Semiconductor substrate
US-2024105512-A1 · Mar 28, 2024 · US
Selective epitaxy using epitaxy-prevention layers
US9530643B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9530643-B2 |
| Application number | US-201514645894-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2015 |
| Priority date | Mar 12, 2015 |
| Publication date | Dec 27, 2016 |
| Grant date | Dec 27, 2016 |
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Abstract
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A method for forming an epitaxial structure includes providing a two-dimensional material on a crystal semiconductor material and opening up portions of the two-dimensional material to expose the crystal semiconductor material. A structure is epitaxially grown in the portions opened up in the crystal semiconductor material such that the epitaxial growth is selective to the exposed crystal semiconductor material relative to the two-dimensional material.
First claim
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What is claimed is: 1. A method for forming an epitaxial structure, comprising: providing a two-dimensional material on a crystal semiconductor material; opening up portions of the two-dimensional material to expose the crystal semiconductor material; and epitaxially growing a structure in the portions opened up in the crystal semiconductor material such that the epitaxial growth is selective to the exposed crystal semiconductor material relative to the two-dimensional materia…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9530643B2 cover?
- A method for forming an epitaxial structure includes providing a two-dimensional material on a crystal semiconductor material and opening up portions of the two-dimensional material to expose the crystal semiconductor material. A structure is epitaxially grown in the portions opened up in the crystal semiconductor material such that the epitaxial growth is selective to the exposed crystal semic…
- Who is the assignee on this patent?
- IBM
- What technology area does this patent fall under?
- Primary CPC classification H10P14/2904. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 27 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).