Package production method and package produced by the method

Patent metadata

Field	Value
Publication number	US-10125015-B2
Application number	US-201515556161-A
Country	US
Kind code	B2
Filing date	Aug 18, 2015
Priority date	Apr 3, 2015
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

The present invention relates to a package production method includes the step of superposing a pair of substrates on each other, and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material, which is formed on any of the substrates. The sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 μm to 1.0 μm, at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate, and the core material compresses the sealing material to exhibit a sealing effect when the pair of substrates are bonded to each other. Accordingly, a sufficient sealing effect can be exhibited while a pressuring force to the substrate is reduced.

First claim

The invention claimed is:

1. A package production method, comprising the step of superposing a pair of substrates on each other, and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material, the sealing material being formed on at least one of the substrates, wherein
the sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 μm to 1.0 μm,
at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate,
the core material compresses the sealing material when the pair of substrates are bonded to each other,
A bulk-like metal film including any metal selected from gold, silver, palladium, platinum, titanium, chromium, copper, tungsten, nickel and an alloy of these metals is formed on a surface of the substrate, and

the bulk-like metal film including any metal selected from gold, silver, palladium, platinum, titanium, chromium, copper, tungsten, nickel and an alloy of these metals is formed on a top surface of the core material.

2. The package production method according to claim 1 , wherein the sealing material is formed on one of the substrates, and the core material is formed on a substrate which is not provided with the sealing material.

3. The package production method according to claim 2 , wherein a recess is formed in regions adjacent to the core material on both sides to form a cross-sectionally convex core material.

4. The package production method according to claim 2 , wherein the ratio (W′/W) of the total width (W′) of the core material and the width (W) of the sealing material on a cross-section of the sealing material is not less than 0.05 and not more than 0.95.

5. The package production method according to claim 2 , wherein the metal film has a thickness of not less than 0.01 μm and not more than 5 μm.

6. The package production method according to claim 1 , wherein the sealing material is formed on one of the substrates, the core material is formed on a substrate provided with the sealing material, and the sealing material covers at least a top surface portion of the core material.

7. The package production method according to claim 6 , wherein a recess is formed in regions adjacent to the core material on both sides to form a cross-sectionally convex core material.

8. The package production method according to claim 6 , wherein the ratio (W′/W) of the total width (W′) of the core material and the width (W) of the sealing material on a cross-section of the sealing material is not less than 0.05 and not more than 0.95.

9. The package production method according to claim 6 , wherein the metal film has a thickness of not less than 0.01 μm and not more than 5 μm.

10. The package production method according to claim 1 , wherein the sealing material is formed on both the substrates, the core material is formed on at least one of the substrates provided with the sealing material, and the sealing material covers at least the top surface portion of the core material.

11. The package production method according to claim 10 , wherein a recess is formed in regions adjacent to the core material on both sides to form a cross-sectionally convex core material.

12. The package production method according to claim 10 , wherein the ratio (W′/W) of the total width (W′) of the core material and the width (W) of the sealing material on a cross-section of the sealing material is not less than 0.05 and not more than 0.95.

13. The package production method according to claim 10 , wherein the metal film has a thickness of not less than 0.01 μm and not more than 5 μm.

14. The package production method according to claim 1 , wherein a recess is formed in regions adjacent to the core material on both sides to form a cross-sectionally convex core material.

15. The package production method according to claim 14 , wherein the ratio (W′/W) of the total width (W′) of the core material and the width (W) of the sealing material on a cross-section of the sealing material is not less than 0.05 and not more than 0.95.

16. The package production method according to claim 1 , wherein the ratio (W′/W) of the total width (W′) of the core material and the width (W) of the sealing material on a cross-section of the sealing material is not less than 0.05 and not more than 0.95.

17. The package production method according to claim 1 , wherein the metal film has a thickness of not less than 0.01 μm and not more than 5 μm.

Assignees

• Tanaka Precious Metal Ind

Inventors

• Ogashiwa Toshinori
• SASAKI Yuya
• Miyairi Masayuki

Classifications

• H10W76/10

  Containers or parts thereof · CPC title

• B81C2203/019

  characterised by the material or arrangement of seals between parts · CPC title

• B81C1/00269 Primary

  Bonding of solid lids or wafers to the substrate · CPC title

• B81C3/00

  Assembling of devices or systems from individually processed components · CPC title

• B81C2203/036

  Fusion bonding · CPC title