Methods and structures to prevent sidewall defects during selective epitaxy

Patent metadata

Field	Value
Publication number	US-10096474-B2
Application number	US-201715604550-A
Country	US
Kind code	B2
Filing date	May 24, 2017
Priority date	Sep 4, 2013
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

Trenches (and processes for forming the trenches) are provided that reduce or prevent crystaline defects in selective epitaxial growth of type III-V or Germanium (Ge) material (e.g., a “buffer” material) from a top surface of a substrate material. The defects may result from collision of selective epitaxial sidewall growth with oxide trench sidewalls. Such trenches include (1) a trench having sloped sidewalls at an angle of between 40 degrees and 70 degrees (e.g., such as 55 degrees) with respect to a substrate surface; and/or (2) a combined trench having an upper trench over and surrounding the opening of a lower trench (e.g., the lower trench may have the sloped sidewalls, short vertical walls, or tall vertical walls). These trenches reduce or prevent defects in the epitaxial sidewall growth where the growth touches or grows against vertical sidewalls of a trench it is grown in.

First claim

What is claimed is:

1. An integrated circuit structure, comprising:
a first isolation structure on a substrate, the first isolation structure having an upper portion on a lower portion, the lower portion having a substantially flat surface having a width, and the upper portion having a width on the lower portion less than the width of the substantially flat surface of the lower portion providing exposed portions of the substantially flat surface of the lower portion;
a second isolation structure on the substrate, the second isolation structure having an upper portion on a lower portion, the lower portion having a substantially flat surface having a width, and the upper portion having a width on the lower portion less than the width of the substantially flat surface of the lower portion providing exposed portions of the substantially flat surface of the lower portion;
a first epitaxial semiconductor material laterally directly between the upper portion of the first isolation structure and the upper portion of the second isolation structure, the epitaxial semiconductor material on a portion of the exposed portions of the substantially flat surfaces of the lower portions of the first and second isolation structures, the first epitaxial semiconductor material comprising a fin; and
a second epitaxial semiconductor material below the first epitaxial semiconductor material, the second epitaxial semiconductor material laterally between the upper portion of the first isolation structure and the upper portion of the second isolation structure, wherein the second epitaxial semiconductor material is separate and distinct from the first epitaxial semiconductor material.

2. The integrated circuit structure of claim 1 , wherein the substrate is a monocrystalline silicon substrate.

3. The integrated circuit structure of claim 2 , wherein the first epitaxial semiconductor material is a group III-V material layer.

4. The integrated circuit structure of claim 2 , wherein the first epitaxial semiconductor material is a germanium material layer.

5. The integrated circuit structure of claim 1 , further comprising: a first seam between the upper portion and lower portion of the first isolation structure; and a second seam between the upper portion and lower portion of the second isolation structure.

6. The integrated circuit structure of claim 1 , wherein the second epitaxial semiconductor material is on a second portion of the exposed portions of the substantially flat surfaces of the lower portions of the first and second isolation structures, the second epitaxial semiconductor material comprising a pyramidal top surface, wherein the epitaxial semiconductor material is on the pyramidal top surface of the second epitaxial semiconductor material.

7. The integrated circuit structure of claim 6 , further comprising:
a third epitaxial semiconductor material below the second epitaxial semiconductor material, the third epitaxial semiconductor material laterally between the lower portion of the first isolation structure and the lower portion of the second isolation structure, the third epitaxial semiconductor material, the third epitaxial semiconductor material comprising a pyramidal top surface above the substantially flat surfaces of the lower portions of the first and second isolation structures, wherein the second epitaxial semiconductor material is on the pyramidal top surface of the third epitaxial semiconductor material.

8. The integrated circuit structure of claim 7 , further comprising:
a fourth epitaxial semiconductor material below the third epitaxial semiconductor material, the fourth epitaxial semiconductor material laterally between the lower portion of the first isolation structure and the lower portion of the second isolation structure, the third epitaxial semiconductor material, the third epitaxial semiconductor material comprising a pyramidal top surface, wherein the third epitaxial semiconductor material is on the pyramidal top surface of the fourth epitaxial semiconductor material.

9. The integrated circuit structure of claim 8 , wherein the fourth epitaxial semiconductor material is on the substrate, and wherein a portion of the third epitaxial semiconductor material is on the substrate.

10. The integrated circuit structure of claim 1 , wherein the lower portions of the first and second isolation structures comprises substantially vertical sidewalls.

Assignees

• Intel Corp

Inventors

• Mukherjee Niloy
• Goel Niti
• Gardner Sanaz K
• Pathi Pragyansri
• Metz Matthew V
• Dasgupta Sansaptak
• Sung Seung Hoon
• Powers James M
• Dewey Gilbert
• Chu-Kung Benjamin
• Kavalieros Jack T
• Chau Robert S

Classifications

• H10P14/3466

  Crystal orientation · CPC title

• H10P14/3414

  being group IIIA-VIA materials · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3258

  Crystal orientation · CPC title

• H10P14/2905 Primary

  Silicon, silicon germanium or germanium · CPC title