Terminal for mechanical support of a heating element

Patent metadata

Field	Value
Publication number	US-10136472-B2
Application number	US-201213568928-A
Country	US
Kind code	B2
Filing date	Aug 7, 2012
Priority date	Aug 7, 2012
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A terminal for mechanical support of a heating element, includes a base device, a mounting device, the mounting device adapted to support the heating element, and a support device connecting the base device to the mounting device, the support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis.

First claim

The invention claimed is:

1. A terminal for mechanical support of a heating element in a MOCVD reactor, comprising a base device, a mounting device, the mounting device being configured to mechanically support the heating element in the MOCVD reactor, and a support device connecting the base device to the mounting device, said support device being a leaf spring having two or more leaves disposed at a spacing distance from one another and arranged in a substantially parallel orientation, said support device allowing displacement of the heating element about a single main elastic direction being oriented substantially along a radial direction defined by a planar extension of the heating element when mounted at the mounting device, and wherein a material of the terminal comprises at least 90% by weight of a refractory metal selected from a group consisting of tungsten, an alloy of tungsten, molybdenum, and an alloy of molybdenum.

2. A heater, comprising at least one heating element and at least two terminals according to claim 1 .

3. The heater according to claim 2 , wherein the support device of at least one terminal is pre-tensioned in a stable position.

4. The heater according to claim 3 , wherein the pre-tension of the support device is configured to achieve a reduced spring tension of the support device during a heating use of the heating element.

5. A terminal for mechanical support of a heating element in a MOCVD reactor, comprising a base device, a mounting device, the mounting device being configured to mechanically support the heating element in the MOCVD reactor, and a support device connecting the base device to the mounting device, said support device being a leaf spring having two or more leaves disposed at a spacing distance from one another and arranged in a substantially parallel orientation, said support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis, and wherein a material of the terminal comprises at least 90% by weight of a refractory metal selected from a group consisting of tungsten, an alloy of tungsten, molybdenum, and an alloy of molybdenum.

6. A heater comprising at least one heating element and at least two terminals according to claim 5 .

7. The heater according to claim 6 , wherein the support device of at least one terminal is pre-tensioned in a stable position.

8. The heater according to claim 7 , wherein the pre-tension of the support device is configured to achieve a reduced spring tension of the support device during the heating use of a heating element.

9. A terminal for mechanical support of a heating element in a MOCVD reactor, the terminal comprising:
a base device;
a mounting device to be connected to an arriving part of the heating element of the MOCVD reactor and configured to support the heating element in the MOCVD reactor; and
a support device connecting said base device to said mounting device, said base device, said support device and said mounting device forming an assembly configured to withstand prevailing operating temperatures in the MOCVD reactor;
said support device being a leaf spring with a plurality of mutually parallel leaves extending longitudinally between said base device and said mounting device and at a spacing distance from one another, said leaf spring being formed to allow a displacement of said mounting device only about a single main elastic direction due to a thermally induced deformation of the heating element.

10. A terminal for mechanical support of a substantially planar and round heating element in a MOCVD reactor, the terminal comprising:
a base device;
a mounting device to be connected to an arriving part of the heating element of the MOCVD reactor and configured to support the heating element in the MOCVD reactor; and
a leaf spring with two or more leaves disposed at a spacing distance from one another and arranged in a substantially parallel orientation and extending between said base device and said mounting device;
said leaf spring being configured to allow a displacement of said mounting device, upon being subjected to a displacement of the arriving part of the heating element due to a thermally induced deformation of the heating element, about a radial axis of the heating element and less than about 10% displacement of the mounting device about a tangential direction or parallel to an axis of the round heating element.

Assignees

• Plankensteiner Arno
• Feist Christian
• Boguslavskiy Vadim
• Gurary Alexander I
• Chang Chenghung Paul
• Plansee Se
• Veeco Instr Inc

Inventors

• Plankensteiner Arno
• Feist Christian
• Boguslavskiy Vadim
• Gurary Alexander I
• Chang Chenghung Paul

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• C23C16/46

  characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) · CPC title

• H05B1/00 Primary

  Details of electric heating devices · CPC title

• H01L21/67115

  Electricity · mapped topic

• C23C16/4585 Primary

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title