Hybrid junction field-effect transistor and active matrix structure

Patent metadata

Field	Value
Publication number	US-10128452-B2
Application number	US-201715447089-A
Country	US
Kind code	B2
Filing date	Mar 1, 2017
Priority date	Feb 19, 2014
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

Junction field-effect transistors including inorganic channels and organic gate junctions are used in some applications for forming high resolution active matrix displays. Arrays of such junction field-effect transistors are electrically connected to thin film switching transistors and provide high drive currents for passive devices such as organic light emitting diodes.

First claim

What is claimed is:

1. A structure comprising:
an array of junction field-effect transistors, each of the junction field-effect transistors including:
a doped inorganic semiconductor layer;
a gate electrode;
first and second ohmic contacts operatively associated with the inorganic semiconductor layer, and
a gate junction structure operatively associated with the gate electrode, the gate junction structure being positioned between the gate electrode and the inorganic semiconductor layer and including an organic semiconductor layer for suppressing the injection of the charge carriers having a first charge type from the gate electrode into the inorganic semiconductor layer, the charge carriers having the first charge type corresponding to majority carriers in the inorganic semiconductor layer;

an array of thin film switching transistors, each of the thin film switching transistors being electrically connected to one of the junction field-effect transistors, and
an array of electronic devices, each of the electronic devices being electrically connected to one of the junction field-effect transistors.

2. The structure of claim 1 , wherein the inorganic semiconductor layer comprises crystalline silicon.

3. The structure of claim 1 , wherein the gate junction structure of each junction field-effect transistor is further configured for suppressing the injection of charge carriers having a second charge type from the inorganic semiconductor layer into the gate electrode, the second charge type corresponding to minority carriers in the inorganic semiconductor layer, and for passivating a surface of the inorganic semiconductor layer.

4. The structure of claim 3 , further including an electrically insulating layer, wherein each of the thin film switching transistors further includes an inorganic semiconductor channel layer adjoining a first side of the electrically insulating layer and the inorganic semiconductor layer of each junction field-effect transistor adjoins a second side of the electrically insulating layer.

5. The structure of claim 4 , wherein the doped inorganic semiconductor layer of each junction field-effect transistor further includes a channel region and source/drain regions adjoining the channel region, each source/drain region having a higher doping level than the doping level of the channel region, the ohmic contacts directly contacting the source/drain regions.

6. The structure of claim 4 , wherein the electrically insulating layer includes a buried oxide layer.

7. The structure of claim 6 , further including via conductors extending through the buried oxide layer and electrically connecting each thin film switching transistor to one of the junction field-effect transistors.

8. The structure of claim 4 , further including a planarization layer on the array of thin film switching transistors and a support substrate on the planarization layer.

9. The structure of claim 8 , wherein the support substrate is flexible.

10. The structure of claim 8 , further including a passivation layer on the array of junction field-effect transistors.

11. The structure of claim 4 , further including a plurality of highly doped contact regions adjoining the second side of the electrically insulating layer.

Assignees

• IBM

Inventors

• Afzali-Ardakani Ali
• Chen Tze-Chiang
• Hekmatshoartabari Bahman
• Shahidi Ghavam G

Classifications

• H01L27/1222

  Electricity · mapped topic

• H01L27/1251

  Electricity · mapped topic

• H01L27/326

  Electricity · mapped topic

• H01L27/286

  Electricity · mapped topic

• H01L51/0508 Primary

  Electricity · mapped topic