Determining apparatus for determining object stored in cassette

Patent metadata

Field	Value
Publication number	US-10094951-B2
Application number	US-201715666215-A
Country	US
Kind code	B2
Filing date	Aug 1, 2017
Priority date	Aug 12, 2016
Publication date	Oct 9, 2018
Grant date	Oct 9, 2018

Abstract

Apparatus determines whether a stored object is a wafer alone or a frame unit formed by uniting the wafer and a ring frame. The apparatus includes first and second detecting units, the second detecting unit being stored more shallowly than the first detecting unit. The apparatus determines whether light transmitted by the first detecting unit is blocked by the object and does not reach a light receiving portion of the first detecting unit. When light transmitted from the second detecting unit is blocked by the object and does not reach a light receiving portion of the second detecting unit, the apparatus determines that the object is the frame unit, whereas when the light transmitted from the second detecting unit is not blocked by the object and reaches the light receiving portion of the second detecting unit, the apparatus determines that the object is the wafer.

First claim

What is claimed is:

1. Apparatus for determining whether an object stored in a storing space is a wafer alone or a frame unit formed by uniting said wafer and a ring frame comprising;
a first photodetector adapted to be inserted in the storing space and a second photodetector adapted to be inserted in the storing space more shallowly than said first photodetector;
each said first photodetector and said second photodetector including corresponding first and second light transmitting portions and corresponding first and second light receiving portions spaced from each other by a predetermined distance in a horizontal direction;
said first and second photodetectors being secured to a support member that moves vertically and horizontally;
the support member vertically aligning the first and second photodetectors with the storing space and inserting said first and second photodetectors into the storing space to a predetermined position where light transmitted from said first light transmitting portion of said first photodetector is blocked by the object and does not reach said light receiving portion of said first photodetector;
wherein light transmitted from said second light transmitting portion of said second photodetector is blocked by the object and does not reach second light receiving portion of said second photodetector when the object is the frame unit, and the light transmitted from said second light transmitting portion of said second photodetector is not blocked by the object and reaches said second light receiving portion of said second photodetector when, the object is the wafer.

2. The determining apparatus according to claim 1 , further comprising:
a third photodetector secured to the support member for detecting the frame unit;
said third photodetector having a third light transmitting portion and a third light receiving portion spaced from each other by a predetermined distance in a horizontal direction parallel to a line connecting said third light transmitting portion and said third light receiving portion of said first photodetector, said predetermined distance between said third light transmitting portion and said third light receiving portion of said third photodetector being shorter than said predetermined distance between said first light transmitting portion and said first light receiving portion of said first photodetector;
said support member moving said third photodetector towards the space to determine whether light transmitted from said first light transmitting portion of said first photodetector is blocked by the object and does not reach first light receiving portion of said first photodetector;
wherein when light transmitted from said third light transmitting portion of said third photodetector is reflected on the object and then reaches said third light receiving portion of said third photodetector, the object is the frame unit.

Assignees

• Disco Corp

Inventors

• Togashi Ken
• Tsukamoto Masahiro

Classifications

• G01V8/20 Primary

  using multiple transmitters or receivers · CPC title

• H10P72/0611 Primary

  Sorting devices · CPC title

• G01V8/12 Primary

  using one transmitter and one receiver · CPC title

• H10P72/34

  the wafers being stored in a carrier, involving loading and unloading · CPC title

• H10P72/18

  characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports · CPC title