Res Corp

Inventors

• Lee James Forest
• Lamar Mitchell
• Mudrow Matthew Scott
• Weissinger Mathew Joseph
• Shanbhag Damodar

Classifications

• H10P14/00 Primary

  Formation of materials, e.g. in the shape of layers or pillars · CPC title

• C23C16/45527

  characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations · CPC title

• B05B7/1606

  the spraying of the material involving the use of an atomising fluid, e.g. air (B05B7/168, B05B7/1686, B05B7/20, B05B7/22 take precedence) · CPC title

• C23C16/4483

  using a porous body · CPC title

• B05B7/168

  with means for heating or cooling after mixing (B05B7/201, B05B7/22 take precedence) · CPC title