Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device

Patent metadata

Field	Value
Publication number	US-10128429-B2
Application number	US-201715608397-A
Country	US
Kind code	B2
Filing date	May 30, 2017
Priority date	Nov 27, 2014
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

A piezoelectric positioning device (1) has at least one piezoelectric actuator (3) having a first connection contact (4) and a second connection contact (5). A control device (6) with digital/analog converters (12, 16) connected to the connection contacts (4, 5) is used to control the at least one piezoelectric actuator (3). In comparison with a coarse converter (12), a fine converter (16) has a comparatively smaller voltage range and lower voltage levels, with the result that a high degree of positioning accuracy can be achieved.

First claim

What is claimed is:

1. A piezoelectric positioning device comprising:
at least one piezoelectric actuator comprising, respectively, a first connection contact and a second connection contact,
a control device configured to control the at least one piezoelectric actuator, and comprising:
a first digital/analog converter connected to the first connection contact and providing a first analog converter output voltage U 1 in a first voltage range ΔU 1 in first voltage levels Δu 1 ,
wherein the first digital/analog converter has n bits and a first digital input of the first digital/analog converter accepts 2 n digital input values, wherein the first voltage levels Δu 1 are determined by the first voltage range ΔU 1 and the 2 n digital input values,
a second digital/analog converter connected to the second connection contact and providing a second analog converter output voltage U 2 in a second voltage range ΔU 2 in second voltage levels Δu 2 , wherein the second digital/analog converter has m bits and a second digital input of the second digital/analog converter accepts 2 m digital input values, wherein the second voltage levels Δu 2 are determined by the second voltage range ΔU 2 and the 2 m digital input values,
where: Δ U 1 >ΔU 2 ≥Δu 1 >Δu 2 .

2. The positioning device as claimed in claim 1 , wherein the first voltage levels Δu 1 have a maximum voltage inaccuracy Δu d , where: ΔU 2 ≥Δu 1 +Δu d and/or ΔU 2 ≤64·Δu 1 .

3. The positioning device as claimed in claim 1 , further comprising a first voltage amplifier arranged downstream of the first digital/analog converter and a second voltage amplifier is arranged downstream of the second digital/analog converter.

4. The positioning device as claimed in claim 3 , further comprising a low-pass filter connected between the first digital/analog converter and the first voltage amplifier.

5. The positioning device as claimed in claim 1 , further comprising a non-reactive resistor connected between the second digital/analog converter and the second connection contact.

6. The positioning device as claimed in claim 5 , further comprising a voltage measuring sensor determining a measurement voltage (u m ) corresponding to a voltage (U m ) dropped across the non-reactive resistor.

7. The positioning device as claimed in claim 6 , wherein the control device comprises a charge regulating unit regulating an actual state of charge (Q) of the at least one piezoelectric actuator designed to determine the actual state of charge (Q) from the measurement voltage (u m ) and to compare the actual state of charge with a desired state of charge (Q S ).

8. The positioning device as claimed in claim 7 , wherein the desired state of charge (Q S ) is predefined by a position regulating unit.

9. The positioning device as claimed in claim 1 , further comprising a position measuring sensor configured to measure an actual position (x) regulated via the at least one piezoelectric actuator.

10. The positioning device as claimed in claim 9 , wherein the control device comprises a position regulating unit regulating the actual position (x).

11. The positioning device as claimed in claim 10 , wherein the position regulating unit comprises a filter to filter a desired position value.

12. The positioning device as claimed in claim 10 , wherein the control device comprises a position pilot control unit which interacts with the position regulating unit.

13. The positioning device as claimed in claim 9 , wherein the control device comprises a detection unit configured to generate a control signal (S) if the absolute value of a position control error (e X ) undershoots a predefined control error limit value.

14. The positioning device as claimed in claim 1 , wherein the control device comprises a calculation unit calculating a first input value (d 1 ) for the first digital/analog converter and a second input value (d 2 ) for the second digital/analog converter from a desired voltage value (U S ).

15. The positioning device as claimed in claim 14 , wherein the calculation unit is programmed to replace a first voltage value (U 1S ) calculated in an instantaneous time step (k) with a first voltage value (U A ) calculated in an earlier time step (k−1) if a difference absolute value (ΔU) of the desired voltage value (U S ) and of the first voltage value (U A ) in the earlier time step (k−1) exceeds a limit value (L).

16. The positioning device as claimed in claim 15 , wherein the calculation unit changes the limit value (L) in accordance with a control signal (S).

17. A positioning method, comprising:
providing the piezoelectric positioning device as claimed in claim 1 , and
actuating the piezoelectric positioning device by applying the first analog converter output voltage (U 1 ) and the second analog converter output voltage (U 2 ) to the at least one piezoelectric actuator.

18. A piezoelectric positioning device comprising:
at least one piezoelectric actuator comprising, respectively, a first connection contact and a second connection contact,
a control device configured to control the at least one piezoelectric actuator, and comprising:
a first digital/analog converter connected to the first connection contact and providing a first analog converter output voltage U 1 in a first voltage range ΔU 1 in first voltage levels Δu 1 , wherein the first digital/analog converter has n bits and a first digital input of the first digital/analog converter accepts 2 n digital input values, wherein the first voltage levels Δu 1 are determined by the first voltage range ΔU 1 and the 2 n digital input values,
a second digital/analog converter connected to the second connection contact and providing a second analog converter output voltage U 2 in a second voltage range ΔU 2 in second voltage levels Δu 2 , wherein the second digital/analog converter has m bits and a second digital input of the second digital/analog converter accepts 2 m digital input values, wherein the second voltage levels Δu 2 are determined by the second voltage range ΔU 2 and the 2 m digital input values,
where: Δ U 1 >ΔU 2 ≥Δu 1 >Δu 2 ,

wherein the second voltage range ΔU 2 lies at least partially outside of the first voltage range ΔU 1 ,
a first voltage amplifier arranged downstream of the first digital/analog converter and a second voltage amplifier arranged downstream of the second digital/analog converter,
a non-reactive resistor connected between the second voltage amplifier and the second connection contact, and
a low-pass filter connected between the first digital/analog converter and the first voltage amplifier.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Kempter Christian
• Korten Ulrich
• ANIC Juergen

Classifications

• G05D3/203

  using fine or coarse devices · CPC title

• H02N2/062 Primary

  Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis · CPC title

• G01Q10/06

  Circuits or algorithms therefor · CPC title

• H02N2/0075

  Electrical details, e.g. drive or control circuits or methods · CPC title

• G03F7/70691

  Handling of masks or workpieces · CPC title