Carrier adapter insert apparatus and carrier adapter insert detection methods

Patent metadata

Field	Value
Publication number	US-10115616-B2
Application number	US-201414332976-A
Country	US
Kind code	B2
Filing date	Jul 16, 2014
Priority date	Jul 18, 2013
Publication date	Oct 30, 2018
Grant date	Oct 30, 2018

Abstract

Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

First claim

What is claimed is:

1. A substrate carrier adapter apparatus, comprising:
an adapter insert frame configured to be received within a substrate carrier, wherein the substrate carrier is configured to hold 450 mm substrates;
a plurality of support rails located within the adapter insert frame and configured to receive a plurality of 300 mm substrates; and
a mapping feature coupled to, or integral with, the adapter insert frame and configured to be detected by a sensor affixed to an end effector of a robot external to the substrate carrier when the substrate carrier adapter apparatus is received in the substrate carrier, the mapping feature for determining whether the substrate carrier adapter apparatus is present or absent in the substrate carrier.

2. The substrate carrier adapter apparatus of claim 1 , comprising a frame extension adapted to be coupled to at least one of an upper frame portion, a lower frame portion, and a support rail of the adapter insert frame.

3. The substrate carrier adapter apparatus of claim 2 , wherein the frame extension is integrally formed from at least one of an upper frame portion, a lower frame portion, and a support rail.

4. The substrate carrier adapter apparatus of claim 2 , wherein the mapping feature is at least one of a tab shape and a contoured shape and is coupled to the frame extension.

5. An adapter insert, comprising:
an adapter frame configured to be received within a substrate carrier, wherein the substrate carrier is adapted to hold 450 mm substrates;
a plurality of support rails coupled to the adapter frame and adapted to support a plurality of 300 mm substrates;
a frame extension adapted to be coupled to the adapter frame; and
a mapping feature located on the frame extension and configured to be detected by a sensor affixed to an end effector of a robot external to the substrate carrier when the adapter insert is received within the substrate carrier, the mapping feature for determining whether the adapter insert is present or absent in a the substrate carrier.

6. The adapter insert of claim 5 wherein the frame extension is adapted to be coupled to at least one of the adapter frame and one or more of the plurality of support rails.

7. The adapter insert of claim 5 wherein the frame extension is integrally formed from at least one of the adapter frame and one or more of the plurality of support rails.

8. The adapter insert of claim 5 wherein the mapping feature is at least one of a tab shape and a contoured shape.

9. The substrate carrier adapter apparatus of claim 1 , wherein the substrate carrier is adapted to receive a plurality of 450 mm substrates size when the substrate carrier adapter apparatus is removed from the substrate carrier.

10. The substrate carrier adapter apparatus of claim 1 , wherein the mapping feature comprises a tab extending from the adapter insert frame.

11. The substrate carrier adapter apparatus of claim 1 , wherein the mapping feature comprises a contour extending from the adapter insert frame.

12. The adapter insert of claim 5 , wherein the mapping feature comprises a tab extending from the frame extension.

13. The adapter insert of claim 5 , wherein the mapping feature comprises a contour extending from the frame extension.

Assignees

• Applied Materials Inc

Inventors

• Mazzocco John J
• Ng Edward
• Macleod Douglas
• Phillips David
• Majumdar Ayan
• Hudgens Jeffrey C

Classifications

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/14 Primary

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• G01V8/12

  using one transmitter and one receiver · CPC title

• H01L21/6732 Primary

  Electricity · mapped topic

• H01L21/67259

  Electricity · mapped topic