Deposition mask, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus

Patent metadata

Field	Value
Publication number	US-10141511-B2
Application number	US-201715447504-A
Country	US
Kind code	B2
Filing date	Mar 2, 2017
Priority date	Mar 9, 2016
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A deposition mask extending in a first direction may include: a pattern portion including a plurality of pattern holes; and a clamping portion including a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion, wherein the pattern portion may include a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

First claim

What is claimed is:

1. A deposition mask extending in a first direction, the deposition mask comprising:
a pattern portion comprising a plurality of pattern holes; and
a clamping portion comprising a protrusion portion to be attached to a clamp and an indentation portion formed in a direction toward the pattern portion,
wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

2. The deposition mask of claim 1 , wherein the plurality of pattern holes are disposed corresponding to target deposition areas.

3. The deposition mask of claim 1 , wherein a number of the plurality of pattern holes that overlap the protrusion portion in the first direction is less than a number of the plurality of pattern holes that overlap the indentation portion in the first direction.

4. The deposition mask of claim 1 , wherein a number of the plurality of pattern holes arranged in the first direction is gradually reduced in a direction from the indentation portion toward the protrusion portion in the second direction.

5. The deposition mask of claim 1 , wherein the blocking portion has an area gradually decreasing in a direction from the clamping portion toward the pattern portion in the first direction.

6. The deposition mask of claim 1 , wherein the blocking portion has a multistep shape in the first direction and the second direction.

7. An apparatus for manufacturing a display apparatus, the apparatus comprising:
a mask frame assembly disposed facing a substrate; and
a deposition source disposed facing the mask frame assembly,
wherein the mask frame assembly comprises:
a frame comprising an opening at a center portion thereof;
a deposition mask disposed on the frame facing the substrate, the deposition mask being installed on the frame while being extended in a first direction by a clamp attached to both ends of the deposition mask; and
a support stick extending in a second direction crossing the first direction, covering a part of the deposition mask and supporting the deposition mask,
wherein the deposition mask comprises:
a pattern portion comprising a plurality of pattern holes; and
a clamping portion comprising a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion,

wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

8. The apparatus of claim 7 , wherein the plurality of pattern holes are disposed corresponding to target deposition areas.

9. The apparatus of claim 7 , wherein a number of the plurality of pattern holes that overlap the protrusion portion in the first direction is less than a number of the plurality of pattern holes that overlap the indentation portion in the first direction.

10. The apparatus of claim 7 , wherein a number of the plurality of pattern holes arranged in the first direction is gradually reduced in a direction from the indentation portion toward the protrusion portion in the second direction.

11. The apparatus of claim 7 , wherein the blocking portion has an area gradually decreasing in a direction from the clamping portion toward the pattern portion in the first direction.

12. The apparatus of claim 7 , wherein the blocking portion has a multistep shape in the first direction and the second direction.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Sanghoon

Classifications

• C23C14/044

  using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient · CPC title

• C23C14/04

  Coating on selected surface areas, e.g. using masks · CPC title

• C30B25/04

  Pattern deposit, e.g. by using masks · CPC title

• H01L2227/323

  Electricity · mapped topic

• H01L51/56

  Electricity · mapped topic