Optical device and method of controlling the same

Patent metadata

Field	Value
Publication number	US-10133145-B2
Application number	US-201615544442-A
Country	US
Kind code	B2
Filing date	Jan 11, 2016
Priority date	Jan 22, 2015
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

According to embodiments of the present invention, an optical device is provided. The optical device includes a waveguide structure including a floating gate, and an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate, a carrier injection portion arranged spaced apart from the floating gate, and an electrode arrangement, wherein, in response to a first voltage difference applied to the electrode arrangement, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure, and wherein, in response to a second voltage difference applied to the electrode arrangement, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers.

First claim

The invention claimed is:

1. An optical device comprising:
a waveguide structure comprising:
a floating gate; and
an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate;

a carrier injection portion arranged spaced apart from the floating gate; and
an electrode arrangement comprising:
a control gate terminal, wherein the floating gate is arranged in between the control gate terminal and the carrier injection portion;
a first source/drain terminal coupled to the carrier injection portion; and
a second source/drain terminal coupled to the optical waveguide,

wherein the optical waveguide overlaps with a first portion of the floating gate,
wherein the carrier injection portion overlaps with a second portion of the floating gate,
wherein, in response to a first voltage difference applied between the control gate terminal and the first source/drain terminal, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure,
wherein, in response to a second voltage difference applied between the control gate terminal and the second source/drain terminal, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers; and
wherein, in response to a third voltage difference applied between the control gate terminal and the second source/drain terminal, the third voltage difference being less than the second voltage difference, the optical device is configured to drive the charge carriers injected from the carrier injection portion to the second portion of the floating gate through the floating gate to the first portion of the floating gate overlapping with the optical waveguide.

2. The optical device as claimed in claim 1 , wherein the waveguide structure comprises an insulating material in between the optical waveguide and a portion of the floating gate overlapping with the optical waveguide.

3. The optical device as claimed in claim 1 , wherein the optical waveguide is arranged spaced apart from the carrier injection portion.

4. The optical device as claimed in claim 1 , wherein the optical waveguide is electrically insulated from the carrier injection portion.

5. The optical device as claimed in claim 1 , wherein the optical waveguide comprises a channel waveguide.

6. The optical device as claimed in claim 1 , wherein the optical waveguide comprises a slab waveguide portion coupled to the second source/drain terminal, the slab waveguide portion being tapered with a width increasing in a direction away from the second source/drain terminal.

7. The optical device as claimed in claim 1 , wherein the floating gate comprises a tapering portion having a width decreasing in a direction away from the optical waveguide.

8. The optical device as claimed in claim 1 , wherein the floating gate comprises dopants.

9. The optical device as claimed in claim 1 , wherein the floating gate comprises a P-N junction, wherein an N-doped region of the P-N junction overlaps with the optical waveguide.

10. The optical device as claimed in claim 1 , wherein the floating gate comprises an N-P-N junction, wherein one N-doped region of the N-P-N junction overlaps with the optical waveguide.

11. The optical device as claimed in claim 1 , wherein the floating gate comprises a grating structure arranged overlapping with the optical waveguide.

12. The optical device as claimed in claim 1 , wherein the optical waveguide comprises a grating arranged overlapping with the floating gate.

13. The optical device as claimed in claim 1 , wherein a plurality of cavities are defined in the optical waveguide.

14. The optical device as claimed in claim 1 , wherein the optical waveguide comprises a ring waveguide, and the floating gate comprises a ring floating gate.

15. The optical device as claimed in claim 14 , further comprising a second optical waveguide optically coupled to the ring waveguide.

16. A method of controlling an optical device comprising a waveguide structure, the method comprising:
applying a first voltage difference between a control gate terminal of an electrode arrangement of the optical device and a first source/drain terminal of the electrode arrangement to inject charge carriers from a carrier injection portion of the optical device to a floating gate of the waveguide structure to cause a change in refractive index of the waveguide structure, wherein the carrier injection portion is arranged spaced apart from the floating gate, wherein the floating gate is arranged in between the control gate terminal and the carrier injection portion, and wherein the first source/drain terminal is coupled to the carrier injection portion;
applying a second voltage difference between the control gate terminal and a second source/drain terminal of the electrode arrangement to drive the charge carriers from the floating gate to an optical waveguide of the waveguide structure to deplete the charge carriers, wherein the optical waveguide is arranged spaced apart from the floating gate and overlapping with the floating gate, wherein the second source/drain terminal is coupled to the optical waveguide; and
prior to applying the second voltage difference, applying a third voltage between the control gate terminal and the second source/drain terminal to drive the charge carriers injected from the carrier injection portion to a second portion of the floating gate overlapping with the carrier injection portion through the floating gate to a first portion of the floating gate overlapping with the optical waveguide, wherein the third voltage difference is less than the second voltage difference.

Assignees

• Agency Science Tech & Res

Inventors

• Song Junfeng
• Luo Xianshu
• Lo Patrick Guo-Qiang

Classifications

• G02F2201/12

  electrode · CPC title

• H05K999/99

  Electricity · mapped topic

• G02F2201/06

  integrated waveguide · CPC title

• G02B6/42

  Coupling light guides with opto-electronic elements · CPC title

• G02F1/3133 Primary

  the optical waveguides being made of semiconducting materials · CPC title