Monitoring electrolytes during electroplating
US-2016298256-A1 · Oct 13, 2016 · US
US10145814B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10145814-B2 |
| Application number | US-201515115610-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 30, 2015 |
| Priority date | Jan 31, 2014 |
| Publication date | Dec 4, 2018 |
| Grant date | Dec 4, 2018 |
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In order to improve the endurance of this internal solution for a reference electrode beyond that in the prior art, the solution is made to contain a copolymerized material of a crosslinker having a plurality of non-acrylamide functional groups, and a non-acrylamide monofunctional hydrophilic monomer.
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The invention claimed is: 1. An electrochemical measurement device comprising: a glass electrode that is equipped with responsive glass; and a comparison electrode having a reference electrode internal solution containing a copolymerization of a cross-linking agent having a plurality of functional groups excluding acrylamide, and a monofunctional hydrophilic monomer excluding acrylamide, wherein the responsive glass contains Me 2 O 3 , wherein Me is a lanthanide; the cross-linking agent is at least one substance selected from the group consisting of acrylates having a plurality of functional groups, methacrylates having a plurality of functional groups, amines having a plurality of functional groups and vinyl compounds having a plurality of functional groups; and the monofunctional hydrophilic monomer is at least one substance selected from the group consisting of polyhydric alcohol acrylates, as well as alkoxy ether derivatives thereof, acryloyloxy ethyl succinic acid, acryloyloxy ethyl acid phosphates, 2-(acryloyloxy) ethane sulfonic acid, 3-sulfopropyl potassium acrylates, and polyhydric alcohol methacrylates, as well as alkoxy ether derivatives thereof, methacryloyloxy ethyl succinic acid, methacryloyloxy ethyl acid phosphates, 2-(methacryloyloxy) ethane sulfonic acid, and 3-sulfopropyl potassium methacrylates. 2. The electrochemical measurement device according to claim 1 , wherein the responsive glass contains Y 2 O 3 or Sc 2 O 3 . 3. The electrochemical measurement device according to claim 1 , further comprising: a computation unit that outputs measurement data showing measurement results based on output values from the glass electrode and the reference electrode; and a display unit that displays the measurement results based on the measurement data output from the computation unit.
Reference electrodes · CPC title
pH sensitive, e.g. quinhydron, antimony or hydrogen electrodes (ion selective electrodes G01N27/333, glass electrodes G01N27/36) · CPC title
Glass electrodes · CPC title
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