Selective nanoscale growth of lattice mismatched materials

Patent metadata

Field	Value
Publication number	US-10109480-B2
Application number	US-201715599376-A
Country	US
Kind code	B2
Filing date	May 18, 2017
Priority date	Sep 14, 2010
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

Exemplary embodiments provide materials and methods of forming high-quality semiconductor devices using lattice-mismatched materials. In one embodiment, a composite film including one or more substantially-single-particle-thick nanoparticle layers can be deposited over a substrate as a nanoscale selective growth mask for epitaxially growing lattice-mismatched materials over the substrate.

First claim

What is claimed is:

1. A semiconductor device comprising:
a substrate;
a composite film comprising one or more substantially-single-particle-thick nanoparticle layers disposed over the substrate,
wherein the composite film comprises a plurality of nanoparticles, self-assembled such that a plurality of inter-particle spaces are defined between adjacent ones of the plurality of nanoparticles,
wherein the inter-particle spaces are smaller than an average nanoparticle diameter of the plurality of nanoparticles, and
wherein the one or more substantially-single-particle-thick nanoparticle layers is sterically-limited such that each of the plurality of nanoparticles is contacted by multiple additional ones of the plurality of nanoparticles; and

an epitaxial material grown through the plurality of inter-particle spaces from a surface below the one or more substantially-single-particle-thick nanoparticle layers, wherein the epitaxial material is laterally coalesced over a top surface of the composite film, and wherein the epitaxial material has a lattice mismatch with the substrate.

2. The device of claim 1 , further comprising one or more additional epitaxial layers disposed on the epitaxial material that is laterally coalesced over the top surface of the composite film to form an active region of a heterostructured semiconductor device, wherein the one or more additional epitaxial layers are lattice matched with the laterally coalesced material.

3. The device of claim 1 , wherein the substrate comprises a Group III-V substrate comprising GaAs, GaSb, or InAs, and the epitaxial material lattice mismatched with the substrate comprises a different Group III-V material than the Group III-V substrate.

4. The device of claim 1 , further comprising a buffer layer disposed between the substrate and the composite film, wherein the substrate comprises a Group IV substrate, and each of the buffer layer and the epitaxial material lattice mismatched with the substrate comprises a Group III-V material comprising GaAs, GaSb, GaN, InAs, or InSb.

5. The device of claim 1 , wherein the plurality of nanoparticles are formed of a material selected from the group consisting of silicon oxide, silicon nitride, aluminum oxide, and a combination thereof.

6. The device of claim 1 , wherein the one or more substantially-single-particle-thick nanoparticle layers comprise a first layer comprising a plurality of large nanoparticles having an average particle size ranging from about 50 nm to about 150 nm over the substrate, and a second layer comprising a plurality of small nanoparticles having an average particle size ranging from about 6 nm to about 20 nm disposed on the first layer.

7. The device of claim 1 , wherein the plurality of nanoparticles comprise an average particle size ranging from about 5 nm to about 150 nm in diameter.

8. The method of claim 1 , wherein the substantially-single-particle-thick nanoparticle layer consists essentially of a plurality of nanoparticles having an average particle size ranging from about 80 nm to about 150 nm in diameter.

9. The device of claim 1 , wherein the substantially-single-particle-thick nanoparticle layer consists essentially of a plurality of nanoparticles having an average particle size ranging from about 5 nm to about 80 nm in diameter.

10. The device of claim 1 , wherein the plurality of nanoparticles have an average diameter d and the plurality of inter-particle spaces have an average lateral dimension s, wherein an aspect ratio d/s ranges from about 0.09 to about 0.3.

11. The device of claim 1 , wherein the substantially-single-particle-thick nanoparticle layer is formed from one or more of silica, silicon nitride, alumina, and/or sapphire.

12. The device of claim 1 , wherein the inter-particle spaces are small enough to allow nanoscale selective heteroepitaxial growth of the epitaxial film on the substrate.

13. The device of claim 1 , wherein the epitaxial material contacts the substrate and comprises a molecular beam epitaxy (MBE)-grown epitaxial material.

14. The device of claim 1 , further comprising a buffer layer disposed between the composite film and the substrate, wherein the surface comprises a surface of the buffer layer, wherein the epitaxial material comprises a lattice mismatched material selectively grown through the inter-particle spaces from the surface of the buffer layer.

15. The device of claim 1 , wherein the surface comprises a surface of the substrate, and wherein the epitaxial material comprises a lattice mismatched material selectively grown through the inter-particle spaces from the surface of the substrate.

16. The device of claim 1 , wherein the one or more substantially-single-particle-thick nanoparticle layers comprises a first substantially-single-particle-thick nanoparticle layer and a second substantially-single-particle-thick nanoparticle disposed on the first substantially-single-particle-thick nanoparticle layer,
wherein the first substantially-single-particle-thick nanoparticle layer comprises a first plurality of self-assembled nanoparticles,
wherein the second substantially-single-particle thick layer comprises a second plurality of self-assembled nanoparticles,
wherein the first plurality of self-assembled nanoparticles consists of large self-assembled nanoparticles having an average particle size ranging from about 50 nm to about 150 nm, and
wherein the second plurality of nanoparticles consists of small self-assembled nanoparticles having an average particle size ranging from about 5 nm to about 40 nm.

17. A semiconductor device comprising:
a substrate;
a composite film comprising one or more substantially-single-particle-thick nanoparticle layers disposed over the substrate,
wherein the composite film comprises a plurality of nanoparticles, self-assembled such that a plurality of inter-particle spaces are defined between adjacent ones of the plurality of nanoparticles, wherein the plurality of inter-particle spaces provide ballistic pathways to a surface below the one or more substantially-single-particle-thick nanoparticle layers, and
wherein the inter-particle spaces are smaller than an average nanoparticle diameter of the plurality of nanoparticles; and

an epitaxial material grown through the ballistic pathways and from the surface, wherein the epitaxial material is laterally coalesced over a top surface of the composite film, and wherein the epitaxial material has a lattice mismatch with the substrate.

18. The semiconductor device of claim 17 , wherein the surface comprises a surface of the substrate and wherein the one or more substantially-single-particle-thick nanoparticle layers is disposed directly on the substrate.

19. The semiconductor device of claim 17 , further comprising a buffer layer formed on the substrate, wherein the surface comprises a surface of the buffer layer, and wherein the one or more substantially-single-particle-thick nanoparticle layers is disposed directly on the buffer layer.

20. A semiconductor device comprising:
a substrate;
a composite film comprising one or more substantially-single-particle-thick nanoparticle layers disposed over the substrate,
wherein the composite film comprises a plurality of nanoparticles, self-assembled to define a plurality of inter-particle spaces between adjacent ones of the plurality of nanoparticles, wherein the plurality of inter-particle spaces provide open, non-scattering pathways from a top of the one or more substantially-single-particle-thick nanoparticle layers to a surface o

Assignees

• Stc Unm

Inventors

• Lee Seung-Chang
• Brueck Steven R J

Classifications

• H10P14/3421

  Arsenides · CPC title

• H10P14/3414

  being group IIIA-VIA materials · CPC title

• H10P14/3251

  consisting of three or more layers · CPC title

• H10P14/3216

  Nitrides · CPC title

• H10P14/3214

  being Group IIIA-VA semiconductors · CPC title