Lithographic apparatus, positioning system for use in a lithographic apparatus and method
US-2016109814-A1 · Apr 21, 2016 · US
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Schoenhoff Ulrich patents
Schoenhoff Ulrich is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Schoenhoff Ulrich |
| Total patents | 1 |
| First publication | Apr 21, 2016 |
| Latest publication | Apr 21, 2016 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 1 |
| Zeiss Carl Smt Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70775 | 1 |
| G03F7/709 | 1 |
| G03F7/70766 | 1 |
| G03F7/70141 | 1 |
| G03F7/70258 | 1 |