Substrate for epitaxial growth, manufacturing method therefor, and substrate for superconducting wire

US10087552B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-10087552-B2
Application numberUS-201314432827-A
CountryUS
Kind codeB2
Filing dateAug 23, 2013
Priority dateOct 5, 2012
Publication dateOct 2, 2018
Grant dateOct 2, 2018

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  1. Title

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

An objective of the present invention is to provide a copper substrate for epitaxial growth, which has higher biaxial crystal orientation, and a method for manufacturing the same. The substrate for epitaxial growth of the present invention contains a biaxially crystal-oriented copper layer, wherein the full width at half maximum Δϕ of a peak based on the pole figure of the copper layer is within 5° and the tail width Δβ of the peak based on the pole figure is within 15° Such a substrate for epitaxial growth is manufactured by a 1 st step of performing heat treatment of a copper layer so that Δϕ is within 6° and the tail width Δβ is within 25°, and after the 1 st step, a 2 nd step of performing heat treatment of the copper layer at a temperature higher than the temperature for heat treatment in the 1 st step, so that Δϕ is within 5° and the tail width Δβ is within 15°.

First claim

Opening claim text (preview).

We claim: 1. A substrate for epitaxial growth, containing a biaxially crystal-oriented copper layer, wherein the full width at half maximum ΔΦ of a peak based on the pole figure of the copper layer is within 5°, and the tail width Δβ of the peak based on the pole figure is within 15°. 2. The substrate for epitaxial growth according to claim 1 , further comprising a protective layer containing nickel or a nickel alloy on the copper layer, wherein the protective layer has a thickness of 1 μm or more and 5 μm or less, the full width at half maximum ΔΦ of a peak based on the pole figure of the protective layer is within 6°, and the surface roughness Ra is 20 nm or less. 3. The substrate for epitaxial growth according to claim 1 , further comprising a protective layer containing nickel or a nickel alloy on the copper layer, wherein the protective layer has the full width at half maximum Δφ of a peak based on the pole figure of the protective layer is within 6°, and the surface roughness Ra is 20 nm or less. 4. A method for manufacturing the substrate for epitaxial growth according to claim 1 , comprising a 1st step of performing heat treatment of a copper layer so that ΔΦ is within 6° and the tail width Δβ is within 25°, and a 2nd step of performing heat treatment of the copper layer after the 1st step at a temperature higher than the temperature for heat treatment in the 1st step, so that ΔΦ is within 5° and the tail width Δβ is within 15°. 5. A substrate for a superconducting wire, comprising the substrate for epitaxial growth according to claim 1 laminated on a nonmagnetic metal plate. 6. A substrate for a superconducting wire, comprising the substrate for epitaxial growth according to claim 2 laminated on a nonmagnetic metal plate.

Assignees

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Classifications

  • Films or wires on bases or cores · CPC title

  • with tin as the next major constituent · CPC title

  • C22F1/08Primary

    of copper or alloys based thereon · CPC title

  • being provided with a buffer layer, e.g. a lattice matching layer · CPC title

  • Electricity · mapped topic

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Frequently asked questions

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What does patent US10087552B2 cover?
An objective of the present invention is to provide a copper substrate for epitaxial growth, which has higher biaxial crystal orientation, and a method for manufacturing the same. The substrate for epitaxial growth of the present invention contains a biaxially crystal-oriented copper layer, wherein the full width at half maximum Δϕ of a peak based on the pole figure of the copper layer is withi…
Who is the assignee on this patent?
Toyo Kohan Co Ltd, Sumitomo Electric Industries
What technology area does this patent fall under?
Primary CPC classification C22F1/08. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Tue Oct 02 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).