High flow gas diffuser assemblies, systems, and methods

Patent metadata

Field	Value
Publication number	US-10119191-B2
Application number	US-201615177183-A
Country	US
Kind code	B2
Filing date	Jun 8, 2016
Priority date	Jun 8, 2016
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

Porous diffuser assemblies including multiple diffuser elements. The porous diffuser assemblies include a diffuser body, a diffuser base coupled to the diffuser body and forming a plenum there between, the diffuser base including a plurality of openings formed therein, and a porous diffuser element disposed in each of the plurality of openings wherein surfaces of the porous diffuser elements are exposed to the plenum. Gas purged chambers and methods of purging a chamber are disclosed, as are numerous other aspects.

First claim

What is claimed is:

1. A gas purged chamber, comprising:
a chamber configured to contain a substrate therein; and
a gas diffuser assembly coupled to the chamber, the gas diffuser assembly including:
a diffuser body,
a diffuser base coupled to the diffuser body and forming a gas plenum there between, the diffuser base including a plurality of openings formed therein, and
a porous diffuser element disposed in each of the plurality of openings.

2. The gas purged chamber of claim 1 , wherein the gas diffuser assembly is coupled to a load lock chamber lid.

3. The gas purged chamber of claim 1 , wherein the gas diffuser assembly is coupled to a transfer chamber lid.

4. The gas purged chamber of claim 1 , comprising a plurality of the gas diffuser assembly coupled to a transfer chamber lid.

5. The gas purged chamber of claim 1 , wherein a thickness of the porous diffuser elements is less than a thickness of the diffuser base.

6. The gas purged chamber of claim 1 , a wherein the diffuser base includes transition elements.

7. The gas purge chamber of claim 1 , wherein each of the porous diffuser elements are clamped to the diffuser base by a securing member.

8. The gas purge chamber of claim 1 , wherein the plenum includes a frustoconical surface.

9. The gas purge chamber of claim 1 , wherein the plurality of openings are circular openings configured to receive the porous diffuser elements that are configured to have a disc shape.

10. The gas purge chamber of claim 1 , wherein each of the porous diffuser elements comprises a sintered porous metal welded to the diffuser base.

Assignees

• Applied Materials Inc

Inventors

• Morey Travis

Classifications

• C23C14/566

  using a load-lock chamber · CPC title

• H01J37/3244

  Gas supply means · CPC title

• C23C16/4408 Primary

  by purging residual gases from the reaction chamber or gas lines · CPC title