Semiconductor Devices Comprising 2D-Materials and Methods of Manufacture Thereof
US-2016379901-A1 · Dec 29, 2016 · US
US10134931B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10134931-B2 |
| Application number | US-201314409653-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 19, 2013 |
| Priority date | Jun 20, 2012 |
| Publication date | Nov 20, 2018 |
| Grant date | Nov 20, 2018 |
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The present invention relates to a layer system ( 1 ) for thin-film solar cells ( 100 ) and solar modules, comprising an absorber layer ( 4 ), which includes a chalcogenide compound semiconductor, and a buffer layer ( 5 ), which is arranged on the absorber layer ( 4 ) and includes halogen-enriched Zn x In 1-x S y with 0.01≤x≤0.9 and 1≤y≤2, wherein the buffer layer ( 5 ) consists of a first layer region ( 5.1 ) adjoining the absorber layer ( 4 ) with a halogen mole fraction A 1 and a second layer region ( 5.2 ) adjoining the first layer region ( 5.1 ) with a halogen mole fraction A 2 and the ratio A 1 /A 2 is ≥2 and the layer thickness (d 1 ) of the first layer region ( 5.1 ) is ≤50% of the layer thickness (d) of the buffer layer ( 5 ).
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The invention claimed is: 1. Layer system for thin-film solar cells, comprising: an absorber layer, which includes a chalcogenide compound semiconductor, and a buffer layer, which is arranged on the absorber layer and includes halogen-enriched Zn x In 1-x S y with 0.01≤x≤0.9 and 1≤y≤2, wherein the buffer layer consists of a first layer region adjoining the absorber layer with a halogen mole fraction A 1 and a second layer region adjoining the first layer region with a halogen mole fraction A 2 and a ratio A 1 /A 2 is ≥2 and a layer thickness of the first layer region is ≤20% of a layer thickness of the buffer layer. 2. Layer system according to claim 1 , wherein the ratio A 1 /A 2 is from 2 to 1000. 3. Layer system according to claim 1 , wherein an amount of the halogen in the first layer region amounts to an area concentration of 1·10 13 atoms/cm 2 to 1·10 17 atoms/cm 2 . 4. Layer system according to claim 1 , wherein y is from x+(1−x)*1.3 to x+(1−x)*1.5. 5. Layer system according to claim 1 , wherein the halogen mole fraction in the buffer layer has a gradient that decreases from a surface facing the absorber layer to an interior of the buffer layer. 6. Layer system according to claim 1 , wherein the layer thickness of the buffer layer is from 5 nm to 150 nm. 7. Layer system according to claim 1 , wherein the halogen is chlorine, bromine, or iodine. 8. Layer system according to claim 1 , wherein the chalcogenide compound semiconductor includes Cu(In,Ga,Al)(S,Se) 2 . 9. Thin-film solar cell, comprising: a substrate, a rear electrode that is arranged on the substrate, a layer system according to claim 1 that is arranged on the rear electrode, and a front electrode that is arranged on the layer system. 10. Method for producing a layer system for thin-film solar cells, comprising: a) preparing an absorber layer, and b) arranging a buffer layer, which contains halogen-enriched Zn x In 1-x S y with 0.01≤x≤0.9 and 1≤y≤2 on the absorber layer, wherein the buffer layer consists of a first layer region adjoining the absorber layer with a halogen mole fraction A 1 and a second layer region adjoining the first layer region with a halogen mole fraction A 2 and a ratio A 1 /A 2 is ≥2, and a layer thickness of the first layer region is ≤20% of a layer thickness of the buffer layer. 11. Method according to claim 10 , comprising: in the step b), applying a metal-halide compound on the absorber layer and applying zinc indium sulfide on the metal-halide compound. 12. Method according to claim 10 , comprising: in the step b), applying a metal-halide compound and zinc indium sulfide on the absorber layer. 13. Method according to claim 12 , comprising: conveying the absorber layer past at least one steam beam of the metal-halide compound and at least one steam beam of indium sulfide and zinc sulfide. 14. Method according to claim 12 , comprising: applying the metal-halide compound with chlorine, bromine, and/or iodine as halogen and sodium, potassium, aluminum, gallium, indium, zinc, cadmium, and/or mercury as metal. 15. Layer system according to claim 1 , wherein the ratio A 1 /A 2 is from 10 to 100. 16. Layer system according to claim 1 , wherein the amount of the halogen in the first layer region amounts to an area concentration of 2·10 14 atoms/cm 2 to 2·10 16 atoms/cm 2 . 17. Layer system according to claim 1 , wherein the layer thickness of the buffer layer is from 15 nm to 50 nm. 18. Layer system according to claim 1 , wherein the chalcogenide compound semiconductor includes CuInSe 2 , CuInS 2 , Cu(In,Ga)Se 2 , Cu(In,Ga)(S,Se) 2 , or Cu 2 ZnSn(S,Se) 4 .
being chalcogenide semiconductor materials not being oxides, e.g. ternary compounds · CPC title
Sulfides · CPC title
being chalcogenide semiconducting materials not being oxides, e.g. ternary compounds · CPC title
using physical deposition, e.g. vacuum deposition or sputtering · CPC title
Electricity · mapped topic
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