Electromechanical transducer element, method of producing electromechanical transducer element, inkjet recording head, and inkjet recording apparatus
US-9199458-B2 · Dec 1, 2015 · US
US10090454B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10090454-B2 |
| Application number | US-201314380670-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 19, 2013 |
| Priority date | Feb 24, 2012 |
| Publication date | Oct 2, 2018 |
| Grant date | Oct 2, 2018 |
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A method for producing an electric contact-connection of a multilayer component is disclosed. In an embodiment, the method includes providing a main body of the multilayer component having internal electrode layers, applying an electrically conductive material and applying a photosensitive material on the electrically conductive material. The method further includes structuring the electrically conductive material via the photosensitive material such that the internal electrode layers alternatingly are covered and uncovered by the electrically conductive material and applying an insulating material after structuring the electrically conductive material such that the internal electrode layers are alternatingly covered by the electrically conductive material and by the insulating material.
Opening claim text (preview).
The invention claimed is: 1. A method for producing an electric contact-connection of a multilayer component, the method comprising: providing a main body of the multilayer component having internal electrode layers; applying an electrically conductive material; applying a photosensitive material on the electrically conductive material; structuring the electrically conductive material via the photosensitive material such that the internal electrode layers alternatingly are covered and uncovered by the electrically conductive material; and applying an insulating material after structuring the electrically conductive material such that the internal electrode layers are alternatingly covered by the electrically conductive material and by the insulating material. 2. The method according to claim 1 , further comprising completely removing the photosensitive material after structuring the electrically conductive material. 3. The method according to claim 1 , wherein structuring the electrically conductive material comprises providing the photosensitive material as an etching stop. 4. The method according to claim 1 , further comprising structuring the photosensitive material, wherein structuring the electrically conductive material and structuring the photosensitive material include using three different solvents. 5. The method according to claim 4 , wherein one of the three solvents is water. 6. The method according to claim 1 , further comprising measuring the main body to determine a position of the internal electrode layers before applying the photosensitive material. 7. The method according to claim 6 , further comprising structuring of the photosensitive material is effected by an exposure mask, wherein the exposure mask is selected in accordance with a result of the measuring of the main body. 8. The method according to claim 1 , wherein the insulating material and the electrically conductive material are arranged in strip-shaped fashion alternatingly above the internal electrode layers.
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