Control system and method for lithography apparatus

Patent metadata

Field	Value
Publication number	US-10096450-B2
Application number	US-201514979583-A
Country	US
Kind code	B2
Filing date	Dec 28, 2015
Priority date	Dec 28, 2015
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

A method for initializing a first operation in a first module at a first start time value in a first time base, the method comprising generating a clock signal, generating a second time base in the first module based on the clock signal, determining a second sync value in the second time base, determining a first sync value in the first time base corresponding to a second sync value in the second time base, determining a start trigger value in the second time base based on the first sync value and the start time value in the first time base, and initializing the first operation in the first module based on the start trigger value and a current value of the second time base in the first module.

First claim

What is claimed is:

1. A method for initializing a first operation in a first module at a start time value in a first time base, the method comprising:
generating a clock signal;
generating a second time base in the first module based on the clock signal;
determining a second sync value in the second time base;
determining a first sync value in the first time base corresponding to a second sync value in the second time base;
determining a start trigger value in the second time base based on the first sync value and the start time value in the first time base; and
initializing the first operation in the first module based on the start trigger value and a current value of the second time base in the first module,
wherein the second time base is different from the first time base.

2. The method according to claim 1 , wherein the second time base comprises a count value generated from the clock signal.

3. The method according to claim 1 , wherein determining the first sync value comprises generating a sync signal, and determining the first sync value in dependence on a time of receipt of the sync signal in the first time base, and wherein the second sync value corresponds to a value in the second time base determined by receipt of the sync signal.

4. The method according to claim 3 , wherein the sync signal is combined with the clock signal to form a single combined signal which is used for determining the first sync value ( 406 ) and determining the second sync value.

5. The method according to claim 1 , wherein determining the start trigger value comprises determining a relative start time in the first time base based on the start time value and the first sync value, wherein the start trigger value is a value in the second time base corresponding to the relative start time in the first time base.

6. The method according to claim 2 , wherein the start trigger value corresponds to a count value in the second time base corresponding to the relative start time in the first time base.

7. The method according to claim 2 , wherein the first operation is initialised when the count value corresponds to the start trigger value.

8. The method according to claim 1 , wherein the method further comprises initiating a second operation in a second module, comprising:
generating the second time base in the second module based on the clock signal; and
initializing the second operation in the second module based on the start trigger value and a current value of the second time base in the second module.

9. The method according to claim 8 , wherein the second time base comprises a count value generated in each of the first and second modules from the clock signal.

10. The method according to claim 8 , wherein the second sync value corresponds to a reset of the count value in each of the first and second modules.

11. A system for initializing a first operation in a first module at a start time value in a first time base, the system comprising:
a clock for generating a clock signal;
a count circuit for generating a second time base in the first module based on the clock signal;
a first circuit for determining a first sync value in the first time base corresponding to a second sync value in the second time base;
a second circuit for determining a start trigger value in the second time base based on the first sync value and the start time value in the first time base;
wherein the first module comprises a third circuit for initializing the first operation in the first module based on the start trigger value and a current value of the second time base, and
wherein the second time base is different from the first time base.

12. The system according to claim 11 , wherein the circuit for generating the second time base comprises a count circuit for generating a count value from the clock signal.

13. The system according to claim 11 , wherein the first circuit for determining a first sync value is adapted for determining the first sync value in dependence on a time of receipt of a sync signal in the first time base, and further comprising a fourth circuit for determining the second sync value, adapted for determining the second sync value corresponding to a value in the second time base determined by receipt of the sync signal by the first module.

14. The system according to claim 12 , wherein the second sync value corresponds to a reset value of the count circuit.

15. The system according to claim 11 , wherein the second circuit for determining a start trigger value is adapted to determine a relative start time in the first time base based on the start time value and the first sync value, wherein the start trigger value is a value in the second time base corresponding to the relative start time in the first time base.

16. The system according to claim 11 , wherein the second circuit for determining a start trigger value is adapted to determine a relative start time in the first time base based on the start time value and the first sync value, wherein the start trigger value corresponds to a count value in the second time base corresponding to the relative start time in the first time base.

17. The system according to claim 11 , wherein the third circuit for initializing the first operation is adapted to initialise the first operation when the count value corresponds to the start trigger value.

18. The system according to claim 11 , wherein the system is further adapted for initiating a second operation in a second module, wherein the system further comprises:
a fifth circuit for generating a second time base in the second module based on the clock signal;
wherein the second module comprises a sixth circuit for initializing the second operation in the second module based on the start trigger value and a current value in the second time base.

19. The system according to claim 18 , wherein the second time base comprises a count value generated in each of the first and second modules from the clock signal.

20. The system according to claim 11 , wherein the first module is one of a plurality of modules connected to a controller via a first network, and the controller transmits one or more instructions identifying the first operation via the first network to the first module.

21. A charged particle lithography system comprising:
a charged particle beam source for producing a charged particle beam;
an aperture array for generating a plurality of charged particle beamlets from the charged particle beam;
a beam switching module including beamlet blanker array comprising blanking electrodes for blanking selected ones of the charged particle beamlets;
a pattern data streaming module for transmitting pattern data to the beam switching module;
a projection optics module including a beam deflector array for scanning the unblanked beamlets across the surface of a target;
a moveable stage for carrying the target; and
a stage control module for controlling movement of the moveable stage;
the system further comprising a system according to claim 11 .

22. The charged particle lithography system according to claim 21 , wherein:
the first module comprises the stage control module and the first operation comprises a predetermined movement of the stage during a scan;
the second module comprises the projection optics module and the second operation comprises a predetermined scanning deflection of the unblanked beamlets across a surface of target; and
the third module comprises the pattern data stre

Assignees

• Mapper Lithography Ip Bv

Inventors

• Steenstra Herre Tjerk

Classifications

• H04L7/0008

  Synchronisation information channels, e.g. clock distribution lines · CPC title

• H01J2237/31766

  Continuous moving of wafer · CPC title

• G03F7/2059

  using a scanning corpuscular radiation beam, e.g. an electron beam · CPC title

• H01J37/243 Primary

  Beam current control or regulation circuits (H01J37/241 takes precedence) · CPC title

• H01J37/3177

  Multi-beam, e.g. fly's eye, comb probe · CPC title