Selective phase change material growth in high aspect ratio dielectric pores for semiconductor device fabrication

Patent metadata

Field	Value
Publication number	US-10141503-B1
Application number	US-201715803349-A
Country	US
Kind code	B1
Filing date	Nov 3, 2017
Priority date	Nov 3, 2017
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A metal liner is deposited conformally to a pore within a first dielectric material of a semiconductor device. The pore extends through the first dielectric material to a top surface of a first metal electrode. The metal liner is etched such that the metal liner only substantially remains on sidewalls of the pore. A phase change material is selectively deposited within the pore of the first dielectric layer to substantially fill the pore with the phase change material. The selective deposition of the phase change material produces a growth rate of phase change material on the metal liner at a substantially greater rate than a growth rate of the phase change material on exposed surfaces of the first dielectric material.

First claim

What is claimed is:

1. A method for fabricating a phase change memory (PCM) device comprising:
depositing a first dielectric material;
forming an opening in the first dielectric material;
depositing a bottom metal electrode within the opening and polishing the bottom metal electrode;
depositing a second dielectric material on a surface of the bottom metal electrode and the first dielectric material;
depositing a metal nitride conformally to a pore within the second dielectric material of the phase change memory (PCM) device, the pore extending through the second dielectric material and exposing a portion of a top surface of the bottom metal electrode;
etching the metal nitride such that the metal nitride only and directly remains on an entire sidewalls of the pore, exposing the portion of the top surface of the bottom metal electrode after the etching of the metal nitride; and
selectively depositing a phase change material only within the pore of the second dielectric layer to completely fill an entire of the pore with the phase change material, the selective deposition of the phase change material producing a growth rate of phase change material on the metal nitride at a substantially greater rate than a growth rate of the phase change material on exposed surfaces of the second dielectric material;
applying a vacuum during the depositing of the metal nitride, etching of the metal nitride, and the selective depositing of the phase change material;
depositing a top metal electrode in contact with a top surface of the phase change material and in contact with portions of a top surface of second dielectric material; and
depositing a third dielectric material, the third dielectric material is in contact with sidewalls of the top metal electrode.

2. The method of claim 1 , wherein the metal nitride is deposited using a conformal atomic layer deposition growth process.

3. The method of claim 1 , wherein the metal nitride includes one or more of tantalum (Ta), titanium (Ti), and aluminum (Al).

4. The method of claim 1 , wherein the metal nitride is etched using a plasma etching process.

5. The method of claim 1 , wherein the phase change material comprises a germanium-antimony-tellurium (GST) compound.

6. The method of claim 1 , wherein the selective deposition of the phase change material includes a selective deposition of a germanium-antimony-tellurium (GST) growth at a predetermined temperature.

7. The method of claim 1 , wherein the selective deposition includes one or more of a chemical vapor deposition (CVD), a pulsed CVD, and an atomic layer deposition (ALD).

8. The method of claim 7 , wherein the gas mixture includes a mixture of ammonia (NH3) and argon (Ar).

9. The method of claim 1 , further comprising:
applying a flow of a gas mixture at a particular flow rate during the selective depositing of the phase change material.

10. The method of claim 1 , wherein the second metal electrode is formed using a deposition process.

11. A phase change memory (PCM) device comprising:
a first dielectric material;
an opening in the first dielectric material;
a bottom metal electrode deposited within the opening and polished;
a second dielectric material deposited on a surface of the bottom metal electrode and the first dielectric material;
a metal nitride conformally deposited to a pore within the second dielectric material of a phase change memory (PCM) device, the pore extending through the second dielectric material and exposing a portion of a top surface of the bottom metal electrode,
wherein the metal nitride is etched such that the metal nitride only and directly remains on an entire sidewalls of the pore, exposing the portion of the top surface of the bottom metal electrode after the etching of the metal nitride; and
a phase change material selectively deposited only within the pore of the second dielectric layer to completely fill an entire of the pore with the phase change material, the selective deposition of the phase change material producing a growth rate of phase change material on the metal nitride at a substantially greater rate than a growth rate of the phase change material on exposed surfaces of the second dielectric material,
wherein a vacuum is applied during the depositing of the metal nitride, etching of the metal nitride, and the selective depositing of the phase change material;
a top metal electrode deposited and is in contact with a top surface of the phase change material and in contact with portions of a top surface of second dielectric material; and
a third dielectric material deposited and is in contact with sidewalls of the top metal electrode.

12. The phase change memory device of claim 11 , wherein the metal nitride includes one or more of tantalum (Ta), titanium (Ti), and aluminum (Al).

13. The phase change memory device of claim 11 , wherein the phase change material comprises a germanium-antimony-tellurium (GST) compound.

14. The phase change memory device of claim 11 , further comprising:
a second metal electrode in contact with the phase change material.

Assignees

• IBM

Inventors

• Brightsky Matthew J
• Bruce Robert
• Masuda Takeshi

Classifications

• H01L45/124

  Electricity · mapped topic

• H01L45/143

  Electricity · mapped topic

• H01L45/1246

  Electricity · mapped topic

• H01L45/1253

  Electricity · mapped topic

• H01L45/1675

  Electricity · mapped topic