Vibration element manufacturing method, vibration element, electronic device, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-10128430-B2
Application number	US-201614992265-A
Country	US
Kind code	B2
Filing date	Jan 11, 2016
Priority date	Jan 13, 2015
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

A method of manufacturing a gyro element as a vibration element is a manufacturing method of processing a quartz crystal substrate to form an outward shape of a gyro element including a vibrating arm and form recessed portions in a vibrating arm. The method includes forming the outward shape of a gyro element from one surface of the quartz crystal substrate using dry etching and forming the recessed portions using wet etching.

First claim

What is claimed is:

1. A vibration element manufacturing method for manufacturing a vibration element including: a base; a vibrating arm extending from one side of the base in a first direction; and a recess provided in the vibrating arm, the method comprising:
providing a substrate;
providing a first patterned mask on the substrate;
dry etching the substrate by using the first pattered mask as a first etching mask so as to form the base and the vibrating arm;
providing a second patterned mask on an outer surface of the vibrating arm; and
wet etching part of the vibrating arm by using the second patterned mask as a second etching mask so as to form the recess in the vibrating arm,
wherein the recess has an opening, a bottom, and inner side walls in a cross sectional view in the first direction, and
the inner side walls are inclined so that the opening is wider than the bottom in the cross sectional view in the first direction.

2. The vibration element manufacturing method according to claim 1 ,
wherein the first patterned mask is configured with a first metal underlying layer and a metal plating layer stacked on the first metal underlying layer, and
the second patterned mask is configured with a second metal underlying layer and a resist layer stacked on the second underlying layer.

3. The vibration element manufacturing method according to claim 1 ,
wherein the vibrating arm has top and bottom surfaces opposite to each other, and
the recess further comprises a first recess formed in the top surface and a second recess formed in the bottom surface.

4. The vibration element manufacturing method according to claim 2 ,
wherein the vibrating arm has top and bottom surfaces opposite to each other, and
the recess further comprises a first recess formed in the top surface and a second recess formed in the bottom surface.

5. A vibration element which is manufactured by the manufacturing method according to claim 1 , the vibration element comprising:
the base;
the vibrating arm extending from one side of the base in the first direction; and
the recess provided in the vibrating arm.

6. A vibration element which is manufactured by the manufacturing method according to claim 2 , the vibration element comprising:
the base;
the vibrating arm extending from one side of the base in the first direction; and
the recess provided in the vibrating arm.

7. A vibration element which is manufactured by the manufacturing method according to claim 3 , the vibration element comprising:
the base;
the vibrating arm extending from one side of the base in the first direction; and
the recess provided in the vibrating arm.

8. A vibration element which is manufactured by the manufacturing method according to claim 4 , the vibration element comprising:
the base;
the vibrating arm extending from one side of the base in the first direction; and
the recess provided in the vibrating arm.

Assignees

• Seiko Epson Corp

Inventors

• Yamada Yohei
• Matsuo Atsushi
• Il Toshihiro
• Sugiyama Takatoshi

Classifications

• H10W76/15 Primary

  Containers comprising an insulating or insulated base · CPC title

• G01C19/56

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• H03H2003/027

  the resonators or networks being of the microelectro-mechanical [MEMS] type · CPC title

• G01C19/5663

  Manufacturing; Trimming; Mounting; Housings · CPC title

• H03H2003/026

  the resonators or networks being of the tuning fork type · CPC title