Structure

US10087109B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-10087109-B2
Application numberUS-201715716847-A
CountryUS
Kind codeB2
Filing dateSep 27, 2017
Priority dateNov 10, 2016
Publication dateOct 2, 2018
Grant dateOct 2, 2018

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2θ=32.0° by X-ray diffraction as γ, and taking a peak intensity detected near diffraction angle 2θ=32.8° as δ, a peak intensity ratio γ/δ is not less than 0% and not more than 150%.

First claim

Opening claim text (preview).

What is claimed is: 1. A structure including a polycrystalline substance of yttrium oxyfluoride as a main component, the yttrium oxyfluoride having an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance being less than 100 nanometers, when taking a peak intensity detected near diffraction angle 2θ=32.0° by X-ray diffraction as γ, and taking a peak intensity detected near diffraction angle 2θ=32.8° as δ, a peak intensity ratio γ/δ being not less than 0% and not more than 150%. 2. The structure according to claim 1 , wherein the peak intensity ratio γ/δ is not more than 120%. 3. The structure according to claim 1 , wherein the peak intensity ratio γ/δ is not more than 110%. 4. The structure according to claim 1 , wherein the structure further includes a polycrystalline substance of yttrium fluoride, when taking a peak intensity detected near diffraction angle 2θ=24.3° by X-ray diffraction as α, and taking a peak intensity detected near diffraction angle 2θ=25.7° as β, a peak intensity ratio α/β being not less than 0% and less than 100%. 5. The structure according to claim 1 , wherein the average crystallite size is less than 50 nanometers. 6. The structure according to claim 1 , wherein the average crystallite size is less than 30 nanometers. 7. The structure according to claim 1 , wherein the average crystallite size is less than 20 nanometers. 8. The structure according to claim 1 , wherein when taking a peak intensity detected near diffraction angle 2θ=29.1° by X-ray diffraction as ε, a proportion of the ε to the δ is less than 1%. 9. The structure according to claim 1 , wherein when taking a peak intensity detected near diffraction angle 2θ=29.1° by X-ray diffraction as ε, a proportion of the ε to the α is 0%.

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What does patent US10087109B2 cover?
According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2θ=32.0° by X-ray diffraction as γ, and taking a peak int…
Who is the assignee on this patent?
Toto Ltd
What technology area does this patent fall under?
Primary CPC classification H01J37/32495. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Oct 02 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).