Reagent delivery system freeze prevention heat exchanger

Patent metadata

Field	Value
Publication number	US-10115571-B2
Application number	US-201514696955-A
Country	US
Kind code	B2
Filing date	Apr 27, 2015
Priority date	Jun 4, 2014
Publication date	Oct 30, 2018
Grant date	Oct 30, 2018

Abstract

Apparatus and methods that provide a reagent gas in a foreline abatement system are provided herein. In some embodiments, a reagent delivery system includes a water tank having an inner volume that holds a reagent liquid when disposed therein, and a heat exchanger having a central opening disposed in the inner volume and configured to keep a top surface of the reagent liquid from freezing when reagent liquid is disposed within the water tank.

First claim

The invention claimed is:

1. A reagent delivery system, comprising:
a water tank having an inner volume that holds a reagent liquid when disposed therein; and
a heat exchanger having a central opening disposed in the inner volume and configured to keep a top surface of the reagent liquid from freezing when reagent liquid is disposed within the water tank,
wherein the heat exchanger is formed from a plurality of concentric cylinders that permits a flow of a reagent liquid between the concentric cylinders, and wherein each of the plurality of concentric cylinders is perforated to allow the reagent liquid to flow through the concentric cylinders.

2. The reagent delivery system of claim 1 , wherein the plurality of concentric cylinders are secured together by one or more radial support bars coupled to the plurality of concentric cylinders, and wherein the one or more support bars ensure concentricity of the plurality of concentric cylinders.

3. The reagent delivery system of claim 2 , wherein the one or more radial support bars further secure the heat exchanger to an inner wall of the water tank and extend radially to a center portion of the heat exchanger.

4. The reagent delivery system of claim 1 , wherein the heat exchanger is supported by one or more protrusions extending radially inward from an inner wall of the water tank and extend radially to a center portion of the heat exchanger.

5. The reagent delivery system of claim 1 , wherein the heat exchanger includes a plurality of radial fins extending radially inward from an inner wall of the cylinder.

6. The reagent delivery system of claim 1 , further comprising:
one or more magnetic floats configured to float in the reagent liquid; and
one or more sensors disposed in the water tank, where the one or more sensors are configured to determine a level of the reagent liquid based on a position of the magnetic float.

7. The reagent delivery system of claim 6 , further comprising:
a tube disposed along a central access of the water tank, wherein the heat exchanger and the one or more magnetic floats are disposed about the tube, and wherein the one or more sensors are disposed within the tube.

8. The reagent delivery system of claim 1 , wherein each of the plurality of concentric cylinders are solid sheets of metal having perforations formed therethrough.

9. A heat exchanger for use in a reagent delivery system, comprising:
a continuous coil sheet of material having an inner end and an outer end, wherein the continuous coil sheet forms a plurality of equidistantly spaced concentric layers that permits a flow of a reagent liquid between the concentric layers, and wherein the continuous coil sheet is perforated to allow the reagent liquid to flow through the concentric layers.

10. The heat exchanger of claim 9 , further comprising:
one or more radial support bars coupled to the continuous coil sheet that ensures concentricity of equidistantly spaced concentric layers.

11. The heat exchanger of claim 10 , wherein the one or more radial support bars further secure the heat exchanger within the reagent delivery system and extend radially to a center portion of the heat exchanger.

12. The heat exchanger of claim 9 , wherein the continuous coil sheet is formed from stainless steel.

13. The heat exchanger of claim 9 , wherein the continuous coil sheet has an inner diameter at the inner end of about 2 inches, and an outer diameter at the outer end of about 8 inches.

14. The heat exchanger of claim 9 , wherein each concentric layer is spaced about 0.25 inches from each other.

15. The heat exchanger of claim 9 , wherein the continuous coil sheet is a solid sheet of metal having perforations formed therethrough.

16. A substrate processing system, comprising:
a process chamber;
a foreline coupled to the process chamber to allow a flow of exhaust from the process chamber;
a foreline plasma abatement system coupled to the foreline to abate exhaust flowing through the foreline, wherein the foreline plasma abatement system includes:
a water tank having an inner volume that holds a reagent liquid when disposed therein; and
a heat exchanger having a central opening disposed in the inner volume and configured to keep a top surface of the reagent liquid from freezing when reagent liquid is disposed within the water tank, wherein the heat exchanger is a continuous coil sheet of material having an inner end and an outer end, wherein the continuous coil sheet forms a plurality of equidistantly spaced concentric layers that permits a flow of a reagent liquid between the concentric layers, and wherein the continuous coil sheet is perforated to allow the reagent liquid to flow through the concentric layers.

17. The substrate processing system of claim 16 , further comprising:
one or more magnetic floats configured to float in the reagent liquid; and
one or more sensors disposed in the water tank, where the one or more sensors are configured to determine a level of the reagent liquid based on a position of the magnetic float.

18. The substrate processing system of claim 17 , further comprising:
a tube disposed along a central access of the water tank, wherein the heat exchanger and the one or more magnetic floats are disposed about the tube, and wherein the one or more sensors are disposed within the tube.

19. The substrate processing system of claim 16 , wherein the continuous coil sheet is a solid sheet of metal having perforations formed therethrough.

Assignees

• Applied Materials Inc

Inventors

• Dickinson Colin John

Classifications

• Y02C20/30

  of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6] · CPC title

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title

• H01J37/32844 Primary

  Treating effluent gases · CPC title

• H01J37/32522 Primary

  Temperature · CPC title