Chemical mechanical polishing pad and method of making same
US-9776300-B2 · Oct 3, 2017 · US
US10125212B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10125212-B2 |
| Application number | US-201314425671-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 31, 2013 |
| Priority date | Nov 1, 2012 |
| Publication date | Nov 13, 2018 |
| Grant date | Nov 13, 2018 |
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The present invention relates to a polyisocyanate composition comprising, on the basis of the total mass of the polyisocyanate composition, 97 weight % or more of a polyisocyanate, and 2.0 mass ppm or more and 1.0×104 mass ppm or less of a compound having at least one unsaturated bond in which the compound is a different compound from the polyisocyanate, or 5.0 mass ppm or more and 2.0×104 mass ppm or less of at least one inactive compound selected from the group consisting of a hydrocarbon compound, an ether compound, a sulfide compound, a halogenated hydrocarbon compound, a Si-containing hydrocarbon compound, a Si-containing ether compound, and a Si-containing sulfide compound.
Opening claim text (preview).
The invention claimed is: 1. A polyisocyanate composition comprising, on the basis of a total mass of the polyisocyanate composition: 97 weight % or more of a polyisocyanate; and (i) 2.0 mass ppm to 1.0×10 4 mass ppm, inclusively, of one or more compounds having at least one unsaturated bond, each of which is a different compound from the polyisocyanate, wherein at least one of the one or more compounds having at least one unsaturated bond comprises a compound of formula (21); in which R 5 represents (i) a hydrogen atom, (ii) an aliphatic group having 1 to 10 carbon atoms which is a d-valent alkyl or cycloalkyl which may be substituted with a linear alkyl group, or (iii) an aromatic group having a 6 to 10 carbon atoms; each of R 6 , R 7 , and R 8 independently represents (i) a hydrogen atom, (ii) an aliphatic group having 1 to 10 carbon atoms which is selected from the group consisting of an alkyl group, a linear alkyloxy group, a cycloalkyl group, and a group comprising a linear alkyl group and a cycloalkyl group, or (iii) a mono-valent aromatic group derived from an aromatic compound selected from the group consisting of benzene, toluene, ethylbenzene, propylbenzene, butylbenzene, hexylbenzene, octylbenzene, naphthalene, dimethylbenzene, diethylbenzene, dipropylbenzene, dibutylbenzene, dihexylbenzene, dioctylbenzene, methylnaphthalene, ethylnaphthalene, butylnaphthalene, and structural isomers thereof, R 5 , R 6 , R 7 , and R 8 are not simultaneously hydrogen atoms, and d represents an integer of 1 to 3, or (ii) 5.0 mass ppm to 2.0×10 4 mass ppm, inclusively, of at least one inactive compound selected from the group consisting of Compounds A, B, C, D, E, F and G, in which Compound A is an aliphatic hydrocarbon compound having a linear-chain, branched-chain, or cyclic structure; Compound B is an aromatic hydrocarbon compound which is optionally substituted with an aliphatic hydrocarbon group; Compound C is a compound having (i) a single ether bond or one or more sulfide bonds, and (ii) aromatic groups attached to both sides of the single ether bond or at least one of the one or more sulfide bonds, wherein the aliphatic groups may be the same or different, and a part or all of the carbon atoms of the compound is replaced by silicon atoms; Compound D is a compound having (i) a single ether bond or one or more sulfide bonds, and (ii) aliphatic groups attached to both sides of the single ether bond or at least one of the one or more sulfide bonds, wherein the aromatic groups may be the same or different, and a part or all of the carbon atoms of the compound is replaced by silicon atoms; Compound E is a compound having (i) a single ether bond or one or more sulfide bonds, (ii) an aliphatic group attached to one side of the single ether bond or at least one of the one or more sulfide bonds, and (iii) an aromatic group attached to another side of the single ether bond or the at least one of the one or more sulfide bonds, wherein a part or all of the carbon atoms of the compound is replaced by silicon atoms; Compound F is a compound selected from the group consisting of aromatic hydrocarbon halides and an aliphatic hydrocarbon halides, wherein at least one aliphatic hydrocarbon hydrogen atom or at least one aromatic hydrocarbon hydrogen atom is replaced by a halogen atom; and Compound G is a compound selected from the group consisting of compounds in which a part or all of carbon atoms of the Compounds A, B and F is replaced by silicon atoms. 