Electron microscope electron gun for facilitating position adjustment and electron microscope including same

Patent metadata

Field	Value
Publication number	US-10128077-B2
Application number	US-201615576687-A
Country	US
Kind code	B2
Filing date	Jan 6, 2016
Priority date	Oct 20, 2015
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun improving a vacuum structure so as to easily move a filament block or an electron tip of an electron gun without having bellows for maintaining a vacuum when the center axis of the filament block or the electron tip of the electron gun is mechanically misaligned with the center axis of a anode and a focusing lens.

First claim

The invention claimed is:

1. An electron-microscope electron gun for facilitating position adjustment, comprising:
a tube-shaped side portion having a first vacuum exhaust pipe;
a plate-shaped top portion being in contact with the top edge surface of the tube-shaped side portion with a double O-ring interposed therebetween, and having an electron beam generator installed in the center thereof, the electron beam generator facing the inside of a tube-shaped space;
a first bottom portion serving as an internal flat plate being in contact with the bottom surface of the tube-shaped side portion, and having an electron beam passing hole formed at a position facing an electron emission direction of the electron beam generator;
a tube-shaped side extension portion extended past the contact position between the tube-shaped side portion and the first bottom portion, and having a second vacuum exhaust pipe; and
a second bottom portion serving as an internal flat plate being in contact with the bottom surface of the tube-shaped side extension portion, and having an electron beam passing hole formed at a position facing the electron beam passing hole of the first bottom portion,
wherein the tube-shaped side portion, the plate-shaped top portion and the first bottom portion form a first vacuum chamber,
the first bottom portion, the tube-shaped side extension portion and the second bottom portion form a second vacuum chamber, and
the double O-ring includes a first O-ring being in contact with the inside of the top edge surface and a second O-ring being in contact with the outside of the top edge surface, and a plurality of third vacuum exhaust pipes are installed to connect a space between the first and second O-rings.

2. An electron-microscope electron gun for facilitating position adjustment, comprising:
a tube-shaped side portion having a first vacuum exhaust pipe and a magnetic field generation unit installed at a top edge surface thereof;
a plate-shaped top portion being in contact with the top edge surface of the tube-shaped side portion with a ring-shaped magnetic fluid seal interposed therebetween, and having an electron beam generator installed in the center thereof, the electron beam generator facing the inside of a tube-shaped space;
a first bottom portion serving as an internal flat plate being in contact with the bottom surface of the tube-shaped side portion, and having an electron beam passing hole formed at a position facing an electron emission direction of the electron beam generator;
a tube-shaped side extension portion extended past the contact position between the tube-shaped side portion and the first bottom portion, and having a second vacuum exhaust pipe; and
a second bottom portion serving as an internal fiat plate being in contact with the bottom surface of the tube-shaped side extension portion, and having an electron beam passing hole formed at a position facing the electron beam passing hole of the first bottom portion,
wherein the tube-shaped side portion, the plate-shaped top portion and the first bottom portion form a first vacuum chamber, and
the first bottom portion, the tube-shaped side extension portion and the second bottom portion form a second vacuum chamber.

3. The electron-microscope electron gun of claim 1 , wherein the plurality of third vacuum exhaust pipes are connected to the second vacuum chamber.

4. The electron-microscope electron gun of claim 1 , wherein the plate-shaped top portion further comprises a knob for horizontal movement.

5. The electron-microscope electron gun of claim 1 , wherein the electron beam generator comprises a field emission electron source,
the tube-shaped side portion, the plate-shaped top portion and the tube-shaped side extension portion are formed of soft steel having a carbon weight fraction of 0.2% or less, and
the soft steel has a nickel or chrome anti-oxidation layer formed on the surface thereof, in order to prevent oxidation or corrosion.

6. The electron-microscope electron gun of claim 1 , wherein the first and second vacuum chambers have different vacuum degrees.

7. The electron-microscope electron gun of claim 2 , wherein the magnetic field generation unit comprises a permanent magnet.

8. An electron microscope comprising the electron gun of claim 1 .

9. The electron-microscope electron gun of claim 2 , wherein the plate-shaped top portion further comprises a knob for horizontal movement.

10. The electron-microscope electron gun of claim 2 , wherein the electron beam generator comprises a field emission electron source,
the tube-shaped side portion, the plate-shaped top portion and the tube-shaped side extension portion are formed of soft steel having a carbon weight fraction of 0.2% or less, and
the soft steel has a nickel or chrome anti-oxidation layer formed on the surface thereof, in order to prevent oxidation or corrosion.

11. The electron-microscope electron gun of claim 2 , wherein the first and second vacuum chambers have different vacuum degrees.

12. An electron microscope comprising the electron gun of claim 2 .

Assignees

• Korea Res Inst Standards & Sci

Inventors

• Cho Bok Lae
• Park In Young

Classifications

• H01J2237/06341

  Field emission · CPC title

• H01J2237/061

  Construction · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/06

  Electron sources; Electron guns · CPC title

• H01J37/065 Primary

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title