Arrangement for manipulating the position of an element

Patent metadata

Field	Value
Publication number	US-10108097-B2
Application number	US-201715647702-A
Country	US
Kind code	B2
Filing date	Jul 12, 2017
Priority date	Feb 3, 2015
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

The disclosure relates to arrangements for manipulating the position of an element. An arrangement according has at least one actuator for each degree of freedom of the positional manipulation for exerting adjustable forces on the element, at least one position sensor for each degree of freedom of the positional manipulation for generating in each case a sensor signal that is characteristic of the position of the element, and at least one position controller, which in a position control circuit controls a force exerted on the element by the at least one actuator for the positioning of the element in dependence on the at least one sensor signal. At least one actuator and at least one position sensor are mounted on a common module frame.

First claim

What is claimed is:

1. An arrangement configured to manipulate a position of an element in at least one degree of freedom, the arrangement comprising:
for each degree of freedom of positional manipulation of the element, an actuator configured to exert adjustable forces on the element;
for each degree of freedom of the positional manipulation of the element, a position sensor configured to generate in each case a sensor signal that is characteristic of the position of the element;
a position controller which is configured to, in a position control circuit, control a force exerted on the element by the actuator depending on the sensor signal;
a module frame; and
a reference frame,
wherein:
at least one actuator and at least one position sensor are mounted on the module frame;
the module frame is mechanically attached to the reference frame so that 0.5·ω B ≤ω MR ≤2ω B for resonant frequencies ω MR of the attachment; and
ω B denotes the bandwidth of the position control circuit.

2. The arrangement of claim 1 , wherein the arrangement comprises precisely one actuator for each degree of freedom of the positional manipulation of the element.

3. The arrangement of claim 1 , wherein the arrangement comprises at least two actuators for each degree of freedom of the positional manipulation of the element, and the arrangement is configured so that forces exerted on the element by the actuators are adjustable independently of one another.

4. The arrangement of claim 1 , wherein the arrangement comprises:
at least two actuators for each degree of freedom of the positional manipulation; and
at least one position controller configured to control controls forces exerted by the actuators independently of one another in a position control circuit depending on the sensor signal, at least one of the actuators exerting a force on the element; and
at least one of the actuators is assigned a further element with a reaction mass so that the force of reaction accompanying the force exerted on the element to be positioned by the actuator acts on the reaction mass.

5. The arrangement of claim 4 , wherein the arrangement is configured so that a force of reaction accompanying the force that is exerted on the element or the module frame by at least one of the actuators is compensatable by another actuator of the at least two actuators.

6. The arrangement of claim 4 , wherein the at least two actuators and the position sensor are mounted on the module frame.

7. The arrangement of claim 4 , wherein the reaction mass is mechanically attached to the module frame.

8. The arrangement of claim 6 , wherein the arrangement further comprises an acceleration precontrol configured to modify the force exerted on the element based on an acceleration of the reference frame.

9. The arrangement of claim 1 , further comprising an acceleration sensor configured to measure an acceleration of the reference frame.

10. The arrangement of claim 9 , wherein the acceleration sensor is mounted on the module frame.

11. The arrangement of claim 9 , wherein the acceleration sensor is mounted on the reference frame.

12. The arrangement of claim 1 , further comprising a deformation compensation controller configured to at least partially compensate a deformation of the mechanical attachment of the module frame to the reference frame.

13. The arrangement of claim 1 , wherein:
the arrangement is configured to manipulate the position of the element in a plurality of degrees of freedom;
for each degree of freedom of the positional manipulation, the arrangement comprises at least one actuator configured to exert adjustable forces on the element; and
for each degree of freedom of the positional manipulation, the arrangement comprises at least one position sensor configured to generate a sensor signal characteristic of the position of the element.

14. The arrangement of claim 1 , wherein the arrangement is configured to manipulate a position of a plurality of elements in at least one degree of freedom, and the plurality of elements are mounted together on the module frame.

15. The arrangement of claim 14 , wherein the arrangement comprises, for a plurality of elements, a common additional actuator for each degree of freedom of the positional manipulation to compensate for forces of reaction.

16. The arrangement of claim 1 , wherein the module frame comprises a mass that is no more than 10 times a mass of the element.

17. The arrangement of claim 1 , wherein the element is a mirror.

18. The arrangement of claim 1 , wherein the element is a mirror facet of a facet mirror which comprises a plurality of mirror facets.

19. The arrangement of claim 1 , wherein the system is an optical system of a projection exposure apparatus.

20. An apparatus, comprising:
the arrangement of claim 1 ,
wherein the apparatus is a projection exposure apparatus.

21. The apparatus of claim 20 , wherein the apparatus is an EUV projection exposure apparatus.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Schoenhoff Ulrich
• Bektas Eylem
• Hauf Markus

Classifications

• G03F7/70825 Primary

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• G02B7/023

  permitting adjustment · CPC title

• G03F7/70775 Primary

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title

• G02B7/1827 Primary

  Motorised alignment · CPC title