2. A polyisocyanate composition comprising, on the basis of a total mass of the polyisocyanate composition: 97 weight % or more of a polyisocyanate; 2.0 mass ppm to 1.0×10 4 mass ppm, inclusively, of one or more compounds having at least one unsaturated bond, wherein at least one of the one or more compounds having at least one unsaturated bond comprises at least one carbonic acid ester selected from the group consisting of dimethyl carbonate, diethyl carbonate, dibutyl carbonate, dipentyl carbonate, and dihexyl carbonate; and 5.0 mass ppm to 2.0×10 4 mass ppm, inclusively, of at least one inactive compound selected from the group consisting of Compounds A, B, C, D, E, F and G, in which Compound A is an aliphatic hydrocarbon compound having a linear-chain, branched-chain, or cyclic structure; Compound B is an aromatic hydrocarbon compound which is optionally substituted with an aliphatic hydrocarbon group; Compound C is a compound having (i) a single ether bond or one or more sulfide bonds, and (ii) aliphatic groups attached to both sides of the single ether bond or at least one of the one or more sulfide bonds, wherein the aliphatic groups may be the same or different, and a part or all of the carbon atoms of the compound is replaced by silicon atoms; Compound D is a compound having (i) a single ether bond or one or more sulfide bonds, and (ii) aromatic groups attached to both sides of the single ether bond or at least one of the one or more sulfide bonds, wherein the aromatic groups may be the same or different, and a part or all of the carbon atoms of the compound is replaced by silicon atoms; Compound E is a compound having (i) a single ether bond or one or more sulfide bonds, (ii) an aliphatic group attached to one side of the single ether bond or at least one of the one or more sulfide bonds, and (iii) an aromatic group attached to another side of the single ether bond or the at least one of the one or more sulfide bonds, wherein a part or all of the carbon atoms of the compound is replaced by silicon atoms; Compound F is a compound selected from the group consisting of aromatic hydrocarbon halides and an aliphatic hydrocarbon halides, wherein at least one aliphatic hydrocarbon hydrogen atom or at least one aromatic hydrocarbon hydrogen atom is replaced by a halogen atom; and Compound G is a compound selected from the group consisting of compounds in which a part or all of carbon atoms of the Compounds A, B and F is replaced by silicon atoms. 3. The composition according to claim 1 , wherein the composition comprises the at least one inactive compound selected from the group consisting of the Compounds A, B, C, D, E, F and G. 4. The composition according to claim 3 , wherein the composition further comprises the one or more compounds having at least one unsaturated bond. 5. The composition according to claim 4 , wherein the one or more compounds having at least one unsaturated bond further comprises at least one compound selected from the group consisting of formulae (23), (24) and (25): in which R 9 , R 10 , R 11 and R 12 each independently represents an aliphatic group having 1 to 20 carbon atoms, an aliphatic group substituted with an aromatic compound having 7 to 20 carbon atoms, an aromatic group having 6 to 20 carbon atoms, or a hydrogen atom, a sum of carbon numbers constituting R 9 and R 11 is an integer of 0 to 20, and a sum of carbon numbers constituting R 19 and R 12 is an integer of 0 to 20; in which R 13 represents an aliphatic group having 1 to 50 carbon atoms, an aralkyl group having 7 to 50 carbon atoms, or an aromatic group having 6 to 50 carbon atoms; and in which R 14 and R 15 each independently represents an aliphatic group having 1 to 20 carbon atoms, an aralkyl group having 7 to 50 carbon atoms, or an aromatic group having 6 to 50 carbon atoms. 6. The composition acco
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