Metal plating compositions

Patent metadata

Field	Value
Publication number	US-10106512-B2
Application number	US-201515559542-A
Country	US
Kind code	B2
Filing date	Apr 28, 2015
Priority date	Apr 28, 2015
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

Reaction products of primary and secondary diamines and bisanhydrides are included as additives in metal electroplating baths. The metal electroplating baths have good throwing power and deposit metal layers having substantially planar surfaces. The metal plating baths may be used to deposit metal on substrates with surface features such as through-holes and vias.

First claim

What is claimed is:

1. A composition comprising one or more sources of metal ions chosen from copper salts and tin salts, an electrolyte, and a reaction product of one or more diamines and one or more compounds having formula:

wherein the one or more diamines have a formula:

R 13 and R 14 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 12 )alkyl, alkyleneoxy or substituted or unsubstituted (C 6 -C 18 )aryl, and R′ comprises the following moieties:

a substituted or unsubstituted (C 6 -C 18 )aryl, R 15 -R 22 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl or linear or branched (C 1 -C 5 )alkoxy, and Z is a carbon atom or nitrogen atom, and p and s may be the same or different and are independently integers of one or greater, e is an integer of 0 to 3, and a, b, c and d may be the same or different and are numbers from 1 or greater, R 23 and R 24 may be the same or different and are hydrogen or amino(C 1 -C 10 )alkyl, and R comprises moieties having the following formula:

R 1 , R 2 , R 3 and R 4 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 4 )alkyl, hydroxyl, hydroxy(C 1 -C 3 )alkyl, carboxyl, carboxy(C 1 -C 3 )alkyl or (C 1 -C 3 )alkoxy, R 5 and R 6 may be the same or different and comprise hydrogen, carboxyl and carboxy(C 1 -C 3 )alkyl, R 7 , R 8 , R 9 and R 10 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl, carboxy(C 1 -C 3 )alkyl, linear or branched (C 1 -C 5 )alkoxy, R 11 and R 12 may be the same or different and comprise hydrogen or linear or branched (C 1 -C 5 )alkyl, Ar is an aryl group having 5 to 6 carbon atoms, n and m may be the same or different and are integers of 1 to 15, and q, r and t may be the same or different and are integers of 1 to 10.

2. The composition of claim 1 , wherein the diamine has a formula:

wherein R 13 and R 14 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 12 )alkyl, alkyleneoxy or substituted or unsubstituted (C 6 -C 18 )aryl, and R′ comprises the following moieties:

R 15 -R 22 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl or linear or branched (C 1 -C 5 )alkoxy, and p and s may be the same or different and are independently integers of one or greater, e is an integer of 0 to 3, and a, b, c and d may be the same or different and are numbers from 1 or greater.

3. The composition of claim 1 , wherein R is the moiety:

R 1 and R 2 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 4 )alkyl, hydroxyl, hydroxy(C 1 -C 3 )alkyl, carboxyl, carboxy(C 1 -C 3 )alkyl or (C 1 -C 3 )alkoxy, and m is an integer of 1 to 15.

4. The composition of claim 1 , wherein the one or more sources of metal ions are chosen from copper salts.

5. The composition of claim 1 , further comprising one or more of acids, sources of halide ions, accelerators and suppressors.

Assignees

• Dow Global Technologies Llc
• Rohm & Haas Elect Mat

Inventors

• Duan Lingli
• Chen Chen
• Feng Shaoguang
• Niazimbetova Zukhra I
• Rzeznik Maria Anna

Classifications

• C25D3/38

  of copper · CPC title

• C07D241/04

  having no double bonds between ring members or between ring members and non-ring members · CPC title

• C25D7/123

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• C08G73/0293

  Quaternisation of polyamidoamines · CPC title

• C07D265/33 Primary

  Two oxygen atoms, in positions 3 and 5 · CPC title