Vacuum processing apparatus

Patent metadata

Field	Value
Publication number	US-10141208-B2
Application number	US-201514831597-A
Country	US
Kind code	B2
Filing date	Aug 20, 2015
Priority date	Feb 28, 2013
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A vacuum processing apparatus includes a tilting unit configured to tilt, in a vacuum vessel, a substrate holder including a refrigerator, and a rotary joint provided in the tilting unit and including a coolant path configured to supply or exhaust a coolant gas to or from the refrigerator. The rotary joint includes a fixed portion fixed to the vacuum vessel, a pivotal portion provided so as to pivot with respect to the fixed portion and fixed to the substrate holder, and a grease supply passage.

First claim

What is claimed is:

1. A vacuum processing apparatus comprising:
a vacuum vessel in which vacuum processing can be performed;
a substrate holder capable of holding a substrate;
a tilting unit capable of making said substrate holder pivot about a pivotal axis and tilting the substrate held by said substrate holder with respect to a process source provided in said vacuum vessel;
a cooling device provided in said substrate holder and configured to act together with a compression device provided outside said vacuum vessel to cool the substrate held by said substrate holder; and
a rotary joint provided in said tilting unit and including a supply path configured to supply a coolant gas from said compression device to said cooling device and an exhaust path configured to exhaust the coolant from said cooling device to said compression device,
wherein said rotary joint comprises:
a fixed portion fixed to said vacuum vessel;
a pivotal portion provided so as to pivot with respect to said fixed portion and fixed to said substrate holder; and
a gas guide path provided in one of said fixed portion and said pivotal portion and configured to communicate a space region formed between the supply path and the exhaust path and guide the coolant gas that has leaked from one of the supply path and the exhaust path in the space region, where said fixed portion faces said pivotal portion and the supply path and the exhaust path are separated, to an outside of said rotary joint.

2. The vacuum processing apparatus according to claim 1 , wherein said rotary joint further comprises:
a first sealing member configured to seal the supply path; and
a second sealing member configured to seal the exhaust path, and
said gas guide path is connected to a space that is in contact with both said first sealing member and said second sealing member.

3. The vacuum processing apparatus according to claim 2 , wherein said rotary joint further comprises a grease supply port connected to the space to supply grease to at least one of said first sealing member and said second sealing member.

4. The vacuum processing apparatus according to claim 3 , wherein said grease supply port also serves as said gas guide path.

Assignees

• Canon Anelva Corp

Inventors

• Ishizaki Ryo
• Kobinata Daisuke
• Kubota Naoki
• Sugi Kyosuke

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title